Pre-treated functionalized multi-walled carbon nanotube based methane sensor
A method of manufacturing a functionalized pre-treated carbon nanotube. Atomic Layer deposition is utilized to functionalize a pre-treated carbon nanotube. The functionalized pre-treated carbon nanotube may be used in a chemiresistor, including for methane detection.
1. A process for manufacturing a chemresistor comprising:
fabricating electrodes on a substrate;
depositing carbon nanotubes on the fabricated electrodes;
pre-treating the carbon nanotubes for 1-20 minutes with ozone and UV to induce surface defects; and
depositing by atomic layer deposition, a plurality of nanoparticles consisting of a metal oxide functionalizing agent on the surface defects.
2. The process of claim 1 , wherein depositing the carbon nanotubes comprises dissolving the carbon nanotubes in a solvent, depositing the solution on the fabricated electrodes, and removing the solvent.
3. The process of claim 1 , wherein atomic layer deposition is at a temperature between 175° C. and 220° C.
4. The process of claim 3 , wherein the temperature is 200° C. to 220° C.
5. The process of claim 4 , wherein the atomic layer deposition includes the step of exposing the carbon nanotubes to a first precursor comprising diethylzinc and a second precursor comprising water.
6. The process of claim 1 , wherein the deposited carbon nanotubes are multi-walled carbon nanotubes (MWCNT).
7. The process of claim 6 , wherein depositing the MWCNT further comprises drop depositing a solution of MWCNT and baking until the solvent is evaporated.
8. The process of claim 1 , further comprising selective functionalization.
9. The process for manufacturing a chemresistor of claim 1 , wherein the deposited metal is deposited to a thickness of 1-4 nm.