Piezoelectric device including conductive layer, its manufacturing method and optical deflector
A piezoelectric device includes a substrate; an insulating layer provided on the substrate; a lower electrode layer provided on the insulating layer; a piezoelectric structure provided on the lower electrode layer, the piezoelectric structure including at least one conductive layer and multiple piezoelectric layers sandwiching the conductive layer, the conductive layer having the same crystal structure as that of the piezoelectric layers; and an upper electrode layer provided on the piezoelectric structure.
1. A piezoelectric device comprising:
a substrate;
an insulating layer provided on said substrate;
a lower electrode layer provided on said insulating layer;
a piezoelectric structure provided on said lower electrode layer, said piezoelectric structure including at least one conductive layer and multiple piezoelectric layers sandwiching said conductive layer, said conductive layer having a same crystal structure as that of said piezoelectric layers; and
an upper electrode layer provided on said piezoelectric structure.
2. The piezoelectric device as set forth in claim 1 , wherein said crystal structure is perovskite.
3. The piezoelectric device as set forth in claim 2 , wherein each of said piezoelectric layers comprises one of lead zirconate titanate (PZT), lead niobate titanate zirconate (PNZT), lead lanthane titanate zirconate (PLZT), lead lanthane titanate (PLT), lead magneciumate niobate (PMN) and lead manganate niobate (PMNN).
4. The piezoelectric device as set forth in claim 2 , wherein said conductive layer comprises one of strontium ruthenium oxide SrRuO 3 (SRO), lanthan nickel oxide LaNiO 3 (LNO) and barium ruthenium oxide BaRuO 3 (BRO).
5. The piezoelectric device as set forth in claim 4 , wherein said conductive layer is from 100 nm to 20 nm.
6. An optical deflector comprising:
a mirror;
a first frame surrounding said mirror;
a first piezoelectric actuator comprising said piezoelectric device as set forth in claim 1 , coupled between said mirror and said first frame and adapted to rock said mirror around a first axis.
7. The optical deflector as set forth in claim 6 , further comprising:
a second frame surrounding said first frame; and
a second piezoelectric actuator comprising said piezoelectric device as set forth in claim 1 , coupled between said first frame and said second frame and adapted to rock said mirror around a second axis.
8. A method for manufacturing a piezoelectric device comprising:
forming an insulating layer provided on a substrate;
forming a lower electrode layer on said insulating layer;
forming a piezoelectric structure provided on said lower electrode layer, said piezoelectric structure including at least one conductive layer and multiple piezoelectric layers sandwiching said conductive layer, said conductive layer having a same crystal structure as that of said piezoelectric layers; and
forming an upper electrode layer formed on said piezoelectric structure.
9. The method as set forth in claim 8 , wherein said crystal structure is perovskite.
10. The method as set forth in claim 9 , wherein each of said piezoelectric layers comprises one of lead zirconate titanate (PZT), lead niobate titanate zirconate (PNZT), lead lanthane titanate zirconate (PLZT), lead lanthane titanate (PLT), lead magneciumate niobate (PMN) and lead manganate niobate (PMNN).
11. The method as set forth in claim 9 , wherein said conductive layer comprises one of strontium ruthenium oxide SrRuO 3 (SRO), lanthan nickel oxide LaNiO 3 (LNO) and barium ruthenium oxide BaRuO 3 (BRO).
12. The method as set forth in claim 11 , wherein said conductive layer is less than 100 nm, preferably, about 50 nm.
13. The method as set forth in claim 8 , wherein forming of said piezoelectric structure comprises:
forming said piezoelectric layers in an ion plating apparatus; and
forming said conductive layer in a sputtering apparatus, wherein said ion plating apparatus and said sputtering apparatus are linked by a carrier vacuum chamber.