Silicon-germanium fin formation
View Patent ↗Forming a set of semiconductor fins is disclosed. Forming the set of semiconductor fins can include forming a base structure including a silicon substrate, an insulator layer stacked on the silicon substrate, and a plurality of silicon semiconductor fins each stacked directly on the insulator layer. Forming the set of semiconductor fins can include depositing a first atomic layer of germanium atoms on a first set of semiconductor fins in the plurality of semiconductor fins and annealing the first atomic layer and the first set of semiconductor fins. Forming the set of semiconductor fins can include forming, from the annealing, a first set of silicon-germanium semiconductor fins.
1. A method of forming a set of semiconductor fins, the method comprising:
forming a base structure including a silicon substrate, a plurality of silicon semiconductor fins each stacked directly on the silicon substrate, and an insulator layer directly on the silicon substrate between each of the plurality of silicon semiconductor fins;
depositing a first atomic layer of germanium atoms on a first set of semiconductor fins in the plurality of semiconductor fins;
annealing the first atomic layer and the first set of semiconductor fins;
forming, from the annealing, a first set of silicon-germanium semiconductor fins;
depositing a second atomic layer of germanium atoms on the first set of silicon-germanium semiconductor fins;
annealing the second atomic layer to the first set of silicon-germanium semiconductor fins; and
forming, by the annealing, a second set of silicon-germanium semiconductor fins.
2. The method of claim 1 , wherein:
the annealing of the first atomic layer and the first set of semiconductor fins includes:
locating the first set of semiconductor fins within an annealing environment containing a first concentration of inert gas; and
annealing the first atomic layer and the first set of semiconductor fins at a first temperature for a first duration.
3. The method of claim 2 , wherein:
the first temperature is approximately within a range of 700 to 1300 degrees Celsius; and
the first duration is approximately within a range of 5 seconds to 5 hours.
4. The method of claim 1 wherein:
the first set of silicon-germanium fins has a first germanium-concentration parameter and the second set of silicon-germanium fins has a second germanium-concentration parameter, wherein the second germanium-concentration parameter is a value greater than a value of the first germanium-concentration parameter.
5. The method of claim 4 , wherein:
the annealing of the second atomic layer and the first set of silicon-germanium semiconductor fins includes:
locating the second atomic layer and the first set of silicon-germanium semiconductor fins within a second annealing environment containing a second concentration of inert gas; and
annealing the second atomic layer and the first set of silicon-germanium semiconductor fins at a second temperature for a second duration.
6. The method of claim 5 , wherein:
the second temperature and the second duration are based on the first germanium-concentration parameter.
7. The method of claim 1 , further comprising:
masking, prior to depositing the first atomic layer, a second set of semiconductor fins in the plurality of semiconductor fins and leaving unmasked the first set of semiconductor fins.