Apparatus and method for measuring a wavelength-dependent optical characteristic of an optical system
An apparatus for measuring a wavelength-dependent optical characteristic of an optical system has a light-pattern generation device which generates a pattern of polychromatic light in an object plane. Together with the optical system, a measuring optical unit images the object plane on a spatially resolving light sensor. A dispersive optical element is arranged in a light path between the optical system and the light sensor in such a way that a plurality of images of the pattern with different wavelengths are generated simultaneously on the light sensor. The evaluation device determines the wavelength-dependent characteristic of the optical system from the plurality of images on the light sensor.
1. An apparatus for measuring a wavelength-dependent optical characteristic of an optical system, comprising:
a) a light-pattern generation device configured to generate a pattern of polychromatic light in an object plane;
b) a spatially resolving light sensor;
c) a measuring optical unit configured, together with the optical system, to image the object plane on the light sensor;
d) a dispersive optical element arranged in a light path between the optical system and the light sensor so that a plurality of images of the pattern with different wavelengths are generated simultaneously on the light sensor; and
e) an evaluation device configured to determine the wavelength-dependent characteristic of the optical system from the plurality of images.
2. The apparatus according to claim 1 , wherein the optical system, together with the measuring optical unit, generates an intermediate image of the pattern which is imaged on the light sensor.
3. The apparatus according to claim 2 , further comprising a further spatially resolving light sensor, wherein the measuring optical unit is configured, together with the optical system, to additionally image the object plane on the further light sensor, with no dispersive optical element being arranged in the light path of the further light sensor.
4. Apparatus according to claim 3 , wherein the evaluation device is configured to derive wavelength-independent information from the image of the pattern on the further light sensor and use the information to correct the spatial information obtained by the light sensor.
5. The apparatus according to claim 1 , wherein the polychromatic light comprises a discrete spectrum or a plurality of continuous spectra, which are spectrally spaced apart.
6. The apparatus according to claim 1 , wherein the polychromatic light comprises a continuous spectrum.
7. The apparatus according to claim 1 , further comprising a spectral filter is arranged between the optical system and the light sensor.
8. The apparatus according to claim 7 , wherein the spectral filter is arranged in an interchange holder, at least one further spectral filter being arranged in the interchange holder, the at least one further spectral filter having different spectral properties than the spectral filter.
9. The apparatus according to claim 1 , wherein the measuring optical unit comprises a portion that is arranged between the light-pattern generation device and the optical system, wherein said portion is configured to illuminate the optical system with collimated light.
10. The apparatus according to claim 9 , wherein the measuring optical unit has a condenser having a focal plane in which the pattern is arranged.
11. The apparatus according to claim 9 , wherein a part of the measuring optical unit arranged between the optical system and the light sensor has a focal plane which is axially adjustable.
12. The apparatus according to claim 1 , wherein the optical system generates an intermediate image of the pattern lying at infinity, wherein the intermediate image is imaged on the light sensor by the measuring optical unit.
13. An apparatus for measuring a wavelength-dependent optical characteristic of an optical system, comprising:
a) a light-pattern generation device configured to generate a pattern of polychromatic light in an object plane;
b) a spatially resolving light sensor;
c) a measuring optical unit configured, together with the optical system, to image the object plane on the light sensor;
d) a dispersive optical element arranged in a light path between the optical system and the light sensor so that a plurality of images of the pattern with different wavelengths are generated simultaneously on the light sensor; and
e) an evaluation device configured to determine the wavelength-dependent characteristic of the optical system from the plurality of images, wherein the optical characteristic is selected from the group consisting of: spectral modulation transfer function, spectral transmission coefficient, longitudinal chromatic aberration, and transverse chromatic aberration.
14. A method for measuring a wavelength-dependent optical characteristic of an optical system, comprising the steps of:
a) generating a pattern of polychromatic light in an object plane;
b) imaging the pattern on a spatially resolving light sensor using the optical system and a measuring optical unit, with a dispersive optical element being situated in a light path between the optical system and the light sensor such that a plurality of images of the pattern with different wavelengths are generated simultaneously on the light sensor; and
c) determining the optical characteristic from the plurality of images on the light sensor.
15. The method according to claim 14 , wherein the optical system, together with the measuring optical unit, generates an intermediate image of the pattern which is imaged on the light sensor.
16. The method according to claim 15 , wherein the measuring optical unit, together with the optical system, additionally images the object plane on a further light sensor, with no dispersive optical element being arranged in the light path of the further light sensor.
17. The method according to claim 16 , including deriving wavelength-independent information from the image of the pattern on the further light sensor and using the derived information to correct spatial information obtained by the light sensor.
18. The method according to claim 14 , wherein the polychromatic light comprises a discrete spectrum or a plurality of continuous spectra, which are spectrally spaced apart.
19. The method according to claim 14 , wherein the polychromatic light comprises a continuous spectrum.
20. The method according to claim 14 , wherein the light is spectrally filtered between the optical system and the light sensor.
21. The method according to claim 14 , wherein the measuring optical unit comprises a portion that is arranged between the light-pattern generation device and the optical system, wherein said portion illuminates the optical system with collimated light.
22. The method according to claim 14 , wherein the optical system generates an intermediate image of the pattern lying at infinity, which intermediate image is imaged on the light sensor by the measuring optical unit.
23. The method according to claim 14 , wherein the at least one optical characteristic is selected from the group consisting of: spectral modulation transfer function, spectral transmission coefficient, longitudinal chromatic aberration, and transverse chromatic aberration.