IP Library Granted Patent US 10,290,594
Granted Patent B2
US 10,290,594 · App. 15/222,056 · Granted May 14, 2019

Fragmenting computer chips

Inventors: Cyril Cabral, Jr. (Yorktown Heights, NY); Kenneth P. Rodbell (Sandy Hook, CT)
Assignee: International Business Machines Corporation
H01L23/576C06B43/00C06B45/10C06B45/14H01L23/573H01L23/585H05K1/185H01L27/2472H01L2924/0002
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Quick Facts
Patent No.
US 10,290,594
App. No.
15/222,056
Granted
May 14, 2019
Kind
B2
Abstract

A method comprising bonding a first substrate to a second substrate. The first substrate includes a layer of one or more pairs of reactive material. The method comprising triggering a reaction between the one or more pairs of reactive material and fragmenting the second substrate.

Claims (34)

1. An integrated circuit (IC) assembly comprising:

a first substrate;

a second substrate, wherein the second substrate is bonded to the first substrate;

one or more IC components, wherein the one or more IC components are formed on the second substrate on a side opposite to a bond between the first substrate and the second substrate;

a layer of one or more pairs of reactive materials, wherein the layer of one or more pairs of reactive materials are formed on the first substrate on a side opposite to the bond between the first substrate and the second substrate; and

a plurality of vias composed of a first material, wherein the first material includes a different acoustic impedance than a second material included in the second substrate, wherein the second material included in the second substrate is in direct contact with the first material in the plurality of vias.

2. The IC assembly of claim 1 , further comprising:

the plurality of vias composed of the first material, wherein the first material includes one or both of: i) a different thermal expansion coefficient than a second material included in the first substrate and ii) a different acoustic impedance than the second material included in the first substrate, wherein the second material included in the first substrate is in direct contact with the first material in the plurality of vias.

3. The IC assembly of claim 1 , wherein the first substrate is stressed glass that is thinned by one or both grinding and etching in order to remove a portion of an outer compressive layer.

4. The IC assembly of claim 1 , further comprising:

a plurality of vias composed of a first material, wherein the first material includes a different acoustic impedance than a second material included in the first substrate, wherein the second material included in the first substrate is in direct contact with the first material in the plurality of vias.

5. The IC assembly of claim 1 , further comprising:

a barrier layer between each reactive material of the layer of the one or more pairs of reactive materials.

6. The IC assembly of claim 5 , wherein the barrier layer is a multilayer stack composed of two or more materials.

7. The IC assembly of claim 5 , wherein the barrier layer is a transition metal.

8. The IC assembly of claim 1 , further comprising:

an insulation layer between the first substrate and the layer of the one or more pairs of reactive materials.

9. The IC assembly of claim 8 , wherein the insulation layer is over the first substrate with the plurality of vias composed of the first material.

10. An integrated circuit (IC) assembly comprising:

a first substrate;

a second substrate, wherein the second substrate is bonded to the first substrate;

one or more IC components, wherein the one or more IC components are formed on the second substrate on a side opposite to a bond between the first substrate and the second substrate;

a layer of one or more pairs of reactive materials, wherein the layer of one or more pairs of reactive materials are formed on the first substrate on a side opposite to the bond between the first substrate and the second substrate; and

one or more layers composed of a first material, wherein the first material includes a different acoustic impedance than a second material included in the second substrate, wherein the second material included in the second substrate is in direct contact with the first material in the one or more layers.

11. The IC assembly of claim 10 , wherein the first material includes one or both of: i) a different thermal expansion coefficient than a second material included in the first substrate and ii) a different acoustic impedance than the second material included in the first substrate, wherein the second material included in the first substrate is in direct contact with the first material in the one or more layers.

12. The IC assembly of claim 10 , further comprising:

a plurality of vias composed of a first material, wherein the first material includes a different acoustic impedance than a second material included in the first substrate, wherein the second material included in the first substrate is in direct contact with the first material in the plurality of vias.

13. The IC assembly of claim 10 , wherein the first substrate is stressed glass that is thinned by one or both grinding and etching in order to remove a portion of an outer compressive layer.

14. The IC assembly of claim 10 , further comprising:

a barrier layer between each reactive material of the layer of the one or more pairs of reactive materials.

15. The IC assembly of claim 14 , wherein the barrier layer is a multilayer stack composed of two or more materials.

16. The IC assembly of claim 14 , wherein the barrier layer is a transition metal.

17. The IC assembly of claim 10 , further comprising:

an insulation layer is between the one or more layers composed of the first material and the layer of the one or more pairs of reactive materials.

Assignments (2)
CONFIRMATORY LICENSE Recorded Oct 6, 2017
From: IBM
To: NAVY, SECRETARY OF THE UNITED STATES OF AMERICA
Reel/Frame 044233/0500 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jul 28, 2016
From: CABRAL, CYRIL, JR.; RODBELL, KENNETH P.
To: INTERNATIONAL BUSINESS MACHINES CORPORATION
Reel/Frame 039281/0501 →
Continuity (1)
Related Publication 20180096954A1 · Apr 5, 2018