Epitaxial growth apparatus and method of manufacturing a semiconductor device

1. A method of manufacturing a semiconductor device, comprising:

placing a substrate in a processing chamber of an epitaxial growth apparatus having an exhaust pipe communicated with the processing chamber;

mitigating accumulation of oily silane on the exhaust pipe by introducing an alkaline gas into the exhaust pipe without passing through the processing chamber while forming an epitaxial growth layer on the substrate in the processing chamber, the alkaline gas being introduced into the exhaust pipe by flowing into the exhaust pipe from an introducing pipe that is not communicated with the processing chamber; and

scrubbing one or more reaction products at a downstream end of the exhaust pipe using a scrubber inserted into the exhaust pipe on the downstream side, the scrubber being a wet scrubber that includes a fan and is configured to scrub the one or more reaction products by applying water to the one or more reaction products and thereby dissolving the one or more reaction products into the water.

2. The method according to claim 1 , further comprising:

heating the exhaust pipe by a heating unit, the alkaline gas being introduced into the heated exhaust pipe.

3. The method according to claim 1 , wherein

the forming of the epitaxial growth layer includes supplying a processing gas in the processing chamber, and the introducing of the alkaline gas is performed before the supplying of the processing gas, during the supplying of the processing gas, and after the supplying of the processing gas.

4. The method according to claim 1 , wherein the alkaline gas includes an ammonia gas.

5. The method according to claim 1 , wherein the introducing pipe is communicated with an upstream side portion of the exhaust pipe.

6. The method according to claim 1 , wherein the epitaxial growth layer being formed on the substrate in the processing chamber while the alkaline gas is being introduced into the exhaust pipe is a silicon layer that is being formed by supplying a silane-based gas to the processing chamber.

7. The method according to claim 1 , further comprising:

supplying a processing gas from a first gas supply source to the processing chamber via a supply pipe communicated with the processing chamber, and

supplying the alkaline gas from a second gas supply source to the introducing pipe.

8. The epitaxial growth method according to claim 7 , wherein the supplying of the processing gas from the first gas supply source includes

starting the supplying of the processing gas to the processing chamber while the supplying of the alkaline gas is ongoing, and

terminating the supplying of the processing gas to the processing chamber while the supplying of the alkaline gas is ongoing.

9. The epitaxial growth method according to claim 7 , wherein the processing gas includes a raw material gas, a carrier gas, and an acidic gas.

10. The epitaxial growth method according to claim 9 , wherein the raw material gas includes a silane-based gas, the carrier gas includes a hydrogen gas, the acidic gas includes a hydrogen chloride gas, and the alkaline gas includes an ammonia gas.

11. The method according to claim 2 , wherein the heating of the exhaust pipe by the heating unit further includes heating at least an inner surface of the exhaust pipe.

12. The method according to claim 11 , wherein the heating of the exhaust pipe by the heating unit further includes heating the inner surface of the exhaust pipe to a temperature in a range of 200° C. to 400° C.

13. The method according to claim 1 , further comprising:

supplying a processing gas to the processing chamber from a first gas supply source via a supply pipe communicated with the processing chamber, and

supplying the alkaline gas to the introducing pipe from a second gas supply source, wherein

the scrubbing of the one or more reaction products at the downstream end of the exhaust pipe further includes that the scrubber removes a gas ingredient by dissolving the gas ingredient in the water, the gas ingredient being generated by causing a reaction product of the processing gas and the alkaline gas to gasify in the exhaust pipe.

14. The method according to claim 1 , wherein the scrubbing of the one or more reaction products further includes that the scrubber uses a filter to remove a substance passing through the exhaust pipe by adhering the substance to the filter.

15. The method according to claim 5 , wherein the introducing pipe is communicated with the upstream side portion of the exhaust pipe, such that the introducing pipe is communicated with the exhaust pipe upstream from one or more valves provided in the exhaust pipe.

16. The method according to claim 15 , wherein the one or more valves include an automatic pressure controller (APC) valve and a gate valve.