Aggressive tip-to-tip scaling using subtractive integraton
View Patent ↗A method for forming an interconnect structure including: forming a semiconductor structure on a semiconductor substrate, the semiconductor structure having a gate structure, shallow trench isolation and a source/drain; forming a dielectric over the semiconductor structure; removing the dielectric adjacent to the gate structure to create a trench adjacent to the gate structure; depositing a metal into and filling the trench adjacent to the gate structure to form a metal line; etching the metal line to form a gap in the metal line so as to create segments of the metal line; and filling the gap with a dielectric material to enable tip-to-tip spacing between the segments of the metal line.
1. A method for forming an interconnect structure comprising:
forming a semiconductor structure on a semiconductor substrate, the semiconductor structure having a gate structure, shallow trench isolation and a source/drain;
forming a dielectric over the gate structure;
removing the dielectric adjacent to the gate structure to create a trench adjacent to the gate structure;
depositing a metal into and filling the trench adjacent to the gate structure to form a metal line;
lithographically defining an open area over the metal line;
etching the metal line down to the shallow trench isolation or the source/drain through the open area to form a gap in the metal line so as to create segments of the metal line; and
filling the gap down to the shallow trench isolation or the source/drain with a dielectric material to enable tip-to-tip spacing between the segments of the metal line.
2. The method of claim 1 wherein ends of the metal line directly abut the dielectric material.
3. The method of claim 2 wherein the ends of the metal line have a flat surface.
4. The method of claim 1 wherein the metal line further comprises a liner.
5. The method of claim 1 further comprising a nitride capping layer on the source and the drain and wherein prior to depositing a metal into the trench, further comprising removing the nitride capping layer from the source and the drain.
6. The method of claim 5 wherein the metal line directly contacts the source and the drain.
7. The method of claim 1 wherein the gate structure comprises a part of a planar semiconductor structure.
8. The method of claim 1 wherein the gate structure comprises a part of a FinFET structure.
9. The method of claim 1 wherein the metal filling the trench is selected from the group consisting of tungsten and cobalt.
10. The method of claim 1 wherein the metal line directly contacts the gate structure.
11. A method for forming an interconnect structure comprising:
forming a semiconductor structure on a semiconductor substrate, the semiconductor structure having a gate structure, shallow trench isolation and a source/drain;
forming a dielectric over the semiconductor structure;
removing the dielectric adjacent to the gate structure to create a trench adjacent to the gate structure;
depositing a metal into and filling the trench adjacent to the gate structure to form a metal line;
etching the metal line to form a gap in the metal line so as to create segments of the metal line; and
filling the gap with a dielectric material to enable tip-to-tip spacing between the segments of the metal line.
12. The method of claim 11 wherein ends of the metal line directly abut the dielectric material.
13. The method of claim 12 wherein the ends of the metal line have a flat surface.
14. The method of claim 11 wherein the metal line further comprises a liner.
15. The method of claim 11 wherein the metal line directly contacts the source and the drain.
16. The method of claim 11 wherein the gate structure comprises a part of a planar semiconductor structure.
17. The method of claim 11 wherein the gate structure comprises a part of a FinFET structure.
18. The method of claim 11 wherein the metal filling the trench is selected from the group consisting of tungsten and cobalt.
19. The method of claim 11 wherein the metal line directly contacts the gate structure.