Image sensor and manufacturing method thereof
Provided are an image sensor and a method of manufacturing method of manufacturing the image sensor. The image sensor includes a substrate, photoelectric transducers and switching elements formed in layers on the substrate in this order. Each of the photoelectric transducers includes a hydrogenated amorphous silicon layer. Each of the switching elements includes an amorphous oxide semiconductor layer. The image sensor further includes a blocking layer arranged between the hydrogenated amorphous silicon layers of the photoelectric transducers and the amorphous oxide semiconductor layers of the switching elements, where the blocking layer suppresses penetration of hydrogen separated from the hydrogenated amorphous silicon layers.
1. An image sensor comprising:
a substrate;
photoelectric transducers on the substrate, each of the photoelectric transducers including a hydrogenated amorphous silicon layer; and
switching elements above the photoelectric transducers, each of the switching elements including an amorphous oxide semiconductor layer,
wherein each of the photoelectric transducers is configured to convert light entering from a side of the switching element to an electric charge, and includes a hydrogenated amorphous silicon carbide layer laminated on a top of the hydrogenated amorphous silicon layer of the photoelectric transducer, the hydrogenated amorphous silicon carbide layer having a function to suppress penetration of hydrogen separated from the hydrogenated amorphous silicon layer into the switching element.
2. The image sensor of claim 1 , wherein
each of the photoelectric transducers further includes a hydrogenated amorphous silicon carbide layer laminated on a bottom of the hydrogenated amorphous silicon layer.
3. The image sensor of claim 1 , further comprising a plurality of pixels arranged in matrix, wherein
the hydrogenated amorphous silicon layers of the photoelectric transducers form a layer being continuous over the plurality of pixels, and
in each of the plurality of pixels, the hydrogenated amorphous silicon carbide layer on the top of the hydrogenated amorphous silicon layer and an upper electrode of the photoelectric transducer are isolated from the hydrogenated amorphous silicon carbide layers on the top of the hydrogenated amorphous silicon layers and upper electrodes of the photoelectric transducers in the other pixels.