IP Library Granted Patent US 9,991,231
Granted Patent B2
US 9,991,231 · App. 15/234,425 · Granted Jun 5, 2018

Stacked die integrated circuit

Inventors: Charles G. Woychik (Niskayuna, NY); Cyprian Emeka Uzoh (San Jose, CA); Ron Zhang (Sunnyvale, CA); Daniel Buckminster (Amherst, MA); Guilian Gao (San Jose, CA)
Assignee: Invensas Corporation
H01L25/0657H01L21/304H01L21/486H01L21/4853H01L21/52H01L21/565H01L21/76898H01L21/78H01L23/3114H01L23/481H01L23/49827H01L23/49838H01L23/49894H01L24/85H01L24/94H01L24/97H01L25/0652H01L25/0655H01L25/50H01L23/13H01L24/13H01L24/16H01L24/17H01L24/32H01L24/73H01L24/92H01L2224/131H01L2224/13025H01L2224/13147H01L2224/16145H01L2224/16146H01L2224/16225H01L2224/16235H01L2224/16238H01L2224/1703H01L2224/17181H01L2224/32145H01L2224/32225H01L2224/32245H01L2224/73204H01L2224/73253H01L2224/92125H01L2224/94H01L2224/97H01L2225/06513H01L2225/06517H01L2225/06541H01L2225/06544H01L2225/06548H01L2225/06555H01L2225/06582H01L2225/06589H01L2924/00014H01L2924/15159H01L2924/15192H01L2924/15311H01L2924/16152H01L2924/16235H01L2924/16251H01L2924/181H01L2924/18161H01L2924/3511
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Quick Facts
Patent No.
US 9,991,231
App. No.
15/234,425
Granted
Jun 5, 2018
Kind
B2
Abstract

An apparatus relates generally to an integrated circuit package. In such an apparatus, a package substrate has a first plurality of via structures extending from a lower surface of the package substrate to an upper surface of the package substrate. An die has a second plurality of via structures extending to a lower surface of the die. The lower surface of the die faces the upper surface of the package substrate in the integrated circuit package. The package substrate does not include a redistribution layer. The die and the package substrate are coupled to one another.

Claims (44)

1. A method, comprising:

obtaining a package substrate having a first plurality of via structures extending from a lower surface of the package substrate to an upper surface of the package substrate;

etching to expose upper ends of the first plurality of via structures to provide a layer of interconnect structures extending above the upper surface of the package substrate;

obtaining a die having a second plurality of via structures extending to a lower surface of the die;

positioning the lower surface of the die for facing the upper surface of the package substrate to provide an integrated circuit package;

forming wires directly attached to lower ends of the first plurality of via structures along the lower surface of the package substrate to provide a bond via array;

depositing a molding compound along the lower surface of the package substrate over the bond via array; and

coupling the die and the package substrate to one another;

wherein the package substrate does not include a redistribution layer.

2. The method according to claim 1 , wherein the first plurality of via structures of the package substrate are respectively coupled to the second plurality of via structures of the die for a one-to-one correspondence between the first plurality of via structures and the second plurality of via structures.

3. The method according to claim 1 , wherein the first plurality of via structures are directly coupled to the second plurality of via structures.

4. The method according to claim 3 , wherein the first plurality of via structures are respectively directly coupled to the second plurality of via structures through a corresponding plurality of interconnects.

5. The method according to claim 1 , wherein the obtaining of the package substrate comprises:

obtaining a sheet of material for providing of the package substrate;

forming openings in the sheet of material for the first plurality of via structures of the package substrate; and

depositing conductive material in the openings in the sheet of material to provide conductors of the first plurality of via structures.

6. The method according to claim 5 , wherein the package substrate is formed of an inorganic material.

7. The method according to claim 5 , wherein the package substrate is formed of a material selected from a group consisting of silicon, glass, polymer, and composite.

8. A method, comprising:

obtaining a package substrate having a first plurality of via structures extending from a lower surface of the package substrate to an upper surface of the package substrate;

obtaining a die having a second plurality of via structures extending to a lower surface of the die;

coupling the die and the package substrate to one another;

wherein the lower surface of the die faces the upper surface of the package substrate in an integrated circuit package;

wherein the package substrate does not include a redistribution layer; and

etching to expose upper ends of the first plurality of via structures to provide a layer of interconnect structures extending above the upper surface of the package substrate.

9. The method according to claim 8 , further comprising plating the upper ends of the layer of interconnect structures to provide conical-shaped raised ends.

10. The method according to claim 8 , wherein the step of coupling comprises respectively coupling the first plurality of via structures of the package substrate to the second plurality of via structures of the die for a one-to-one correspondence between the first plurality of via structures and the second plurality of via structures.

11. The method according to claim 8 , wherein the first plurality of via structures have a first pitch which is equal to a second pitch of the second plurality of via structures.

12. The method according to claim 11 , wherein:

the die includes the redistribution layer disposed along an upper surface of the die;

the die is an interposer; and

the redistribution layer of the interposer is coupled to the second plurality of via structures of the interposer.

13. The method according to claim 12 , further comprising

coupling a plurality of dies to the redistribution layer of the interposer with a plurality of interconnects.

14. A method, comprising:

obtaining a package substrate having a first plurality of via structures extending from a lower surface of the package substrate to an upper surface of the package substrate;

obtaining an interposer having a second plurality of via structures extending to a lower surface of the interposer;

wherein the lower surface of the interposer faces the upper surface of the package substrate in an integrated circuit package;

wherein the package substrate does not include a redistribution layer;

coupling the interposer and the package substrate to one another;

wherein the first plurality of via structures have a first pitch which is equal to a second pitch of the second plurality of via structures;

coupling a plurality of dies to the upper surface of the interposer with a plurality of interconnects having

a third pitch having a greater density than both the first pitch and the second pitch; and

etching the package substrate to expose upper ends of the first plurality of via structures to provide a layer of micro pins extending above the upper surface of the package substrate.

Assignments (4)
CHANGE OF NAME Recorded Nov 24, 2025
From: INVENSAS LLC
To: ADEIA SEMICONDUCTOR TECHNOLOGIES LLC
Reel/Frame 073508/0661 →
CHANGE OF NAME Recorded Nov 24, 2025
From: INVENSAS CORPORATION
To: INVENSAS LLC
Reel/Frame 073689/0793 →
SECURITY INTEREST Recorded Jun 1, 2020
From: ROVI SOLUTIONS CORPORATION; ROVI TECHNOLOGIES CORPORATION; ROVI GUIDES, INC.; TIVO SOLUTIONS INC.; VEVEO, INC.; INVENSAS CORPORATION; INVENSAS BONDING TECHNOLOGIES, INC.; TESSERA, INC.; TESSERA ADVANCED TECHNOLOGIES, INC.; DTS, INC.; PHORUS, INC.; IBIQUITY DIGITAL CORPORATION
To: BANK OF AMERICA, N.A.
Reel/Frame 053468/0001 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Aug 11, 2016
From: WOYCHIK, CHARLES G.; UZOH, CYPRIAN EMEKA; ZHANG, RON; BUCKMINSTER, DANIEL; GAO, GUILIAN
To: INVENSAS CORPORATION
Reel/Frame 039409/0169 →
Continuity (2)
Division 14220912 · Mar 20, 2014
Related Publication 20170033088A1 · Feb 2, 2017