Multi-axis piezoelectric stress-sensing device, multi-axis piezoelectric stress-sensing device polarization method, and piezoelectric sensing detection system thereof
A multi-axis piezoelectric stress-sensing device, a multi-axis piezoelectric stress-sensing device polarization method, and a piezoelectric sensing detection system thereof are disclosed. The piezoelectric sensing detection system is used for a machining tool. The multi-axis piezoelectric stress-sensing device includes a piezoelectric sensing film, a first electrode, a second electrode, a third electrode, and a fourth electrode. The piezoelectric sensing film has four corners. The first electrode, the second electrode, the third electrode and the fourth electrode are located at the four corners of the piezoelectric sensing film, and at least one electrode is used to polarize another electrode according to at least one polarization direction.
1. A multi-axis piezoelectric stress-sensing device, comprising:
a piezoelectric sensing film having four corners;
a first electrode;
a second electrode;
a third electrode; and
a fourth electrode;
wherein the first electrode, the second electrode, the third electrode, and the fourth electrode are located at the four corners of the piezoelectric sensing film, respectively;
wherein one electrode of one corner is used to polarize another electrode of another corner according to at least one polarization direction, so that the piezoelectric sensing film has multiple polarization directions.
2. The multi-axis piezoelectric stress-sensing device as claimed in claim 1 , wherein the first electrode, the second electrode, the third electrode, and the fourth electrode are disposed at the four corners of the piezoelectric sensing film in a clockwise sequence, and the polarization directions include a direction of the first electrode toward the second electrode, a direction of the fourth electrode toward the third electrode, a direction of the fourth electrode toward the first electrode, a direction of the third electrode toward the second electrode, a direction of the fourth electrode toward the second electrode, and a direction of the third electrode toward the first electrode, so that the piezoelectric sensing film has six polarization directions.
3. The multi-axis piezoelectric stress-sensing device as claimed in claim 1 , wherein the piezoelectric sensing film is a surface transverse length polarizing film.
4. A multi-axis piezoelectric stress-sensing device polarization method, comprising:
providing a piezoelectric sensing film;
providing a first electrode, a second electrode, a third electrode, and a fourth electrode which are disposed at the four corners of the piezoelectric sensing film, respectively; and
applying one electrode of one corner to polarize another electrode of another corner according to at least one polarization direction, so that the piezoelectric sensing film has multiple polarization directions.
5. The multi-axis piezoelectric stress-sensing device polarization method as claimed in claim 4 , further comprising:
disposing the first electrode, the second electrode, the third electrode, and the fourth electrode at the four corners of the piezoelectric sensing film in a clockwise sequence;
a polarizing process occurring in the direction of the first electrode toward the second electrode;
a polarizing process occurring in the directions of the third electrode toward the first electrode and the second electrode respectively; and
a polarizing process occurring in the direction of the fourth electrode toward the first electrode, the direction of the fourth electrode toward the second electrode, and the direction of the fourth electrode toward the third electrode, so that the piezoelectric sensing film has six polarization directions.