Self-supporting film, self-supporting structure, method for manufacturing self-supporting film, and pellicle
Provided is a self-supporting film that has an anti-reflection function independently, so that the self-supporting film exhibits excellent optical characteristics as a result. A self-supporting film has a rugged-structure layer having periodic rugged shapes formed on a surface thereof, with these periodic rugged shapes being formed on at least one surface. The average thickness of the self-supporting film ranges from 0.2 μm to 20.0 μm. The rugged-structure layer has a yield strain of 1% or greater and a tensile elongation of 10% or greater.
1. A pellicle having comprising:
a frame body;
a pressure-sensitive adhesive agent that is applied onto one end face of the frame body; and
a self-supporting film bonded to the other end face of the frame body,
wherein the self-supporting film has a rugged-structure layer in which periodic rugged shapes are formed on at least one face,
wherein the pellicle has the rugged-structure layer on at least one of an inner surface and an outer surface of the self-supporting film,
wherein an average thickness of the self-supporting film ranges from 0.2 μm to 6.0 μm, and
wherein the rugged-structure layer comprises, as a main component, at least one resin selected from the group consisting of a cellulose acetate propionate and a cellulose propionate.
2. The pellicle according to claim 1 , wherein the rugged-structure layer has a yield strain of 1% or greater and a tensile elongation of 10% or greater.
3. The pellicle according to claim 1 , wherein a thickness variability average of the rugged-structure layer is 100 nm or less.
4. The pellicle according to claim 1 , wherein protrusions in the rugged shapes are disposed at a constant periodic spacing.
5. The pellicle according to claim 1 , wherein the periodic spacing of the protrusions of the rugged shapes is 1.0 μm or less.
6. The pellicle according to claim 1 , wherein a height of the protrusions of the rugged shapes ranges from 0.5 times to 2.0 times the periodic spacing of the rugged shapes.
7. The pellicle according to claim 1 , wherein the shape of the protrusions of the rugged shapes is a polyhedral pyramidal shape, a conical shape, a truncated polyhedral pyramidal shape or a truncated conical shape.