Hybrid interconnects and method of forming the same
View Patent ↗A method for manufacturing a semiconductor device includes forming a trench in at least one dielectric layer; and forming an interconnect structure in the trench, wherein forming the interconnect structure includes forming a first conductive layer on a bottom surface of the trench, and partially filling the trench, and forming a second conductive layer on the first conductive layer, and filling a remaining portion of the trench, wherein the second conductive layer comprises a different material from the first conductive layer, and wherein an amount of the first conductive layer in the trench is controlled so that an aspect ratio of the second conductive layer has a value that is determined to result in columnar grain boundaries in the second conductive layer.
1. A method for manufacturing a semiconductor device, comprising:
forming a trench in at least one dielectric layer;
conformally depositing a first conductive layer on a top surface of the at least one dielectric layer, and on sidewall and bottom surfaces of the trench;
reflowing the first conductive layer to increase an amount of the first conductive layer in the trench, and partially fill the trench with the first conductive layer;
conformally depositing a liner layer on the first conductive layer on the top surface of the at least one dielectric layer, and on the sidewall and bottom surfaces of the trench;
forming a second conductive layer on the liner layer on the top surface of the at least one dielectric layer, and filling a remaining portion of the trench;
removing the first conductive layer, the liner layer and the second conductive layer from the top surface of the at least one dielectric layer;
determining a range of an aspect ratio of the second conductive layer in the trench to result in columnar grain boundaries in the second conductive layer; and
determining a height of the first conductive layer in the trench needed to yield the determined range of the aspect ratio;
wherein the reflowing of the first conductive layer increases the height of the first conductive layer in the trench to at least the height needed to yield the determined range of the aspect ratio; and
wherein the first conductive layer comprises aluminum.
2. The method according to claim 1 , wherein the aspect ratio is defined as height of the second conductive layer in the trench divided by a width of the second conductive layer in the trench.
3. The method according to claim 2 , wherein the second conductive layer comprises copper, and the aspect ratio is less than 2.5.
4. The method according to claim 1 , further comprising enriching exposed surfaces of the at least one dielectric layer with oxygen prior to conformally depositing the first conductive layer.
5. The method according to claim 4 , wherein the first conductive layer reacts with the oxygen enriched surfaces of the at least one dielectric layer to form an oxide layer between the at least one dielectric layer and the first conductive layer.
6. The method according to claim 1 , further comprising annealing the second conductive layer prior to the removing step.
7. The method according to claim 6 , wherein the annealing is performed at a temperature of about 100° C. to about 500° C.
8. The method according to claim 1 , wherein the liner layer comprises at least one of tantalum, titanium, cobalt, ruthenium and tungsten.
9. A method for manufacturing a semiconductor device, comprising:
forming a trench in at least one dielectric layer; and
forming an interconnect structure in the trench, wherein forming the interconnect structure comprises:
forming a first conductive layer on a bottom surface of the trench, and partially filling the trench;
forming a second conductive layer on the first conductive layer, and filling a remaining portion of the trench;
determining a range of an aspect ratio of the second conductive layer in the trench to result in columnar grain boundaries in the second conductive layer; and
determining a height of the first conductive layer in the trench needed to yield the determined range of the aspect ratio;
wherein forming the first conductive layer comprises reflowing the first conductive layer to increase the height of the first conductive layer in the trench to at least the height needed to yield the determined range of the aspect ratio;
wherein the first conductive layer comprises aluminum; and
wherein the second conductive layer comprises a different material from the first conductive layer.
10. The method according to claim 9 , wherein the aspect ratio is defined as height of the second conductive layer in the trench divided by a width of the second conductive layer in the trench.
11. The method according to claim 10 , wherein the second conductive layer comprises copper, and the aspect ratio is less than 2.5.
12. The method according to claim 9 , further comprising enriching exposed surfaces of the at least one dielectric layer with oxygen prior to forming the first conductive layer.
13. The method according to claim 12 , wherein the first conductive layer reacts with the oxygen enriched surfaces of the at least one dielectric layer to form an oxide layer between the at least one dielectric layer and the first conductive layer.
14. The method according to claim 9 , further comprising annealing the second conductive layer.
15. The method according to claim 14 , wherein the annealing is performed at a temperature of about 100° C. to about 500° C.
16. The method according to claim 9 , further comprising depositing a liner layer on the first conductive layer.
17. The method according to claim 16 , wherein the liner layer comprises at least one of tantalum, titanium, cobalt, ruthenium and tungsten.