Piezoelectric pressure sensor

1. A piezoelectric pressure sensor comprising:

a sensor housing assembly;

a membrane configured and disposed in the sensor housing assembly for capturing a pressure profile;

a piezoelectric sensor disposed in the sensor housing assembly and configured for generating polarization charges from the pressure profile captured by the membrane;

an electrode arrangement disposed in the sensor housing assembly to receive the generated polarization charges and including a charge output and a charge-pick-off electrically and mechanically connected to the charge output;

a pre-stressing body disposed in the sensor housing assembly and electrically insulated from the charge output by a third gap; and

an electrical feedthrough arrangement disposed in the sensor housing assembly and that seals the third gap from an environment in a pressure-tight manner and mechanically connects the charge output to the pre-stressing body on a side of the pre-stressing body that faces away from the membrane, wherein the electric feedthrough arrangement includes a first adapter element, a second electric insulation body and a second adapter element, which is electrically and mechanically connected to the charge output.

2. The piezoelectric pressure sensor according to claim 1 , wherein the charge pick-off is connected to the charge output by material bonding or integrally.

3. The piezoelectric pressure sensor according to claim 1 , further comprising:

a first electric insulation body arranged on the side of the charge pick-off that faces away from the membrane; and

a pre-stressing sleeve that is spaced apart from the piezoelectric sensor, the charge pick-off and the first electric insulation body by a second gap; and wherein:

the charge pick-off is arranged on a side of the piezoelectric sensor that faces away from the membrane; and

the piezoelectric sensor, the charge pick-off and the first electric insulation body are mechanically pre-stressed between the pre-stressing body and the pre-stressing sleeve.

4. The piezoelectric pressure sensor according to claim 3 , wherein the charge output extends through the first electric insulation body and the pre-stressing body and is spaced apart from the first electric insulation body and the pre-stressing body by the third gap.

5. The piezoelectric pressure sensor according to claim 1 , further comprising:

a first electric insulation body arranged on the side of the charge pick-off that faces away from the membrane; and

a pre-stressing sleeve that is spaced apart from the piezoelectric sensor, the charge pick-off and the first electric insulation body by a second gap; and wherein:

the charge pick-off is arranged on a side of the piezoelectric sensor that faces away from the membrane; and

the first electric insulation body is in mechanical surface contact with the charge pick-off and the pre-stressing body and seals the third gap from the second gap by means of form closure.

6. The piezoelectric pressure sensor according to claim 1 , further comprising:

a second electric insulation body arranged between the charge output and the pre-stressing body and electrically insulating them from each other; and

wherein the connection between the second adapter element and the second electric insulation body is effected by at least one of the following:

material bonding; and

a difference in coefficients of linear thermal expansion of a pairing of the second adapter element with the second electric insulation body that is smaller than 5 ppm.

7. The piezoelectric pressure sensor according to claim 6 , wherein the second adapter element is made from the steel alloy with material grade number 1.3981 or 1.3982; and the second electric insulation body consists of Al 2 O 3 ceramics.

8. The piezoelectric pressure sensor according to claim 1 , wherein the connection between the first adapter element and the second electric insulation body is effected by at least one of the following:

material bonding; and

a difference in coefficients of linear thermal expansion of a pairing of the first adapter element with the second electric insulation body that is smaller than 5 ppm.

9. The piezoelectric pressure sensor according to claim 8 , wherein the first adapter element is made from titanium; and the second electric insulation body consists of Al 2 O 3 ceramics.

10. The piezoelectric pressure sensor according to claim 1 , wherein the connection between the first adapter element and the pre-stressing body is effected by at least one of the following:

material bonding; and

a difference in coefficients of linear thermal expansion of a pairing of first adapter element with the pre-stressing body that is smaller than 10 ppm.

11. The piezoelectric pressure sensor according to claim 10 , wherein the first adapter element is made from titanium; and the pre-stressing body consists of a steel alloy with material grade number 1.4542.

