Discharge examination device, wire-bonding apparatus, and discharge examination method
A discharge examination device for examining discharge of a wire-bonding apparatus that applies a voltage between a torch electrode and a wire to procure the discharge therebetween includes a current detection unit, a timer unit and a discharge determination unit. The current detection unit detects a discharge current flowing through the wire. The timer unit measures discharge detection time after application of the voltage before detection of the discharge current. The discharge determination unit determines whether or not the discharge is abnormal based on the discharge detection time. With this, a discharge examination device, a wire-bonding apparatus, and a discharge examination method that are capable of detecting abnormality of discharge are provided.
1. A discharge examination device for examining a discharge of a wire-bonding apparatus that applies a voltage between an electrode and a wire to procure the discharge therebetween, wherein the discharge is examined based on a discharge current generated between the electrode and a tip of the wire,
the discharge examination device comprising:
a voltage detection unit configured to detect the voltage being applied between the electrode and the wire to procure the discharge therebetween;
a current detection unit configured to detect the discharge current flowing through the wire;
a timer unit configured to measure a discharge detection time based on a first time point at start of the application of the voltage between the electrode and the wire and a second time point at start of the detection of the discharge current, wherein the discharge detection time is a time period from the first time point to the second time point; and
a discharge determination unit configured to determine that a distance between the electrode and the tip of the wire is above or below a predetermined threshold based on the discharge detection time, wherein a discharge abnormal signal is output to the wire-bonding apparatus when determined that the distance between the electrode and the tip of the wire is above or below the predetermined threshold so as to stop an operation of the wire-bonding apparatus,
wherein the discharge detection time in which an extending length of the tip of the wire is shorter than a predetermined length of the tip of the wire during a normal discharge is greater than the discharge detection time in which the extending length of the tip of the wire is longer than the predetermined length of the tip of the wire during the normal discharge.
2. The discharge examination device according to claim 1 , wherein the discharge determination unit determines whether or not the discharge detection time is out of a predetermined range based on a threshold, and determines that the discharge is abnormal when the discharge detection time is out of the predetermined range.
3. The discharge examination device according to claim 2 , wherein
the discharge determination unit causes a memory to record the discharge detection time if the discharge is determined to be not abnormal, and
the discharge examination device further comprises: a threshold setting unit configured to set the threshold based on the discharge detection time recorded in the memory.
4. The discharge examination device according to claim 3 , wherein
the threshold setting unit sets the threshold, when the discharge detection time is recorded in the memory, based on a predetermined number of pieces of the discharge detection time that are most recently recorded.
5. The discharge examination device according to claim 2 , further comprising:
a signal output unit configured to output the discharge abnormal signal to the wire-bonding apparatus when the discharge determination unit has determined that the discharge is abnormal, the discharge abnormal signal indicating that the discharge is abnormal.
6. The discharge examination device according to claim 1 , wherein
the discharge determination unit determines whether or not the discharge is abnormal based on the discharge detection time and the voltage.
7. A wire-bonding apparatus for bonding a ball to a bonding target, the wire-bonding apparatus comprising:
an electrode served as a torch electrode;
a bonding tool for bonding a ball that is formed on a tip of a wire paying out from a tip of the bonding tool; and
a discharge examination device for examining a discharge that applies a voltage between the electrode and the wire to procure the discharge therebetween, the discharge examination device including:
a current detection unit configured to detect a discharge current flowing through the wire, wherein the discharge is examined based on the discharge current generated between the electrode and a tip of the wire;
a voltage detection unit configured to detect the voltage being applied between the electrode and the wire to procure the discharge therebetween;
a timer unit configured to measure a discharge detection time based on a first point at start of the application of the voltage between the electrode and the wire and a second time point at start of the detection of the discharge current, wherein the discharge detection time is a time period from the first time point to the second time point; and
a discharge determination unit configured to determine that a distance between the electrode and the tip of the wire is above or below a predetermined threshold based on the discharge detection time, wherein a discharge abnormal signal is output to the wire-bonding apparatus when determined that the distance between the electrode and the tip of the wire is above or below the predetermined threshold so as to stop an operation of the wire-bonding apparatus,
wherein the discharge detection time in which an extending length of the tip of the wire is shorter than a predetermined length of the tip of the wire during a normal discharge is greater than the discharge detection time in which the extending length of the tip of the wire is longer than the predetermined length of the tip of the wire during the normal discharge.
8. A discharge examination method of examining a discharge of a wire-bonding apparatus that applies a voltage between an electrode and a wire to procure the discharge therebetween, wherein the discharge is examined based on a discharge current generated between the electrode and a tip of the wire, the discharge examination method comprising:
a current detecting step of detecting the discharge current owing through the wire;
a voltage detecting step of detecting the voltage being applied between the electrode and the wire to procure the discharge therebetween;
a timer step of measuring a discharge detection time based on a first time point at start of the application of the voltage between the electrode and the wire and a second time point at start of the detection of the discharge current, wherein the discharge detection time is a time period from the first time point to the second time point; and
a discharge determining step of determining that a distance between the electrode and the tip of the wire is above or below a predetermined threshold based on the discharge detection time, wherein a discharge abnormal signal is output to the wire-bonding apparatus when determined that the distance between the electrode and the tip of the wire is above or below the predetermined threshold so as to stop an operation of the wire-bonding apparatus,
wherein the discharge detection time in which an extending length of the tip of the wire is shorter than a predetermined length of the tip of the wire during a normal discharge is greater than the discharge detection time in which the extending length of the tip of the wire is longer than the predetermined length of the tip of the wire during the normal discharge.