Semiconductor memory device
According to an embodiment, a semiconductor memory device comprises a substrate, a plurality of first conductive layers, a memory columnar body, a first semiconductor layer, a second semiconductor layer and a contact. The plurality of first conductive layers are stacked upwardly of the substrate. The memory columnar body extends in a first direction intersecting an upper surface of the substrate and a side surface of the memory columnar body is covered by the first conductive layers. The first semiconductor layer is connected to a lower end of the memory columnar body and extends in a second direction intersecting the first direction. The second conductive layer is provided between the first semiconductor layer and the first conductive layers. The second conductive layer is connected to the memory columnar body and extending in the second direction. The contact is connected to the second conductive layer and extends in the first direction.
1. A semiconductor memory device, comprising:
a substrate;
a plurality of first conductive layers stacked upwardly of the substrate;
a memory columnar body extending in a first direction intersecting an upper surface of the substrate, a side surface of the memory columnar body being covered by the plurality of first conductive layers;
a first semiconductor layer connected to a lower end of the memory columnar body, the first semiconductor layer extending in a second direction intersecting the first direction;
a second conductive layer provided between the first semiconductor layer and the plurality of first conductive layers, the second conductive layer being connected to the memory columnar body and extending in the second direction; and
a contact connected to the second conductive layer, the contact extending in the first direction,
the memory columnar body comprising:
a second semiconductor layer extending in the first direction, the second semiconductor layer facing the plurality of first conductive layers;
a gate insulating layer covering a side surface of the second semiconductor layer; and
a third semiconductor layer covering a side surface of a lower part of the second semiconductor layer,
wherein the first semiconductor layer includes a P type impurity,
the third semiconductor layer includes an N type impurity, and
the second semiconductor layer is connected to the contact via the second conductive layer and the third semiconductor layer.
2. The semiconductor memory device according to claim 1 , wherein
the first semiconductor layer is a P type impurity layer provided in the upper surface of the substrate.
3. The semiconductor memory device according to claim 2 , wherein
the P type impurity includes boron (B).
4. The semiconductor memory device according to claim 1 , wherein
the N type impurity is at least one of phosphorus (P) and arsenic (As), and
the P type impurity is boron (B).
5. The semiconductor memory device according to claim 1 , wherein
a concentration of impurity in the second semiconductor layer is lower than a concentration of impurity in the first semiconductor layer, and is lower than a concentration of impurity in the third semiconductor layer.
6. The semiconductor memory device according to claim 5 , wherein
the N type impurity is at least one of phosphorus (P) and arsenic (As), and
the P type impurity is boron (B).
7. The semiconductor memory device according to claim 1 , wherein
the third semiconductor layer includes a monocrystal.
8. The semiconductor memory device according to claim 1 , wherein
an upper end of the contact is connected to a source line provided upwardly of the contact, and
a lower end of the contact is connected to the first semiconductor layer.
9. The semiconductor memory device according to claim 1 , wherein
an upper end of the contact is connected to a source line provided upwardly of the contact, and
a lower end of the contact is connected to the second conductive layer.
10. A semiconductor memory device, comprising:
a substrate;
a plurality of first conductive layers stacked upwardly of the substrate;
a memory columnar body extending in a first direction intersecting an upper surface of the substrate, a side surface of the memory columnar body being covered by the plurality of first conductive layers;
a first semiconductor layer connected to a lower end of the memory columnar body, the first semiconductor layer extending in a second direction intersecting the first direction;
a second conductive layer provided between the first semiconductor layer and the plurality of first conductive layers, the second conductive layer being connected to the memory columnar body and extending in the second direction; and
a contact connected to the second conductive layer, the contact extending in the first direction,
the memory columnar body comprising:
a second semiconductor layer extending in the first direction, the second semiconductor layer facing the plurality of first conductive layers;
a third semiconductor layer covering a side surface of a lower part of the second semiconductor layer; and
a fourth semiconductor layer connected to the first semiconductor layer and a lower end of the second semiconductor layer, and
the second semiconductor layer being connected to the contact via the second conductive layer and the third semiconductor layer.
11. The semiconductor memory device according to claim 10 , wherein
the first semiconductor layer includes a P type impurity, and
the third semiconductor layer includes an N type impurity.
