IP Library Granted Patent US 9,972,654
Granted Patent B2
US 9,972,654 · App. 15/230,134 · Granted May 15, 2018

Image sensor with heating effect and related methods

Inventors: Victor Lenchenkov (Sunnyvale, CA); Hamid Soleimani (Cupertino, CA)
Assignee: SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC
H01L27/14649H01L27/1462H01L27/1463H01L27/1464H01L27/14609H01L27/14623H01L27/14625H01L27/14627H01L27/14629H01L27/14636H01L27/14643H01L27/14685H01L27/14689
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Quick Facts
Patent No.
US 9,972,654
App. No.
15/230,134
Granted
May 15, 2018
Kind
B2
Abstract

An image sensor including a semiconductor layer. A light absorber layer couples with the semiconductor layer at a pixel of the image sensor and absorbs incident light to substantially prevent the incident light from entering the semiconductor layer. The light absorber layer heats a depletion region of the semiconductor layer in response to absorbing the incident light, creating electron/hole pairs. The light absorber layer may include one or more narrow bandgap materials.

Claims (19)

1. An image sensor, comprising:

a semiconductor layer, and;

substantially all of a first side of a light absorber layer in direct contact with the semiconductor layer at a pixel of the image sensor, the light absorber layer configured to absorb incident light and to substantially prevent the incident light from entering the semiconductor layer;

wherein the light absorber layer is substantially parallel with a plane formed by the semiconductor layer; and

wherein the light absorber layer is configured to heat a region of the semiconductor layer in direct contact with the light absorber layer through absorbing the incident light and to create electron/hole pairs in the region thereby.

2. The image sensor of claim 1 , further comprising:

a microlens, the light absorber layer coupled between the microlens and the semiconductor layer, the microlens configured to refract the incident light towards the light absorber layer; and

a guide coupled between the microlens and the light absorber layer and configured to convey the refracted light to the light absorber layer.

3. The image sensor of claim 1 , wherein the image sensor comprises a backside integrated (BSI) sensor.

4. The image sensor of claim 1 , wherein the light absorber layer is positioned between two shallow trenches in the semiconductor layer, each shallow trench extending only partially through the semiconductor layer from a backside of the semiconductor layer towards a frontside of the semiconductor layer.

5. The image sensor of claim 1 , wherein the light absorber layer is positioned between two deep trenches of the semiconductor layer, each deep trench extending fully through the semiconductor layer from a backside of the semiconductor layer through to a frontside of the semiconductor layer.

6. An image sensor, comprising:

a photodiode comprised at least partially within a semiconductor layer, and;

substantially all of a first side of a light absorber layer in direct contact with the semiconductor layer, the light absorber layer configured to absorb incident light within predetermined wavelengths to substantially prevent the incident light from passing from the light absorber layer to the photodiode;

wherein the light absorber layer is substantially parallel with a plane formed by the semiconductor layer;

wherein the light absorber layer is configured to heat a depletion region of the photodiode in response to absorbing the incident light and to create electron/hole pairs in the depletion region thereby, and;

wherein the image sensor further comprises at least one dielectric layer coupled with the semiconductor layer, and electrical routing coupled at least partially within the at least one dielectric layer which electrically couples the photodiode with at least one other element of the image sensor.

7. The image sensor of claim 6 , wherein the light absorber layer is comprised at a backside of the semiconductor layer, wherein the at least one dielectric layer comprises a frontside dielectric layer and a backside dielectric layer, wherein the backside dielectric layer is located at the backside of the semiconductor layer; wherein a focusing element is comprised proximate the backside dielectric layer and is configured to focus the incident light through the backside dielectric layer towards the light absorber layer; wherein the frontside dielectric layer is comprised at a frontside of the semiconductor layer opposite the backside of the semiconductor layer; and wherein the electrical routing of the image sensor is comprised at least partially within the frontside dielectric layer.

8. The image sensor of claim 6 , wherein the light absorber layer is comprised at a frontside of the semiconductor layer; the at least one dielectric layer comprises a frontside dielectric layer coupled at the frontside of the semiconductor layer; a focusing element is comprised proximate the frontside dielectric layer and is configured to focus the incident light through the frontside dielectric layer towards the light absorber layer; and the electrical routing of the image sensor is comprised at least partially within the frontside dielectric layer.

Assignments (3)
RELEASE OF SECURITY INTEREST IN PATENTS RECORDED AT REEL 041187, FRAME 0295 Recorded Jun 22, 2023
From: DEUTSCHE BANK AG NEW YORK BRANCH, AS COLLATERAL AGENT
To: SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC; FAIRCHILD SEMICONDUCTOR CORPORATION
Reel/Frame 064151/0203 →
SECURITY INTEREST Recorded Dec 23, 2016
From: SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC
To: DEUTSCHE BANK AG NEW YORK BRANCH
Reel/Frame 041187/0295 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Aug 5, 2016
From: LENCHENKOV, VICTOR; SOLEIMANI, HAMID
To: SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC
Reel/Frame 039358/0467 →
Continuity (2)
Division 14723675 · May 28, 2015
Related Publication 20160351616A1 · Dec 1, 2016