IP Library › Granted Patent US 9,722,058
Granted Patent B2
US 9,722,058 · App. 15/197,611 · Granted Aug 1, 2017

Bipolar transistor having collector with doping spike

Inventors: Peter J. Zampardi, Jr. (Newbury Park, CA); Kai Hay Kwok (Thousand Oaks, CA)
Assignee: Skyworks Solutions, Inc.
H01L29/7378H01L23/66H01L29/0821H01L29/0826H01L29/165H01L29/205H01L29/36H01L29/365H01L29/66242H01L29/73H01L29/737H01L29/7325H01L29/7371H01L2223/665H01L2223/6655H01L2223/6677H01L2223/6683H03F3/195H03F3/213H03F2200/451
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Quick Facts
Patent No.
US 9,722,058
App. No.
15/197,611
Granted
Aug 1, 2017
Kind
B2
Abstract

This disclosure relates to bipolar transistors, such as heterojunction bipolar transistors, having at a doping spike in the collector. The doping spike can be disposed relatively near an interface between the collector and the base. For instance, the doping spike can be disposed within half of the thickness of the collector from the interface between the collector and the base. Such bipolar transistors can be implemented, for example, in power amplifiers.

Claims (19)

1. A bipolar transistor comprising a collector including a first end and a second end opposite the first end, a sub-collector abutting the second end of the collector, a base abutting the first end of the collector, and an emitter, the collector including a doping spike disposed closer to the first end than to the second end, the doping spike having a thickness of 200 Å or less, the collector also including a doped portion disposed between the doping spike and the base, the doping spike extending substantially an entire length of the collector in a direction substantially parallel to a base-collector interface and the bipolar transistor being a single heterojunction bipolar transistor.

2. The bipolar transistor of claim 1 wherein the collector includes a second doped portion disposed between the doping spike and the subcollector, the second doped portion comprising a substantially flat doping and extending substantially an entire length of the collector in a direction substantially parallel to a base-collector interface.

3. The bipolar transistor of claim 1 wherein the thickness of the doping spike is substantially equal to 150 Å.

4. The bipolar transistor of claim 1 wherein the thickness of the doping spike is substantially equal to 100 Å.

5. The bipolar transistor of claim 1 wherein the doping spike is disposed at a location that results in approximately a local maximum of BV CEO of the bipolar transistor.

6. The bipolar transistor of claim 1 wherein the doping spike is disposed within about 0.5 μm from a base-collector interface.

7. The bipolar transistor of claim 1 wherein the collector further includes a grading that begins at a point farther from a base-collector interface than the doping spike.

8. The bipolar transistor of claim 1 wherein the bipolar transistor is a GaAs transistor.

9. The bipolar transistor of claim 1 wherein the bipolar transistor is a SiGe transistor.

10. An apparatus comprising a single heterojunction bipolar transistor including a collector, a sub-collector, a base on an opposite side of the collector than the sub-collector, and an emitter, the collector including a doping spike located closer to a base-collector interface than to a collector-sub-collector interface, the collector also including a doped portion disposed between the doping spike and the sub-collector, the collector also including a second doped portion disposed between the doping spike and the base, the doping spike having a thickness of 200 Å or less, and the doping spike extending substantially an entire length of the collector in a direction substantially parallel to a base-collector interface.

11. The apparatus of claim 10 wherein the apparatus includes a power amplifier configured to receive a radio frequency (RF) signal, and to generate an amplified RF signal from the received RF signal, the power amplifier including the single heterojunction bipolar transistor.

12. The apparatus of claim 11 wherein the thickness of the doping spike is substantially equal to 150 Å.

13. The power amplifier module of claim 12 wherein the collector has a collector thickness from the base-collector interface to the collector-subcollector interface, and the doping spike is located within about ⅓ of the collector thickness from the base-collector interface.

14. The apparatus of claim 10 wherein the apparatus is configured as a power amplifier module, the power amplifier module including the power amplifier.

15. The apparatus of claim 14 wherein the apparatus is configured as a power amplifier die, the power amplifier die including the power amplifier.

16. An apparatus comprising a single heterojunction bipolar transistor including a collector, a base, and an emitter, the collector including a doping spike within about 0.5 μm of an interface between the base and the collector, the doping spike having a thickness of 200 Å or less, the doping spike extending substantially an entire length of the collector in a direction substantially parallel to a base-collector interface and the collector also including a doped portion disposed between the doping spike and the base.

17. The apparatus of claim 16 wherein the doping spike extends substantially an entire length of the collector in a direction substantially parallel to the interface between the base and the collector.

18. The apparatus of claim 17 wherein the collector includes a second doped portion disposed between the doping spike and the sub-collector, the second doped portion having a substantially flat doping and extending substantially an entire length of the collector in a direction substantially parallel to the interface between the base and the collector.

19. The apparatus of claim 17 wherein the thickness of the doping spike is substantially equal to 100 Å.

Continuity (4)
Continuation 14720519 · May 22, 2015
Continuation 13870682 · Apr 25, 2013
Provisional Application 61639784 · Apr 27, 2012
Related Publication 20170005184A1 · Jan 5, 2017