MEMS gyroscope device

1. A microelectromechanical system (MEMS) gyroscope device comprising:

a substrate having a surface parallel to a plane;

a first proof mass and a second proof mass positioned in space above the surface of the substrate and driven to slide back and forth past one another in a first directional axis of the plane, wherein

the first proof mass has a first recess in a side closest to the second proof mass, and

the second proof mass has a second recess in a side closest to the first proof mass;

a first pivot structure having one end coupled to the first proof mass within the first recess and an opposite end coupled to the second proof mass within the second recess;

a first anchor on the surface of the substrate, the first anchor located between the first and second recesses and coupled to a mid-point of the first pivot structure; and

a third proof mass and a fourth proof mass positioned in space above the surface of the substrate and driven to move toward and away from one another in a second directional axis of the plane that is perpendicular to the first directional axis;

wherein

the first and second proof masses move in a third directional axis that is normal to the plane in response to angular velocity in the second directional axis, and

the third and fourth proof masses move in the third directional axis in response to angular velocity in the first directional axis;

a first actuator and a second actuator respectively coupled to the first and second proof masses and respectively configured to drive the first and second proof masses in opposite directions of the first directional axis;

a third actuator and a fourth actuator respectively coupled to the third and fourth proof masses and respectively configured to drive the third and fourth proof masses in opposite directions of the second directional axis;

a first drive motion linking structure coupled to the first and third actuators, the first drive motion linking structure configured to couple drive motion provided by the first and third actuators; and

a second drive motion linking structure coupled to the second and fourth actuators, the second drive motion linking structure configured to couple drive motion provided by the second and fourth actuators.

2. The MEMS device of claim 1 , wherein

the third and fourth proof masses move in the first directional axis in response to angular velocity in the third directional axis.

3. The MEMS device of claim 1 , wherein a same drive frequency is utilized to drive the first, second, third, and fourth proof masses.

4. The MEMS device of claim 1 , wherein

the first pivot structure comprises:

a first pivot bar having a mid-point coupled to the first anchor by a first spring, a first end coupled to a first sidewall of the first recess of the first proof mass by a second spring, and a second end coupled to a first sidewall of the second recess of the second proof mass by a third spring, and

a second pivot bar having a mid-point coupled to the first anchor by a fourth spring, a first end coupled to a second sidewall of the first recess of the first proof mass by a fifth spring, and a second end coupled to a second sidewall of the second recess of the second proof mass by a sixth spring.

5. The MEMS device of claim 1 , wherein

the first pivot structure is configured to move flexibly about the first anchor in the first directional axis and in the third directional axis, wherein opposite ends of the first pivot structure are configured to move in opposite directions in the first directional axis and are configured to move in opposite directions in the third directional axis.

6. The MEMS device of claim 1 , further comprising:

a second pivot structure, wherein

the third proof mass has a third recess in a side closest to the fourth proof mass, and

the fourth proof mass has a fourth recess in a side closest to the third proof mass, and

the second pivot structure has one end coupled to the third proof mass within the third recess and an opposite end coupled to the fourth proof mass within the fourth recess; and

a second anchor on the surface of the substrate, the second anchor located between the third and fourth recesses and coupled to a mid-point of the second pivot structure.

7. The MEMS device of claim 6 , wherein

the second pivot structure comprises:

a first pivot bar having a mid-point coupled to the second anchor by a first spring, a first end coupled to a first sidewall of the third recess of the third proof mass by a second spring, and a second end coupled to a first sidewall of the fourth recess of the fourth proof mass by a third spring, and

a second pivot bar having a mid-point coupled to the second anchor by a fourth spring, a first end coupled to a second sidewall of the third recess of the third proof mass by a fifth spring, and a second end coupled to a second sidewall of the fourth recess of the fourth proof mass by a sixth spring.

8. The MEMS device of claim 6 , wherein

the second pivot structure comprises:

a first pivot bar having a mid-point coupled to the anchor by a first spring, a first end coupled to a first linking structure by a second spring, and a second end coupled to a second linking structure by a third spring,

a second pivot bar having a mid-point coupled to the anchor by a fourth spring, a first end coupled to the first linking structure by a fifth spring, and a second end coupled to the second linking structure by a sixth spring,

the first linking structure coupled to the third proof mass within the third recess by a first plurality of springs, and

the second linking structure coupled to the fourth proof mass within the fourth recess by a second plurality of springs.

9. The MEMS device of claim 1 , further comprising:

a common mode drive spring structure between the third and fourth proof masses, the common mode drive spring structure comprising:

a second anchor,

a first spring having one end coupled to the second anchor and another end coupled to the third proof mass, and

a second spring having one end coupled to the second anchor and another end coupled to the fourth proof mass.

10. The MEMS device of claim 1 , further comprising:

a first linking structure coupled between the second proof mass and an actuator, the first linking structure comprises an L-shaped bar, a mid-section of the L-shaped bar coupled to a second anchor near a corner of the second proof mass on a side of the second proof mass farthest away from the first proof mass, one end of the L-shaped bar coupled to the second proof mass by a first spring and an opposite end of the L-shaped bar coupled to the actuator by a second spring, the actuator configured to provide drive motion in the second directional axis and the first linking structure configured to flexibly pivot about the second anchor and move the second proof mass in the first directional axis.

11. The MEMS device of claim 1 , further comprising:

a first sense electrode and a second sense electrode on the surface of the substrate and respectively underneath and separated from the first and second proof masses by first and second distances in the third directional axis, and

a third sense electrode and a fourth sense electrode on the surface of the substrate and respectively underneath and separated from the third and fourth proof masses by third and fourth distances in the third directional axis.

12. The MEMS device of claim 11 , wherein

the first and second proof masses are configured to move in opposite directions in the third directional axis in response to the angular velocity in the second directional axis, and

the first and second proof masses remain substantially in parallel with the first and second sense electrodes as the first and second proof masses respectively move toward and away from the first and second electrodes in response to the angular velocity in the second directional axis.

13. The MEMS device of claim 11 , wherein

the third and fourth proof masses are configured to move in opposite directions in the third directional axis in response to the angular velocity in the first directional axis, and

the third and fourth proof masses remain substantially in parallel with the third and fourth sense electrodes as the third and fourth proof masses respectively move toward and away from the third and fourth electrodes in response to the angular velocity in the first directional axis.

14. The MEMS device of claim 1 , further comprising:

an actuator coupled to the fourth proof mass by a first linking bar and a second linking bar;

a sense frame coupled to the fourth proof mass by a first isolating bar and a second isolating bar, wherein

the first and second linking bars do not contact the sense frame, and

the sense frame is isolated from drive motion provided by the actuator; and

a first sense electrode and a second sense electrode on the surface of the substrate, separated from one another by a spacing distance in the first directional axis, the first and second electrodes extend through an opening in the sense frame, wherein

the first and second sense electrodes are respectively separated from a first and second sidewall of the opening by a first and second distance in the first directional axis, the second sidewall is opposite the first sidewall.

15. The MEMS device of claim 1 , wherein

the first, second, third, and fourth proof masses lie in a common plane that is parallel to the surface of the substrate,

the first proof mass has a first side that is closest to the second proof mass and a second side that is closest to the third proof mass, the second side is perpendicular to the first side in the common plane, and

the fourth proof mass has a third side that is closest to the third proof mass and a fourth side that is closest to the second proof mass, the fourth side is perpendicular to the first side in the common plane.