Microelectronic assembly with redistribution structure formed on carrier
A microelectronic assembly can be made by forming a redistribution structure supported on a carrier, the structure including two or more layers of deposited dielectric material and two or more electrically conductive layers and including conductive features such as pads and traces electrically interconnected by vias. Electrical connectors may project above a second surface of the structure opposite an interconnection surface of the redistribution structure adjacent to the carrier. A microelectronic element may be attached and electrically connected with conductive features at the second surface, and a dielectric encapsulation can be formed contacting the second surface and surfaces of the microelectronic element. Electrically conductive features at the interconnection surface can be configured for connection with corresponding features of a first external component, and the electrical connectors can be configured for connection with corresponding features of a second external component.
1. A method of fabricating a microelectronic assembly, comprising:
forming a redistribution structure supported on a carrier by forming two or more layers of deposited dielectric material and two or more electrically conductive layers thereon each electrically conductive layer comprising electrically conductive features including at least one of contacts or traces supported by the layers of deposited dielectric material, the electrically conductive layers electrically interconnected through vias;
singulating the carrier with the redistribution structure supported thereon into individual units, each unit containing a singulated portion of the carrier;
joining electrically conductive features at a second surface of the redistribution structure opposite from the carrier with corresponding contacts at a first surface of a substrate which are juxtaposed with the conductive features;
and then removing the singulated portions of the carrier overlying an interconnection surface of the redistribution structure,
wherein electrically conductive features at the interconnection surface are configured for connection with corresponding features of a first external component, and
wherein the electrically conductive features of the redistribution structure and the corresponding contacts of the substrate comprise first and second dissimilar metals, respectively, the joining comprises heating the redistribution structure and the substrate to a joining temperature at which the first dissimilar metal melts and forms an alloy mass with the second dissimilar metal, and the joining temperature is lower than a melting temperature of the alloy mass.
2. The method as claimed in claim 1 , further comprising joining contacts at a surface of the first external component to corresponding electrically conductive features which are juxtaposed therewith at the interconnection surface of the redistribution structure.
3. The method as claimed in claim 2 , wherein the first external component is at least one microelectronic element.
4. The method as claimed in claim 1 , wherein the substrate has a second surface opposite the first surface and includes terminals at the second surface, the terminals configured for connection with contacts of a second external component or circuit panel.
5. The method as claimed in claim 1 , wherein the redistribution structure further comprises first metal layer features at the second surface of the redistribution structure, and the substrate further comprises second metal layer features at the first surface of the substrate, the first metal layer features and the second metal layer features being configured for connection with one of ground, a power supply voltage, or to be at a floating electrical potential,
wherein each of the first metal layer features and the second metal layer features has first and second dimensions at the respective surfaces which are larger than a minimum pitch of the electrically conductive features,
wherein the joining further comprises joining the first metal layer features with the second metal layer features another using an electrically conductive bonding material.
6. The method as claimed in claim 5 , wherein the joining of the first and second metal layer features with one another is performed simultaneously with the joining of the electrically conductive features of the redistribution structure with the corresponding contacts of the substrate.