12. The piezoelectric pressure sensor according to claim 1 , wherein:

the second electric insulation body is arranged between the charge output and the pre-stressing body and electrically insulating them from each other; and

wherein the connection between the second adapter element and the second electric insulation body is effected by at least one of the following:

material bonding; and

a difference in coefficients of linear thermal expansion of a pairing of the second adapter element with the second electric insulation body that is smaller than 3 ppm.

13. The piezoelectric pressure sensor according to claim 1 , wherein the connection between the first adapter element and the second electric insulation body is effected by at least one of the following:

material bonding; and

a difference in coefficients of linear thermal expansion of a pairing of the first adapter element with the second electric insulation body that is smaller than 3 ppm.

14. The piezoelectric pressure sensor according to claim 1 , wherein the connection between the first adapter element and the pre-stressing body is effected by at least one of the following:

material bonding; and

a difference in coefficients of linear thermal expansion of a pairing of first adapter element with the pre-stressing body that is smaller than 5 ppm.

15. A piezoelectric pressure sensor comprising:

a sensor housing assembly;

a membrane configured and disposed in the sensor housing assembly for capturing a pressure profile;

a piezoelectric sensor disposed in the sensor housing assembly and configured for generating polarization charges from the pressure profile captured by the membrane;

an electrode arrangement disposed in the sensor housing assembly to receive the generated polarization charges and including a charge output and a charge-pick-off electrically and mechanically connected to the charge output;

a pre-stressing body disposed in the sensor housing assembly and electrically insulated from the charge output by a third gap; and

an electrical feedthrough arrangement disposed in the sensor housing assembly and that seals the third gap from an environment in a pressure-tight manner and mechanically connects the charge output to the pre-stressing body on a side of the pre-stressing body that faces away from the membrane;

a first electric insulation body arranged on the side of the charge pick-off that faces away from the membrane; and

a pre-stressing sleeve that is spaced apart from the piezoelectric sensor, the charge pick-off and the first electric insulation body by a second gap; and wherein:

the charge pick-off is arranged on a side of the piezoelectric sensor that faces away from the membrane; and

the piezoelectric sensor, the charge pick-off and the first electric insulation body are mechanically pre-stressed between the pre-stressing body and the pre-stressing sleeve;

a compensation element that is disposed in the sensor housing assembly, wherein:

the pre-stressing sleeve is spaced apart from the piezoelectric sensor, the charge pick-off, the first electric insulation body, and the compensation element by a second gap; and

the compensation element is located according to one of the following dispositions:

between the pre-stressing sleeve and the piezoelectric sensor, or

between the piezoelectric sensor and the charge pick-off, or

between the charge pick-off and the first electric insulation body, or

between the first electric insulation body and the pre-stressing body.

16. The piezoelectric pressure sensor according to claim 15 , wherein:

the compensation body is arranged between the first electric insulation body and the pre-stressing body; and

in the absence of mechanical pre-stressing the first electric insulation body and the compensation body are in a surface mechanical contact with the charge pick-off and the pre-stressing body and seal the third gap from the second gap by means of form closure.

17. A piezoelectric pressure sensor comprising:

a sensor housing assembly;

a membrane configured and dispose in the sensor housing assembly for capturing pressure profile;

a piezoelectric sensor disposed in the sensor housing assembly and configured for generating polarization charges from the pressure profile captured by the membrane;

an electrode arrangement disposed in the sensor housing assembly to receive the generated polarization charges and including a charge output and a charge-pick-oft electrically and mechanically connected to the charge output;

a pre-stressing body disposed in the sensor housing assembly and electrically insulated from the charge output by a third gap; and

an electrical feedthrough arrangement disposed in the sensor housing assembly and that seals the third gap from an environment in a pressure-tight manner and mechanically connects the charge output to the pre-stressing body on a side of the pre-stressing body that faces away from the membrane;

wherein:

the sensor housing assembly includes a sensor housing and a reinforcement casing connected to the sensor housing by material bonding; and

the reinforcement casing is connected to the pre-stressing body by material bonding.