12. The semiconductor memory device according to claim 11 , wherein
the N type impurity is at least one of phosphorus (P) and arsenic (As), and
the P type impurity is boron (B).
13. The semiconductor memory device according to claim 11 , wherein
a concentration of impurity in the second semiconductor layer is lower than a concentration of impurity in the first semiconductor layer, and is lower than a concentration of impurity in the third semiconductor layer.
14. The semiconductor memory device according to claim 13 , wherein
the N type impurity is at least one of phosphorus (P) and arsenic (As), and
the P type impurity is boron (B).
15. The semiconductor memory device according to claim 10 , wherein
the third semiconductor layer and the fourth semiconductor layer include a monocrystal.
16. The semiconductor memory device according to claim 10 , wherein
an upper end of the contact is connected to a source line provided upwardly of the contact, and
a lower end of the contact is connected to the first semiconductor layer.
17. The semiconductor memory device according to claim 10 , wherein
an upper end of the contact is connected to a source line provided upwardly of the contact, and
a lower end of the contact is connected to the second conductive layer.
18. The semiconductor memory device according to claim 10 , further comprising
a first insulating layer provided between a plurality of the first conductive layers and the contact,
wherein
the contact comprises: a first portion extending in the first direction; and a second portion provided between this first portion and the first semiconductor layer,
a lower end of the first insulating layer is positioned more upwardly than an upper surface of the first semiconductor layer, and
a side surface of the second portion of the contact contacts the first semiconductor layer at a height position of the upper surface of the first semiconductor layer.
19. A semiconductor memory device, comprising:
a substrate;
a plurality of first conductive layers stacked upwardly of the substrate;
a memory columnar body extending in a first direction intersecting an upper surface of the substrate, a side surface of the memory columnar body being covered by the plurality of first conductive layers;
a first semiconductor layer connected to a lower end of the memory columnar body, the first semiconductor layer extending in a second direction intersecting the first direction;
a second conductive layer provided between the first semiconductor layer and the plurality of first conductive layers, the second conductive layer being connected to the memory columnar body and extending in the second direction;
a contact connected to the second conductive layer, the contact extending in the first direction; and
a first insulating layer provided between a plurality of the first conductive layers and the contact, wherein
the contact comprises: a first portion extending in the first direction; and a second portion provided between this first portion and the first semiconductor layer,
a lower end of the first insulating layer is positioned more upwardly than an upper surface of the first semiconductor layer, and
a side surface of the second portion of the contact contacts the first semiconductor layer at a height position of the upper surface of the first semiconductor layer.
20. The semiconductor memory device according to claim 19 , wherein
the first semiconductor layer is a P type impurity layer provided in the upper surface of the substrate.
21. The semiconductor memory device according to claim 20 , wherein
the P type impurity includes boron (B).
22. The semiconductor memory device according to claim 19 , wherein
the memory columnar body comprises:
a second semiconductor layer extending in the first direction, the second semiconductor layer facing the plurality of first conductive layers;
a gate insulating layer covering a side surface of the second semiconductor layer; and
a third semiconductor layer covering a side surface of a lower part of the second semiconductor layer,
wherein the first semiconductor layer includes a P type impurity,
the third semiconductor layer includes an N type impurity, and
the second semiconductor layer is connected to the contact via the second conductive layer and the third semiconductor layer.
23. The semiconductor memory device according to claim 22 , wherein
the N type impurity is at least one of phosphorus (P) and arsenic (As), and
the P type impurity is boron (B).
24. The semiconductor memory device according to claim 22 , wherein
a concentration of impurity in the second semiconductor layer is lower than a concentration of impurity in the first semiconductor layer, and is lower than a concentration of impurity in the third semiconductor layer.
25. The semiconductor memory device according to claim 24 , wherein
the N type impurity is at least one of phosphorus (P) and arsenic (As), and
the P type impurity is boron (B).
26. The semiconductor memory device according to claim 22 , wherein
the third semiconductor layer includes a monocrystal.
27. The semiconductor memory device according to claim 19 , wherein
an upper end of the contact is connected to a source line provided upwardly of the contact, and
a lower end of the contact is connected to the first semiconductor layer.
28. The semiconductor memory device according to claim 19 , wherein
an upper end of the contact is connected to a source line provided upwardly of the contact, and
a lower end of the contact is connected to the second conductive layer.