Granted Patent B2

US 10,514,712 · App. 15/244,264 · Granted Dec 24, 2019

Inventors: Junhua Ding (Boxborough, MA); Michael L'Bassi (Sterling, MA)

Assignee: MKS Instruments, Inc.

G05D7/0635G01F1/363G01F1/50G01F15/005

Abstract

Claims (64)

1. A system for pressure-based flow measurement of a fluid flow, the system comprising:

a pressure-based mass flow controller (MFC) including a flow control valve, a flow restrictor, and a pressure sensor upstream of the flow restrictor, wherein the flow control valve, flow restrictor and pressure sensor are disposed along a flow stream;

one or more processors coupled with the pressure-based mass flow controller (MFC); and

memory coupled to the one or more processors, the memory including instructions which, when executed by the one or more processors, cause the one or more processors to

(i) receive, from the pressure-based mass flow controller (MFC), a sensed upstream pressure value P u ;

(ii) calculate, for the pressure-based mass flow controller (MFC), without a measured flow input, a downstream pressure value P d based on the received sensed upstream pressure value P u ;

(iii) calculate, for the pressure-based mass flow controller (MFC), without a measured downstream pressure, a flow rate Q based on the received upstream pressure value P u and the calculated downstream pressure value P d , where the instructions to calculate the downstream pressure P d and the instructions to calculate the flow rate Q include instructions to recursively calculate, based on P u , the flow rate Q based on calculated P d and the downstream pressure P d based on calculated Q until the values of Q and P d converge within an error threshold; and

(iv) control a flow through the pressure-based mass flow controller (MFC) based on the calculated flow rate Q.

2. The system of claim 1 , wherein the flow restrictor comprises a flow nozzle or orifice.

3. The system of claim 1 , where the instructions to calculate the downstream pressure P d and the instructions to calculate the flow rate Q include instructions to set P d to an initial value P d0 .

4. The system of claim 1 , where the instructions to calculate the downstream pressure P d and the instructions to calculate the flow rate Q include:

instructions to set P d to an initial value P d0 , and instructions to recursively calculate the flow rate Q and P d based on calculated P d and Q, respectively, until the values of Q and P d converge within a pre-defined error threshold;

receive, from the pressure-based mass flow controller (MFC), an updated upstream pressure value P u ; and

determine, based on P d and P u , whether a flow condition in the pressure-based mass flow controller (MFC) is critical or non-critical flow; and

calculate Q based on whether the flow condition is critical or non-critical flow; and update P d based on the calculated value of Q.

5. The system of clause 4 , where the instructions to update P d based on the calculated value of Q include instructions to calculate the downstream pressure value P d according to an equation P d =P d0 +ƒ(Q, P u , γ, M), where P d0 is an initial downstream pressure, γis a ratio of specific heat of a flowing gas, M is a molecular weight of the flowing gas, and f( ) is a function of Q, P u , γ, M.

6. The system of claim 5 , where ƒ is a linear function of Q, a linear function of P u , a linear function of γ, and a linear function of M.

7. The system of claim 4 , where the instructions to determine whether the flow condition is critical or non-critical include instructions to determine that a flow condition is critical if P d /P u is less than [2/(γ+1)]{circumflex over ( )}[γ/(γ−1)]; and determine that a flow condition is non-critical if P d /P u , is greater than or equal to [2/(γ+1)]{circumflex over ( )}[γ/(γ−1)], where γis a ratio of specific heat of a flowing gas.

8. The system of claim 4 , where the instructions to calculate Q include instructions to calculate Q using a critical flow equation if the flow condition is critical; and calculate Q using a non-critical flow equation, if the flow condition is non-critical.

9. The system of claim 4 , where the instructions to calculate Q include instructions to, upon determining that the flow condition is non-critical calculate a critical flow rate Q cf using a critical flow equation; calculate a non-critical flow rate Q ncf using a non-critical flow equation; and calculate Q based on a weighting factor w, the critical flow rate Q cf , and the non-critical flow rate Q ncf , where Q=w*Q cf +(1−w)*Q ncf .

10. The system of claim 9 , where the weighting factor w is calculated according to w=ƒ w (Q, P u , P d , γ, M), where γis a ratio of specific heat of a flowing gas, M is a molecular weight of the flowing gas and ƒ w ( )is a function of Q, P u , P d , γ, M.

11. The system of claim 9 , where w=1 if P d /P u is less than Pr min ; w=0 if P d /P u is greater than Pr max ; and w=1−[(P d /P u −Pr min )/(Pr max −Pr min )]{circumflex over ( )}N if P d /P u is greater than Pr min and less than Pr max , where Pr min and Pr max are variables between 0 and 1 that are determined based on a ratio of specific heat of a flowing gas γ, the flow rate Q, and a nozzle orifice size of the flow-restricting orifice of the pressure-based mass flow controller (MFC).

12. The system of claim 11 , where N is a positive exponential coefficient that is determined based on γ, Q, and the nozzle orifice size of the flow-restricting orifice of the pressure-based mass flow controller (MFC).

