Semiconductor device comprising a transistor and a capacitor
A semiconductor device comprising a first transistor, a second insulating film, a conductive film, and a capacitor is provided. The first transistor comprises a first oxide semiconductor film, a gate insulating film over the first oxide semiconductor film, and a gate electrode over the gate insulating film. The second insulating film is provided over the gate electrode. The conductive film is electrically connected to the first oxide semiconductor film. The capacitor comprises a second oxide semiconductor film, the second insulating film over the second oxide semiconductor film, and the conductive film over the second insulating film. The first oxide semiconductor film comprises a first region and a second region. Each of a carrier density of the second region and a carrier density of the second oxide semiconductor film is higher than a carrier density of the first region.
1. A semiconductor device comprising:
a first transistor comprising:
a first oxide semiconductor film over a first insulating film;
a gate insulating film over the first oxide semiconductor film; and
a gate electrode over the gate insulating film,
a second insulating film over the gate electrode;
a conductive film electrically connected to the first oxide semiconductor film; and
a capacitor comprising:
a second oxide semiconductor film over the first insulating film;
the second insulating film over the second oxide semiconductor film; and
the conductive film over the second insulating film,
wherein the second insulating film is in direct contact with the first oxide semiconductor film, the gate insulating film, the gate electrode, the conductive film, and the second oxide semiconductor film,
wherein the first oxide semiconductor film comprises a first region and a second region,
wherein the gate electrode and the first region overlap each other,
wherein the second region is in direct contact with the second insulating film, and
wherein each of a carrier density of the second region and a carrier density of the second oxide semiconductor film is higher than a carrier density of the first region.
2. The semiconductor device according to claim 1 ,
wherein the second insulating film is in direct contact with a top surface and a side surface of the gate insulating film.
3. The semiconductor device according to claim 1 , wherein the gate electrode does not overlap with the second region.
4. The semiconductor device according to claim 1 ,
wherein the conductive film is a transparent conductive film.
5. The semiconductor device according to claim 1 ,
wherein the conductive film comprises any one of indium tin oxide, indium oxide including tungsten oxide, indium zinc oxide including tungsten oxide, indium oxide including titanium oxide, indium tin oxide including titanium oxide, indium zinc oxide, and indium tin oxide including silicon oxide.
6. The semiconductor device according to claim 1 , wherein each of the gate electrode and the conductive film comprises copper.
7. The semiconductor device according to claim 1 , further comprising an organic resin film over the second insulating film,
wherein the organic resin film comprises any one of polyimide, acrylic, polyamide, and epoxy.
8. The semiconductor device according to claim 1 ,
wherein the first transistor is provided in a pixel portion, and
wherein the pixel portion comprises an organic electroluminescent element.
9. The semiconductor device according to claim 1 , further comprising a second transistor in a driver circuit portion,
wherein the first transistor is provided in a pixel portion, and
wherein the first transistor and the second transistor have different structures.
10. A semiconductor device comprising:
a first transistor comprising:
a first oxide semiconductor film over a first insulating film;
a gate insulating film over the first oxide semiconductor film; and
a gate electrode over the gate insulating film,
a second insulating film over the gate electrode;
a conductive film electrically connected to the first oxide semiconductor film; and
a capacitor comprising:
a second oxide semiconductor film over the first insulating film;
the second insulating film over the second oxide semiconductor film; and
the conductive film over the second insulating film,
wherein the second insulating film is in direct contact with the first oxide semiconductor film, the gate insulating film, the gate electrode, the conductive film, and the second oxide semiconductor film,
wherein the first oxide semiconductor film comprises a first region and a second region,
wherein the gate electrode and the first region overlap each other,
wherein the second region is in direct contact with the second insulating film,
wherein each of a carrier density of the second region and a carrier density of the second oxide semiconductor film is higher than a carrier density of the first region, and
wherein each of the first oxide semiconductor film and the second oxide semiconductor film comprises a crystalline structure.
11. The semiconductor device according to claim 10 ,
wherein the second insulating film is in direct contact with a top surface and a side surface of the gate insulating film.
12. The semiconductor device according to claim 10 , wherein the gate electrode does not overlap with the second region.
13. The semiconductor device according to claim 10 ,
wherein the conductive film is a transparent conductive film.
14. The semiconductor device according to claim 10 ,
wherein the conductive film comprises any one of indium tin oxide, indium oxide including tungsten oxide, indium zinc oxide including tungsten oxide, indium oxide including titanium oxide, indium tin oxide including titanium oxide, indium zinc oxide, and indium tin oxide including silicon oxide.
15. The semiconductor device according to claim 10 , wherein each of the gate electrode and the conductive film comprises copper.
16. The semiconductor device according to claim 10 , further comprising an organic resin film over the second insulating film,
wherein the organic resin film comprises any one of polyimide, acrylic, polyamide, and epoxy.
17. The semiconductor device according to claim 10 ,
wherein the first transistor is provided in a pixel portion, and
wherein the pixel portion comprises an organic electroluminescent element.
18. The semiconductor device according to claim 10 , further comprising a second transistor in a driver circuit portion,
wherein the first transistor is provided in a pixel portion, and
wherein the first transistor and the second transistor have different structures.
19. A semiconductor device comprising:
a first transistor comprising:
a first film comprising an oxide semiconductor material over a first insulating film;
a gate insulating film over the first film; and
a gate electrode over the gate insulating film,
a second insulating film over the gate electrode;
a conductive film electrically connected to the first film; and
a capacitor comprising:
a second film comprising an oxide semiconductor material over the first insulating film;
the second insulating film over the second film; and
the conductive film over the second insulating film,
wherein the second insulating film is in direct contact with the first film, the gate insulating film, the gate electrode, the conductive film, and the second film,
wherein the first film comprises a first region, a second region, and a third region,
wherein the gate electrode and the first region overlap each other,
wherein the conductive film and the second region overlap each other,
wherein the third region is provided between the first region and the second region,
wherein the third region is in direct contact with the second insulating film, and
wherein each of the third region and the second film comprises a rare gas element.
20. The semiconductor device according to claim 19 ,
wherein the second insulating film is in direct contact with a top surface and a side surface of the gate insulating film.
21. The semiconductor device according to claim 19 , wherein the gate electrode does not overlap with the third region.
22. The semiconductor device according to claim 19 ,
wherein the conductive film is a transparent conductive film.
23. The semiconductor device according to claim 19 ,
wherein the conductive film comprises any one of indium tin oxide, indium oxide including tungsten oxide, indium zinc oxide including tungsten oxide, indium oxide including titanium oxide, indium tin oxide including titanium oxide, indium zinc oxide, and indium tin oxide including silicon oxide.
24. The semiconductor device according to claim 19 , wherein each of the gate electrode and the conductive film comprises copper.
25. The semiconductor device according to claim 19 , further comprising an organic resin film over the second insulating film,
wherein the organic resin film comprises any one of polyimide, acrylic, polyamide, and epoxy.
26. The semiconductor device according to claim 19 ,
wherein the first transistor is provided in a pixel portion, and
wherein the pixel portion comprises an organic electroluminescent element.
27. The semiconductor device according to claim 19 , further comprising a second transistor in a driver circuit portion,
wherein the first transistor is provided in a pixel portion, and
wherein the first transistor and the second transistor have different structures.