Silicon precursor, method of forming a layer using the same, and method of fabricating semiconductor device using the same
View Patent ↗The inventive concepts provide silicon precursors, methods of forming a layer using the same, and methods of fabricating a semiconductor device using the same. The silicon precursor includes a silane group including two or more silicon atoms. The silicon precursor has a high and uniform adsorption property on surfaces of layers (e.g., a silicon layer, an oxide layer, and a nitride layer) that are mainly used when semiconductor devices are fabricated.
1. A method of forming a layer, the method comprising:
providing a first precursor having a chemical formula of R 1 —Si x H y on a substrate to form a single-layered silicon atomic layer, wherein x is an integral number equal to 2 or 3, and y satisfies an equation having a formula of y=2x+1, and wherein Si x H y of the first precursor is separated from R 1 to form the single-layered silicon atomic layer; and
providing a second precursor different from the first precursor on the single-layered silicon atomic layer to form a silicon-containing layer,
wherein R 1 has the following chemical formula 1,
wherein each of R 2 and R 3 independently includes at least one of a methyl group, an ethyl group, a propyl group, an isopropyl group, a butyl group, or a tert-butyl group,
wherein providing the first precursor having the chemical formula of R 1 —Si x H y on the substrate is carried out at a temperature of between about 200° C. and about 450° C.,
wherein an oxide layer is provided on the substrate, and
wherein silicon atoms of Si x H y of the first precursor are bonded to oxygen atoms that are bonded to the oxide layer after Si x H y is separated from R 1 .
2. The method of claim 1 , wherein forming the silicon-containing layer comprises forming a silicon nitride layer, a silicon oxide layer, or a silicon-germanium layer.
3. The method of claim 1 , wherein the second precursor comprises at least one of monosilane (SiH 4 ), disilane (Si 2 H 6 ), or a high-grade silane having a chemical formula of Si n H 2n+2 , n being an integral number equal to or greater than 3,
wherein forming the silicon-containing layer comprises forming a poly-silicon layer using the single-layered silicon atomic layer as a seed layer, and
wherein the poly-silicon layer is formed by performing a chemical vapor deposition process.
4. The method of claim 3 , wherein forming the silicon-containing layer further comprises:
doping the poly-silicon layer by providing at least one of Group III elements, Group V elements, or carbon.
5. The method of claim 1 , wherein forming the silicon-containing layer comprises:
forming a non-silicon atomic layer on the single-layered silicon atomic layer,
wherein forming the single-layered silicon atomic layer and forming the non-silicon atomic layer are alternately and repeatedly performed, and
wherein the non-silicon atomic layer is formed by providing the second precursor containing at least one element selected from a group consisting of oxygen, nitrogen, or germanium.
6. The method of claim 1 , wherein the first precursor is diisopropylaminodisilane (((CH 3 ) 2 CH) 2 N—SiH 2 SiH 3 ).
7. A method of forming a layer, the method comprising:
providing a first precursor having a chemical formula of R 1 —Si x H y on a substrate to form a single-layered silicon atomic layer, wherein x is an integral number equal to 2 or 3, y satisfies an equation having a formula of y=2x+1, and R 1 includes at least one of an amino group, an alkyl group, a cyclopentadienyl (C 5 H 5 ) group, or a halogen, and wherein Si x H y of the first precursor is separated from R 1 to form the single-layered silicon atomic layer; and
forming a poly-silicon layer using the single-layered silicon atomic layer as a seed layer by providing a second precursor on the single-layered silicon atomic layer, the second precursor being different from the first precursor,
wherein providing the first precursor having the chemical formula of R 1 —Si x H y on the substrate is carried out at a temperature of between about 200° C. and about 450° C.,
wherein an oxide layer is provided on the substrate, and
wherein silicon atoms of Si x H y of the first precursor are bonded to oxygen atoms that are bonded to the oxide layer after Si x H y is separated from R 1 .
8. The method of claim 7 , wherein R 1 has the following chemical formula 1,
wherein each of R 2 and R 3 independently includes at least one of a methyl group, an ethyl group, a propyl group, an isopropyl group, or a butyl group.
9. The method of claim 7 , wherein the second precursor comprises at least one of monosilane (SiH 4 ), disilane (Si 2 H 6 ), or a high-grade silane having a chemical formula of Si n H 2n+2 , and
wherein n is an integral number equal to or greater than 3.
10. The method of claim 7 , wherein the single-layered silicon atomic layer is formed to provide silicon adsorption sites so that silicon atoms of the second precursor are bonded to the silicon adsorption sites.
11. The method of claim 7 , wherein forming the poly-silicon layer comprises performing a chemical vapor deposition process.
12. A method of forming a poly-silicon layer, the method comprising:
forming a single-layered silicon atomic layer on an underlying structure by providing diisopropylaminodisilane (DIPADS, ((CH 3 ) 2 CH) 2 N—SiH 2 SiH 3 ) on the underlying structure, wherein, during forming the single-layered silicon atomic layer, SiH 2 SiH 3 of DIPADS is separated from (CH 3 ) 2 CH) 2 N, and silicon atoms of SiH 2 SiH 3 are bonded to a surface of the underlying structure, and wherein providing the DIPADS is carried out at a temperature of between about 200° C. and about 450° C.; and
forming the poly-silicon layer using the single-layered silicon atomic layer as a seed layer by providing a precursor on the single-layered silicon atomic layer, wherein the precursor comprises monosilane (SiH 4 ), disilane (Si 2 H 6 ), or a high-grade silane having a chemical formula of Si n H 2n+2 , n being an integral number equal to or greater than 3, and wherein the poly-silicon layer is formed by performing a chemical vapor deposition process,
wherein the underlying structure comprises a silicon substrate and an oxide layer on the silicon substrate, and
wherein the silicon atoms of SiH 2 SiH 3 are bonded to oxygen atoms that are bonded to a surface of the oxide layer.
13. The method of claim 12 , wherein the silicon atoms of SiH 2 SiH 3 bonded to the oxygen atoms are silicon adsorption sites, and silicon atoms of the precursor are bonded to the silicon adsorption sites.