Microsample stage and method of manufacturing the same
A microsample stage which fixes microsamples when the microsamples are analyzed by an analyzer includes a base, and middle supports which protrude from an upper surface of the base. A microsample-fixing portion protrudes from an upper surface of each middle support. An alignment mark associated with each microsample-fixing portion is configured to be recognized by a capturing image to determine a position of attachment of one or more microsamples to each microsample-fixing portion. The microsample stage is made by etching a silicon member, which can be automated to increase work efficiency.
1. A microsample stage which fixes a microsample when the microsample is analyzed by an analyzer, comprising:
a base;
a plurality of middle supports which protrude from an upper surface of the base;
a microsample-fixing portion which protrudes from an upper surface of each middle support and which has a lengthwise direction and a widthwise direction; and
an alignment mark associated with each microsample-fixing portion and formed on an upper surface of the microsample-fixing portion
wherein at least two of the microsample-fixing portions are provided with the respective alignment marks in a one-to-one correspondence manner; and
wherein the alignment marks are arranged at a periphery portion of respective ones of the microsample-fixing portions in the lengthwise direction and are arranged to deviate from the center portion of respective ones of the microsample-fixing portions in the widthwise direction.
2. The microsample stage according to claim 1 , wherein the plurality of middle supports, microsample-fixing portions and alignment marks all constitute an integrated single body formed of the same material.
3. The microsample stage according to claim 1 , wherein the plurality of middle supports, microsample-fixing portions and alignment marks are all formed of silicon.
4. The microsample stage according to claim 1 , wherein the alignment marks are a protrusion or a recess.
5. The microsample stage according to claim 1 , wherein the alignment marks are chamfers formed at the upper surface of the microsample-fixing portions.
6. A method of manufacturing a microsample stage which fixes a microsample when the microsample is analyzed by an analyzer, comprising:
etching a silicon member to form a microsample stage including a base,
a plurality of middle supports which protrude from an upper surface of the base, a plurality of microsample-fixing portions which protrude from an upper surface of respective ones of the middle supports and to which a microsample is to be fixed, and a plurality of alignment marks formed on an upper surface of respective ones of the microsample-fixing portions, wherein at least two of the microsample-fixing portions are provided with the respective alignment marks in a one-to-one correspondence manner, and the alignment marks are arranged at a periphery portion of respective ones of the microsample-fixing portions in a lengthwise direction thereof and are arranged to deviate from the center portion of respective ones of the microsample-fixing portions in a direction thereof.
7. The method of manufacturing the microsample stage according to claim 6 , wherein the alignment marks are a protrusion, a recess, or a chamfer.