Encapsulating film stacks for OLED applications
Embodiments described herein generally relate to a method and apparatus for encapsulating an OLED structure, more particularly, to a TFE structure for an OLED structure. The TFE structure includes at least one dielectric layer and at least two barrier layers, and the TFE structure is formed over the OLED structure. The at least one dielectric layer is deposited by atomic layer deposition (ALD). Having the at least one dielectric layer formed by ALD in the TFE structure improves the barrier performance of the TFE structure.
1. A thin film encapsulation structure, comprising:
at least two dielectric layers, at least one of the two dielectric layers is formed by an atomic layer deposition process;
at least two barrier layers, wherein the at least two dielectric layers are sandwiched between the at least two barrier layers, wherein the dielectric layers comprise different materials than that of the barrier layers; and
a buffer layer disposed between the at least two barrier layers and above one of the dielectric layers, wherein the at least two barrier layers includes a first barrier layer and a second barrier layer, and at least one of the dielectric layers is disposed on the first barrier layer, and the second barrier layer is disposed on the buffer layer, and at least one of the dielectric layers is disposed on the buffer layer.
2. The thin film encapsulation structure of claim 1 , wherein the barrier layers have similar film properties.
3. The thin film encapsulation structure of claim 2 , wherein the at least one of the dielectric layers is an aluminum oxide layer and the at least two barrier layers are silicon nitride layers.
4. The thin film encapsulation structure of claim 1 , wherein the buffer layer is a hexamethyldisiloxane layer.
5. The thin film encapsulation structure of claim 1 , wherein the at least two dielectric layers includes a first inorganic layer and a second inorganic layer.
6. The thin film encapsulation structure of claim 5 , wherein the first inorganic layer is disposed on the first barrier layer, the buffer layer is disposed on the first inorganic layer, the second inorganic layer is disposed on the buffer layer, and the second barrier layer is disposed on the second inorganic layer.
7. A thin film encapsulation structure comprising:
at least two dielectric layers, at least one of the two dielectric layers is formed by an atomic layer deposition process;
at least two barrier layers, wherein the at least two dielectric layers are sandwiched between the at least two barrier layers, wherein the dielectric layers comprise different materials than that of the barrier layers, wherein the at least two dielectric layers includes a first inorganic layer and a second inorganic layer, the at least two barrier layers include a first barrier layer, a second barrier layer, and a third barrier layer, wherein the first inorganic layer is disposed on the first barrier layer, the second barrier layer is disposed on the first inorganic layer, the second inorganic layer is disposed on the second barrier layer, and the third barrier layer is disposed on the second inorganic layer.
8. An OLED device, comprising:
an OLED structure; and
a thin film encapsulation structure formed over the OLED structure, wherein the thin film encapsulation structure comprises:
at least two dielectric layers, one of the at least two dielectric layers that is formed by an atomic layer deposition process; and
at least two barrier layers with similar film properties, wherein the at least two dielectric layers are sandwiched between the at least two barrier layers, wherein the dielectric layers comprise different materials than that of the barrier layers, wherein the at least two dielectric layers includes a first inorganic layer and a second inorganic layer, the at least two barrier layers include a first barrier layer, a second barrier layer, and a third barrier layer, wherein the first inorganic layer is disposed on the first barrier layer, the second barrier layer is disposed on the first inorganic layer, the second inorganic layer is disposed on the second barrier layer, and the third barrier layer is disposed on the second inorganic layer.
9. The OLED device of claim 8 , wherein the thin film encapsulation structure further comprises a buffer layer disposed between the at least two barrier layers.
10. The OLED device of claim 9 , wherein the first inorganic layer is disposed on the first barrier layer, the buffer layer is disposed on the first inorganic layer, and the second barrier layer is disposed on the buffer layer.
11. The OLED device of claim 10 , wherein the second inorganic layer is disposed between the buffer layer and the second barrier layer.