IP Library Granted Patent US 10,424,612
Granted Patent B2
US 10,424,612 · App. 15/180,537 · Granted Sep 24, 2019

Method of forming a semiconductor device

Inventors: Stephen R. Forrest (Ewing, NJ); Xin Xu (Ewing, NJ); Christopher Kyle Renshaw (Ewing, NJ)
Assignee: THE REGENTS OF THE UNIVERSITY OF MICHIGAN
H01L27/14692H01L27/14612H01L27/307H01L27/3253H01L51/0021H01L51/0097H05K13/046H01L27/14609H01L51/0022H01L2251/5338Y02E10/549Y10T29/4913Y10T29/49128
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Quick Facts
Patent No.
US 10,424,612
App. No.
15/180,537
Granted
Sep 24, 2019
Kind
B2
Abstract

A method of forming a semiconductor device includes the steps of providing a first circuit layer including a plurality of first contacts, providing one or more semiconductor devices disposed on a stamp, the one or more semiconductor devices including a plurality of second contacts, bonding the plurality of second contacts to the plurality of first contacts via a pressure applied by the stamp.

Claims (38)

1. A method of forming an electrical circuit structure comprising:

providing a circuit sublayer on a first substrate;

depositing a photodiode material on the circuit sublayer;

positioning a first circuit layer including a plurality of first contacts on the photodiode material;

providing a second circuit layer comprising one or more semiconductor devices disposed on a stamp, the second circuit layer including a plurality of second contacts and a plurality of third contacts on a side of the one or more semiconductor devices opposite from the plurality of second contacts; and

bonding the plurality of second contacts directly to the plurality of first contacts via a pressure applied by the stamp.

2. The method of claim 1 , wherein the first circuit layer is disposed on a non-developable surface of the photodiode material.

3. The method of claim 2 , wherein the non-developable surface is curved, and the method further comprises aligning the second contacts at least partially around the non-developable curved surface in three dimensions such that the second contacts are aligned with the plurality of first contacts before the bonding.

4. The method of claim 1 , wherein the bonding includes cold welding.

5. The method of claim 1 , wherein the first circuit layer is stamped over the photodiode material.

6. The method of claim 5 , wherein the first circuit layer is stamped on a non-developable surface of the photodiode material.

7. The method of claim 1 , wherein the one or more semiconductor devices include an array of thin film transistors and the plurality of first contacts are connected to an array of photodiodes.

8. The method of claim 1

wherein the plurality of second contacts are bonded to the plurality of first contacts via cold welding; and

wherein the first circuit layer is disposed on a curved surface of the photodiode material.

9. The method of claim 8 , wherein the first circuit layer is disposed on a non-developable surface of the photodiode material.

10. The method of claim 8 , further comprising aligning the second contacts in relation to the curved surface in three dimensions such that the second contacts are aligned with the plurality of first contacts prior to the step of cold welding.

11. The method of claim 8 , wherein the circuit sublayer is stamped to the first substrate, and the photodiode material is disposed over the circuit sublayer by deposition.

12. The method of claim 11 , further comprising stamping the first circuit layer over the photodiode material.

13. The method of claim 8 , wherein the one or more semiconductor devices include an array of thin film transistors and the photodiode material includes an array of photodiodes connected to the plurality of first contacts.

14. The method of claim 1 , further comprising the step of constructing the second circuit layer with the steps of:

positioning the semiconductor devices on a second substrate;

positioning the third contacts on the semiconductor devices;

stamping the third contacts to at least one interconnect line;

removing the second substrate; and

positioning the second contacts on the opposite side of the semiconductor devices from the third contacts.

15. A method of forming an electrical circuit structure comprising:

stamping a circuit sublayer on a first substrate;

depositing a photodiode material on the circuit sublayer;

providing a first circuit layer including a plurality of first contacts on the photodiode material;

constructing a second circuit layer with the steps of:

positioning one or more semiconductor devices on a second substrate;

positioning a plurality of third contacts on the semiconductor devices;

stamping the third contacts to at least one interconnect line;

removing the second substrate; and

positioning a plurality of second contacts on the opposite side of the semiconductor devices from the third contacts;

positioning the second circuit layer on a stamp; and

bonding the plurality of second contacts directly to the plurality of first contacts via a pressure applied by the stamp.

Assignments (1)
CONFIRMATORY LICENSE Recorded Mar 5, 2020
From: UNIVERSITY OF MICHIGAN
To: UNITED STATES OF AMERICA AS REPRESENTED BY THE SECRETARY OF THE ARMY
Reel/Frame 052107/0887 →
Continuity (2)
Division 13034776 · Feb 25, 2011
Related Publication 20170084666A1 · Mar 23, 2017