IP Library Granted Patent US 10,389,276
Granted Patent B2
US 10,389,276 · App. 15/209,639 · Granted Aug 20, 2019

Integral preload mechanism for piezoelectric actuator

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Quick Facts
Patent No.
US 10,389,276
App. No.
15/209,639
Granted
Aug 20, 2019
Kind
B2
Abstract

A piezoelectric actuator that may include a monolithic frame having an integral bias band that provides a resilient restoring force between a first contact surface and a second contact surface of the actuator that may be used to rotate an adjustment shaft. In some cases, a preload mechanism may also be included with the frame. Such piezoelectric actuators may be used for adjustable optical mounting devices such as optical mounting devices.

Claims (6)

1. A method of manufacturing a monolithic actuator frame for a piezoelectric actuator, comprising cutting an actuator frame from a piece of continuous high strength material, the cut actuator frame including (i) a monolithic configuration with all elements of the actuator frame being formed from a single piece of continuous uninterrupted material, (ii) a first support element including a first contact surface, (iii) a second support element including a second contact surface, the second contact surface being disposed in a spaced and opposed relation relative to the first contact surface, (iv) a bias band which extends distally from a distal portion of the first support element, which is disposed between the first support element and the second support element and which is configured to provide a resilient restoring force that resists perpendicular displacement of the first contact surface away from the second contact surface, and (v) a piezoelectric element cavity disposed between a first mount surface of the actuator frame and a second mount surface of the actuator frame.

2. The method of claim 1 wherein the piece of continuous high strength material comprises stainless steel and cutting the actuator frame from the piece of continuous high strength material comprises cutting the stainless steel.

3. The method of claim 1 wherein cutting the actuator frame comprises cutting the piece of continuous high strength material by an EDM process.

4. The method of claim 1 wherein cutting the actuator frame comprises cutting the piece of continuous high strength material by a laser machining process.

5. The method of claim 1 wherein cutting the actuator frame comprises cutting the piece of continuous high strength material by a water jet machining process.

6. The method of claim 1 wherein cutting the actuator frame comprises cutting the piece of continuous high strength material by a CNC machining process.

Assignments (9)
RELEASE OF SECURITY INTEREST Recorded Aug 24, 2022
From: BARCLAYS BANK PLC
To: MKS INSTRUMENTS, INC.; NEWPORT CORPORATION; ELECTRO SCIENTIFIC INDUSTRIES, INC.
Reel/Frame 063009/0001 →
RELEASE OF SECURITY INTEREST Recorded Aug 24, 2022
From: BARCLAYS BANK PLC
To: MKS INSTRUMENTS, INC.; NEWPORT CORPORATION; ELECTRO SCIENTIFIC INDUSTRIES, INC.
Reel/Frame 062739/0001 →
SECURITY INTEREST Recorded Aug 19, 2022
From: MKS INSTRUMENTS, INC.; NEWPORT CORPORATION; ELECTRO SCIENTIFIC INDUSTRIES, INC.
To: JPMORGAN CHASE BANK, N.A., AS COLLATERAL AGENT
Reel/Frame 061572/0069 →
CORRECTIVE ASSIGNMENT TO CORRECT THE REMOVE U.S. PATENT NO.7,919,646 PREVIOUSLY RECORDED ON REEL 048211 FRAME 0312. ASSIGNOR(S) HEREBY CONFIRMS THE PATENT SECURITY AGREEMENT (ABL). Recorded Jan 14, 2021
From: ELECTRO SCIENTIFIC INDUSTRIES, INC.; MKS INSTRUMENTS, INC.; NEWPORT CORPORATION
To: BARCLAYS BANK PLC, AS COLLATERAL AGENT
Reel/Frame 055668/0687 →
RELEASE OF SECURITY INTEREST Recorded Feb 1, 2019
From: DEUTSCHE BANK AG NEW YORK BRANCH
To: NEWPORT CORPORATION; MKS INSTRUMENTS, INC.
Reel/Frame 048224/0960 →
PATENT SECURITY AGREEMENT (ABL) Recorded Feb 1, 2019
From: ELECTRO SCIENTIFIC INDUSTRIES, INC.; MKS INSTRUMENTS, INC.; NEWPORT CORPORATION
To: BARCLAYS BANK PLC, AS COLLATERAL AGENT
Reel/Frame 048211/0312 →
SECURITY INTEREST Recorded Jan 17, 2017
From: MKS INSTRUMENTS, INC.; NEWPORT CORPORATION
To: DEUTSCHE BANK AG NEW YORK BRANCH, AS ABL AGENT
Reel/Frame 040992/0369 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jan 5, 2017
From: LI, HONGQI
To: NEWPORT CORPORATION
Reel/Frame 040866/0695 →
SECURITY INTEREST Recorded Dec 12, 2016
From: MKS INSTRUMENTS, INC.; NEWPORT CORPORATION
To: BARCLAYS BANK PLC, AS THE COLLATERAL AGENT
Reel/Frame 040707/0904 →