IP Library Granted Patent US 9,863,040
Granted Patent B2
US 9,863,040 · App. 15/178,601 · Granted Jan 9, 2018

Method of increasing zinc sulfide hardness

Inventors: Jitendra S. Goela (Andover, MA); Hangyao Wang (Pearland, TX); Hua Bai (Lake Jackson, TX); Michael A. Pickering (Dracut, MA)
Assignees: Dow Global Technologies LLC; Rohm and Haas Electronic Materials LLC
C23C16/306C03C17/22C09D1/00C23C16/01C23C16/305C23C16/44C23C16/46G02B1/10C03C2217/288C03C2217/78C03C2218/152
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Quick Facts
Patent No.
US 9,863,040
App. No.
15/178,601
Granted
Jan 9, 2018
Kind
B2
Abstract

A method is directed to increasing the hardness of zinc sulfide. The hardness of zinc sulfide is increased by adding selective elements within a specified range to the crystal lattice of the zinc sulfide. The increased hardness over conventional zinc sulfide does not substantially compromise the optical properties of the zinc sulfide. The zinc sulfide may be used as a protective coating for windows and domes.

Claims (5)

1. A method comprising:

a) providing a source of zinc, a source of sulfur and a source of one or more dopants chosen from selenium and silicon;

b) injecting the source of zinc as a gas at 0.2 to 1 slpm, the source of sulfur as a gas at 0.1 to 0.9 slpm and the one or more sources of selenium and silicon as a gas at 0.01 slpm to 0.1 slpm into a chemical vapor deposition chamber comprising an inert gas, the pressure in the chemical vapor deposition chamber ranges from 20 to 50 Torr; and

c) chemical vapor depositing one or more layers of a composition comprising zinc sulfide and 0.5 molar % to 10 molar % of one or more of the dopants chosen from selenium and silicon on a substrate, a temperature of the substrate is from 600° C. to 800° C.

2. The method of claim 1 , further comprising treating the composition comprising zinc sulfide and 0.5 molar % to 10 molar % of one or more of the dopants chosen from selenium and silicon by a HIP process.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Nov 26, 2019
From: ROHM AND HAAS ELECTRONIC MATERIALS LLC; CVD INCORPORATED; ROHM AND HAAS CHEMICALS LLC; ROHM AND HAAS COMPANY
To: HELLMA MATERIALS GMBH
Reel/Frame 051119/0811 →
Continuity (3)
Division 14499012 · Sep 26, 2014
Provisional Application 61883090 · Sep 26, 2013
Related Publication 20160281220A1 · Sep 29, 2016