Manufacturing method of semiconductor device
A semiconductor device and a manufacturing method thereof are disclosed. The semiconductor device includes a silicon substrate, a spacer, a doped region, and a deep trench isolation (DTI). The silicon substrate has a deep trench. The spacer is formed on an upper portion of the sidewall of the deep trench. The doped region is formed on a lower portion of the sidewall of the deep trench. The deep trench isolation is formed in the deep trench.
1. A manufacturing method of a semiconductor device, comprising:
forming a deep trench in a silicon substrate;
forming a spacer on an upper portion of the sidewall of the deep trench, wherein a height of the spacer is about 1.5-4 KÅ;
forming a doped region on a lower portion of the sidewall of the deep trench, wherein the doped region is p type;
forming a deep trench isolation in the deep trench;
forming a P well in the silicon substrate; and
after forming the spacer, forming an n type-doped region adjacent to the P well and separating the P well and the doped region from each other for forming a junction between the doped region and the n typed-doped region.
2. The manufacturing method according to claim 1 , wherein the doped region is formed by performing an implantation process on the lower portion of the sidewall of the deep trench.
3. The manufacturing method according to claim 2 , wherein the implantation process is performed at an angle of 0° to less than 10°, and the angle of 0° is defined as perpendicular to the top surface of the silicon substrate.
4. The manufacturing method according to claim 2 , wherein the implantation process comprises a plurality of implanting steps performed at different angles, and the angles range from 0° to less than 10°.
5. The manufacturing method according to claim 2 , wherein the implantation process is performed after the spacer is formed.
6. The manufacturing method according to claim 1 , wherein forming the deep trench in the silicon substrate comprises:
providing a patterned hard mask on the silicon substrate; and
etching the silicon substrate according to the patterned hard mask for forming a shallow trench having a depth of about 1.5-4 KÅ.
7. The manufacturing method according to claim 6 , wherein forming the spacer comprises:
forming an oxide layer in the shallow trench; and
etching the silicon substrate and the oxide layer according to the patterned hard mask after forming the shallow trench for forming the deep trench having a depth of 2-4 μm, wherein the oxide layer forms the spacer on the upper portion of the deep trench.
8. The manufacturing method according to claim 7 , wherein the oxide layer is formed by oxidizing the sidewall of the shallow trench.
9. The manufacturing method according to claim 1 , further comprising:
forming at least an NMOS transistor in the P well.