IP Library Granted Patent US 10,128,387
Granted Patent B1
US 10,128,387 · App. 15/184,929 · Granted Nov 13, 2018

Optoelectronic apparatus enabled by dielectric metamaterials

Inventors: Sheng Liu (Albuquerque, NM); Igal Brener (Albuquerque, NM); Michael B. Sinclair (Albuquerque, NM)
Assignee: National Technology & Engineering Solutions of Sandia, LLC
H01L31/02327H01L27/1446H01L27/156H01L31/0304H01L31/035236H01L33/04H01L33/105H01L33/30H01S5/343H01S5/34366H01S5/4025
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Quick Facts
Patent No.
US 10,128,387
App. No.
15/184,929
Granted
Nov 13, 2018
Kind
B1
Abstract

An array of dielectric resonators is formed on the substrate of an optoelectronic device. Each resonator includes an active medium having an optical transition that is operative in a process of photodetection or photoemission. The dielectric resonators in the array are each dimensioned to provide a resonance that lies substantially at the frequency of the optical transition.

Claims (35)

1. Apparatus comprising a substrate and an optical metamaterial, wherein:

the optical metamaterial consists of an array of dielectric resonators formed on the substrate;

each of the dielectric resonators in the array comprises an active medium characterized by at least one optical transition whereby light is emitted and/or absorbed with a frequency f and a vacuum wavelength λ; and

the dielectric resonators in the array are each dimensioned in three dimensions to provide a Mie resonance that lies substantially at the frequency f.

2. The apparatus of claim 1 , wherein the array is a regular two-dimensional array.

3. The apparatus of claim 1 , wherein the array of dielectric resonators is underlain by an optical confinement layer of material having a refractive index that is lower than a refractive index of constituent materials of the array of dielectric resonators.

4. The apparatus of claim 1 , wherein the active medium for each of the dielectric resonators in the array comprises a quantum well multilayer.

5. The apparatus of claim 4 , wherein each quantum well multilayer is enclosed between an underlying base layer and an overlying cap layer.

6. The apparatus of claim 5 , wherein the substrate, the base layer, and the cap layer are composed of gallium arsenide.

7. The apparatus of claim 4 , wherein the substrate is composed of gallium arsenide, each said quantum well multilayer comprises a plurality of periods, and each period comprises a layer of gallium arsenide adjacent to a layer of indium gallium arsenide.

8. The apparatus of claim 1 , wherein:

the active medium for each of the dielectric resonators in the array is enclosed between an underlying base layer and an overlying cap layer of semiconductor material; and

the apparatus further comprises an electrically conductive lower contact layer adjacent to the base layers and an electrically conductive upper contact layer adjacent to the cap layers.

9. The apparatus of claim 8 , wherein the substrate, the base layers, and the cap layers are composed of gallium arsenide.

10. The apparatus of claim 1 , wherein the active medium for each of the dielectric resonators in the array comprises at least one III-V semiconductor.

11. The apparatus of claim 1 , wherein the active medium for each of the dielectric resonators in the array comprises a quantum well multilayer enclosed between layers of a host semiconductor.

12. The apparatus of claim 1 , configured as a photoemitter.

13. The apparatus of claim 1 , configured as a photodetector.

14. The apparatus of claim 1 , configured as a laser.

15. Apparatus comprising a substrate and an optical metamaterial, wherein:

the optical metamaterial consists of an array of dielectric resonators formed on the substrate;

each of the dielectric resonators in the array comprises an active medium characterized by at least one optical transition whereby light is emitted and/or absorbed with a frequency f and a vacuum wavelength λ;

the dielectric resonators in the array are each dimensioned to provide a Mie resonance that lies substantially at the frequency f;

the substrate is composed of gallium arsenide;

an optical confinement layer, having a refractive index that is lower than a refractive index of constituent materials of the array of dielectric resonators, overlies the substrate;

the array of dielectric resonators overlies the optical confinement layer; and

the optical confinement layer comprises aluminum gallium oxide.

16. Apparatus comprising a substrate and an optical metamaterial, wherein:

the optical metamaterial consists of an array of dielectric resonators formed on the substrate;

each of the dielectric resonators in the array comprises an active medium characterized by at least one optical transition whereby light is emitted and/or absorbed with a frequency f and a vacuum wavelength λ;

the dielectric resonators in the array are each dimensioned to provide a Mie resonance that lies substantially at the frequency f;

the substrate is composed of gallium arsenide;

an optical confinement layer, having a refractive index that is lower than a refractive index of constituent materials of the array of dielectric resonators, overlies the substrate;

the array of dielectric resonators overlies the optical confinement layer; and

the optical confinement layer comprises native aluminum gallium oxide present as an oxidation product of aluminum gallium arsenide.

Assignments (3)
CHANGE OF NAME Recorded Oct 3, 2018
From: SANDIA CORPORATION
To: NATIONAL TECHNOLOGY & ENGINEERING SOLUTIONS OF SANDIA, LLC
Reel/Frame 047186/0737 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Sep 1, 2016
From: LIU, SHENG; BRENER, IGAL; SINCLAIR, MICHAEL B.
To: SANDIA CORPORATION
Reel/Frame 039615/0553 →
CONFIRMATORY LICENSE Recorded Jul 18, 2016
From: SANDIA CORPORATION
To: U.S. DEPARTMENT OF ENERGY
Reel/Frame 039176/0379 →
Continuity (1)
Provisional Application 62182381 · Jun 19, 2015
Cited By (1)
US 12,578,616