Dual fin integration for electron and hole mobility enhancement
View Patent ↗A technique for forming a semiconductor device is provided. Sacrificial mandrels are formed over a hardmask layer on a semiconductor layer. Spacers are formed on sidewalls of the sacrificial mandrels. The sacrificial mandrels are removed to leave the spacers. A masking process leaves exposed a first set of spacers with a second set protected. In response to the masking process, a first fin etch process forms a first set of fins in the semiconductor layer via first set of spacers. The first set of fins has a vertical sidewall profile. Another masking process leaves exposed the second set of spacers with the first set of spacers and the first set of fins protected. In response to the other masking process, a second fin etch process forms a second set of fins in semiconductor layer using the second set of spacers. The second set of fins has a trapezoidal sidewall profile.
1. A method of forming a semiconductor device, the method comprising:
forming trapezoidal shaped fins on a substrate, wherein a trapezoidal shape of the trapezoidal shaped fins enhances electron mobility; and
forming vertical shaped fins on the substrate, wherein a straight vertical shape of the vertical shaped fins enhances hole mobility, and wherein the trapezoidal shaped fins have a larger base that the vertical shaped fins;
wherein an integrated circuit is formed by the trapezoidal shaped fins and the vertical shaped fins.
2. The method of claim 1 , wherein the trapezoidal shaped fins comprise negative NFET devices; and
wherein the vertical shaped fins comprise PFET devices.
3. The method of claim 2 , wherein the integrated circuit is a microprocessor.
4. The method of claim 1 , further comprising forming a gate electrode over the trapezoidal shaped fins and the vertical shaped fins.