Device for neuroprosthetics with autonomous tunable actuators
A microelectromechanical device and method for neuroprosthetics comprises microactuators and microelectrodes. The microelectrodes are to be positioned in a nerve bundle and bonded with the microactuators through an interconnect. The position of each of the microactuators can be individually tuned through control signals so that the microelectrodes are implanted at desired positions in the nerve bundle. The control signals are transmitted to the microactuators and generated with a open-loop or closed-loop control scheme that uses signals acquired by the microelectrodes from the nerve bundle as feedback.
1. A microelectromechanical (MEMS) system for monitoring biological signals, the MEMS system comprising:
at least one tunable microactuator;
at least one sensor in signal communication with the at least one tunable microactuator, wherein the at least one sensor is configured to be disposed in a biological tissue and to receive the biological signals generated by the biological tissue, the at least one sensor being at least one microsensor or at least one nanosensor, and a first sensor of the at least one sensor comprising:
a polysilicon element having a first end and a second end, the first end coupled to the at least one tunable microactuator,
a conventional implant with a first end configured to be disposed in the biological tissue and a second end; and
an interconnect microbonding the polysilicon element to the second end of the conventional implant at the second end of the polysilicon element; and
microcontroller in signal communication with the at least one tunable microactuator and the at least one sensor, the microcontroller receiving the biological signals and, based on the biological signals, controlling the at least one tunable microactuator to reposition the at least one sensor in microscale.
2. The MEMS system of claim 1 , wherein the at least one sensor is configured to be disposed in a nerve bundle.
3. The MEMS system of claim 1 , wherein the at least one sensor is repositioned in an increment ranging from about 2 μm to about 10 μm.
4. The MEMS system of claim 1 , wherein the polysilicon element of the first sensor has a width less than one micrometer.
5. The MEMS system of claim 1 , wherein the polysilicon element of the first sensor has a width less than one millimeter.
6. The MEMS system of claim 1 , wherein the conventional implant consists essentially of a metal that is selected from the group consisting of stainless steel, platinum, platinum-iridium, silver, silver-chloride, gold and tungsten.
7. The MEMS system of claim 1 , wherein the conventional implant comprises a material that is selected from the group consisting of optical fiber, light emitting diodes, organic light emitting diodes, and other microscale light sources emitting diodes.
8. The MEMS system of claim 1 , wherein the interconnect allows a perpendicular entry of the at least one sensor into the biological tissue with respect to a surface of the biological tissue.
9. The MEMS system of claim 1 , wherein the interconnect enables the polysilicon element to enter into the biological tissue at an any angle.
10. The MEMS system of claim 1 , wherein the interconnect is conductive.
11. The MEMS system of claim 1 , wherein the biological signals are transmitted wirelessly by the at least one sensor to the microcontroller.
12. The MEMS system of claim 1 , further comprising one or more guide tubes each configured to dispose a corresponding sensor of the at least one sensor into the biological tissue.
13. The MEMS system of claim 12 , wherein the one or more guide tubes each comprise a tapered end that guides into the biological tissue the corresponding sensor disposed by the guide tube.
14. The MEMS system of claim 1 , wherein the at least one tunable microactuator is flip-chipped on a substrate.