Semiconductor device and manufacturing method of semiconductor device
A bonding member is a member shaped in a sheet and made of electrically-insulating resin. A semiconductor module includes a heatsink and a cooler that are electrically insulated from each other by the bonding member. The bonding member includes a central portion and a peripheral portion. A heat conductivity in a normal direction of the central portion is greater than a heat conductivity in the normal direction of the peripheral portion. Further, a heat conductivity in a surface direction of the peripheral portion is greater than a heat conductivity in the surface direction of the central portion. Further, the heat conductivity in the normal direction of the central portion is greater than the heat conductivity in the surface direction of the central portion.
1. A semiconductor device comprising:
a semiconductor module;
a bonding member; and
a cooler,
wherein the semiconductor module comprises:
a heatsink;
a semiconductor element disposed at an inner surface side of the heatsink; and
mold resin sealing the inner surface side of the heatsink and a circumference of the semiconductor element,
wherein an outer surface of the heatsink is exposed on a surface of the semiconductor module that is bonded to the cooler via the bonding member, and the mold resin surrounds a circumference of the heatsink,
the bonding member is shaped in a sheet and made of insulating resin, the bonding member comprises a first portion overlapping with the semiconductor element and a second portion overlapping with the mold resin when observed along a normal direction of the heatsink, wherein a heat conductivity in the normal direction of the first portion is greater than a heat conductivity in the normal direction of the second portion, when a direction perpendicular to the normal direction is set as a surface direction, a heat conductivity in the surface direction of the second portion is greater than a heat conductivity in the surface direction of the first portion, and the heat conductivity in the normal direction of the first portion is greater than the heat conductivity in the surface direction of the first portion, and
the outer surface of the heatsink and the mold resin surrounding the circumference of the heatsink are bonded to the cooler via the bonding member.
2. The semiconductor device as in claim 1 , wherein
the bonding member comprises an electrical insulating material containing dispersion particles dispersed therein, the dispersion particles having a higher heat conductivity than the electrical insulating material, and the bonding member comprises a characteristic of having the heat conductivity in the normal direction and the heat conductivity in the surface direction that change in accordance with postures of the dispersion particles,
a proportion of the dispersion particles with a posture that increases the heat conductivity of the normal direction is higher in the first portion than in the second portion, and
a proportion of the dispersion particles with a posture that increases the heat conductivity of the surface direction is higher in the second portion than in the first portion.
3. The semiconductor device as in claim 1 , wherein
the bonding member further comprises a third portion that is adjacent to the first portion and is positioned, when observed along the normal direction, between the semiconductor element and a position apart from the semiconductor element by a distance corresponding to a thickness of the heatsink, a heat conductivity in the normal direction of the third portion is greater than the heat conductivity in the normal direction of the second portion, a heat conductivity in the surface direction of the third portion is smaller than the heat conductivity in the surface direction of the second portion, and the heat conductivity in the normal direction of the third portion is greater than the heat conductivity in the surface direction of the third portion.
4. The semiconductor device as in claim 2 , wherein
the mold resin surrounding the circumference of the heatsink has an end surface, on a bonding member side, that projects to the bonding member side than the outer surface of the heatsink,
a proportion of the dispersion particles extending along the normal direction is higher in the first portion than in the second portion, and
a proportion of the dispersion particles extending along the surface direction is higher in the second portion than in the first portion.
5. A manufacturing method of the semiconductor device as in claim 1 , the method comprising:
disposing the semiconductor element at an inner surface side of the heatsink;
forming mold resin such that the mold resin seals the inner surface side of the heatsink and a circumference of the semiconductor element, and surrounds a circumference of the heatsink, the surrounding portion of the mold resin projects to a bonding member side than an outer surface of the heatsink;
disposing the bonding member between the cooler and an end surface of the mold resin surrounding the outer surface of the heatsink and a circumference of the heatsink, the bonding member containing dispersion particles dispersed therein with a posture that causes a heat conductivity in a normal direction to be greater than a heat conductivity in a surface direction; and
pressure-bonding the outer surface of the heatsink and the end surface of the mold resin to the cooler via the bonding member, so as to cause the posture of the dispersion particles contained in the bonding member in a range positioned between the end surface of the mold resin and the cooler to be changed.