13. The system of claim 1 , wherein the memory further includes instructions which, when executed by the one or more processors, cause the one or more processors to:

receive an initial downstream pressure value P d0 for the pressure-based mass flow controller (MFC);

set a stored downstream pressure value P d to the received initial downstream pressure value P d0 ;

recursively calculate the flow rate Q and P d based on calculated Q and P d respectively, until the values of Q and P d converge within a pre-defined error threshold;

receive, from the pressure-based mass flow controller (MFC), an upstream pressure value P u ;

determine, based on P d and P u , whether a flow condition in the pressure-based mass flow controller (MFC) is critical or non-critical flow;

calculate Q based on whether the flow condition is critical or non-critical; and update P d based on the calculated value of Q; and

cause the one or more processors to, after the calculated flow rate Q and the stored downstream pressure value P d converge to respective values within a pre-defined error threshold, control a flow through the pressure-based mass flow controller (MFC) based on the calculated flow rate Q.

14. The system of claim 13 , where the initial downstream pressure value P d0 corresponds to a measured upstream pressure value before gas begins flowing through the pressure-based mass flow controller (MFC).

15. A non-transitory machine-readable medium comprising instructions which, when executed by a machine, cause the machine to:

receive, from a pressure-based mass flow controller (MFC), an upstream pressure value P u ;

calculate, for the pressure-based mass flow controller (MFC), without a measured flow input, a downstream pressure value P d based on the received upstream pressure value P u ;

calculate, for the pressure-based mass flow controller (MFC), without a measured downstream pressure, a flow rate Q based on the received upstream pressure value P u and the calculated downstream pressure value P d , where the instructions to calculate the downstream pressure P d and the instructions to calculate the flow rate Q include instructions to recursively calculate, based on P u , the flow rate Q based on calculated P d and the downstream pressure P d based on calculated Q until the values of Q and P d converge within an error threshold; and

control a flow through the pressure-based mass flow controller (MFC) based on the calculated flow rate Q;

wherein the MFC includes a flow control valve, a flow-restricting orifice in the flow path of the flow control valve, and an upstream pressure sensor in the flow path upstream of the flow-restricting orifice.

16. The non-transitory machine-readable medium of claim 15 , wherein the machine-readable instructions further comprise instructions to:

cause the machine to receive an initial downstream pressure value P d0 for the pressure-based mass flow controller (MFC); and

set a stored downstream pressure value P d to the received initial downstream pressure value P d0 ;

cause the machine to repeat the determination of the calculated flow rate Q and P d based on calculated P d and Q, respectively, until the values of calculated flow rate Q and P d converge to respective values within a pre- defined error threshold;

receive, from the pressure-based mass flow controller (MFC), an upstream pressure value P u ;

determine, based on P d and P u , whether a flow condition in the pressure-based mass flow controller (MFC) is critical or non-critical;

calculate Q based on whether the flow condition is critical or non-critical; and update P d based on the calculated value of Q; and

cause the machine to, after the calculated flow rate Q and the stored downstream pressure value P d converge to respective values within a pre-defined error threshold, control a flow through the pressure-based mass flow controller (MFC) based on the calculated flow rate Q.

17. A method of for pressure-based flow control through a pressure-based mass flow controller (MFC), the method comprising:

receiving an initial downstream pressure value P d0 for a pressure-based mass flow controller (MFC); and

setting a stored downstream pressure value P d to the received initial downstream pressure value P d0 ;

recursively calculate the flow rate Q and P d based on calculated P d and Q, respectively, until the values of Q and P d converge within a pre-defined error threshold;

receiving, from the pressure-based mass flow controller (MFC), a sensed upstream pressure value P u ;

determining, based on P d and P u , whether a flow condition in the pressure-based mass flow controller (MFC) is critical or non-critical;

computing Q based on whether the flow condition is critical or non-critical; and

updating P d based on the calculated value of Q; and

after the calculated flow rate Q and the stored downstream pressure value P d converge to respective values within a pre-defined error threshold, controlling a flow through the pressure-based mass flow controller (MFC) based on the calculated flow rate Q;

wherein the pressure-based mass flow controller (MFC) includes a flow control valve, a flow restrictor, and a pressure sensor upstream of the flow restrictor, and wherein the flow control valve, flow restrictor and pressure sensor are disposed along a flow stream.

18. The method of claim 17 , wherein the flow restrictor comprises a flow nozzle or orifice.

19. A system for pressure-based flow measurement of a fluid flow, the system comprising:

a pressure-based mass flow controller (MFC) including a flow control valve, a flow restrictor, and a pressure sensor upstream of the flow restrictor, wherein the flow control valve, flow restrictor and pressure sensor are disposed along a flow stream;

one or more processors coupled with the pressure-based mass flow controller (MFC); and

memory coupled to the one or more processors, the memory including instructions which, when executed by the one or more processors, cause the one or more processors to

(i) receive, from the pressure-based mass flow controller (MFC), a sensed upstream pressure value P u ;

(ii) recursively calculate, for the pressure-based mass flow controller (MFC), based on the received upstream pressure value P u , and based on calculated Q and P d , respectively, a downstream pressure value P d and a flow rate Q until the values of Q and P d converge; and

(iii) control a flow through the pressure-based mass flow controller (MFC) based on the calculated flow rate Q.

Assignments (9)