IP Library Granted Patent US 9,859,491
Granted Patent B2
US 9,859,491 · App. 15/259,855 · Granted Jan 2, 2018

Magnetoresistive element and magnetic memory

Inventors: Tadaomi Daibou (Yokohama, JP); Yushi Kato (Chofu, JP); Shumpei Omine (Meguro, JP); Naoki Hase (Shinagawa, JP); Junichi Ito (Yokohama, JP)
Assignee: KABUSHIKI KAISHA TOSHIBA
H01L43/08G01R33/098G11B5/3909G11C11/161H01L43/02H01L43/10G11C11/16H01L27/228
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Quick Facts
Patent No.
US 9,859,491
App. No.
15/259,855
Granted
Jan 2, 2018
Kind
B2
Abstract

A magnetoresistive element according to an embodiment includes a stack structure, the stack structure including: a first magnetic layer containing Mn and at least one element of Ga, Ge, or Al; a second magnetic layer; a first nonmagnetic layer disposed between the first magnetic layer and the second magnetic layer; a third magnetic layer disposed between the first magnetic layer and the first nonmagnetic layer; and a second nonmagnetic layer disposed between the first magnetic layer and the third magnetic layer, the second nonmagnetic layer containing at least one element of Mg, Ba, Ca, C, Sr, Sc, Y, Gd, Tb, Dy, Ce, Ho, Yb, Er, or B.

Claims (75)

1. A magnetic memory comprising:

a magnetoresistive element comprising:

a first magnetic layer comprising Mn and at least one element selected from the group consisting of Ca, Ge, and Al;

a second magnetic layer;

a first nonmagnetic layer disposed between the first magnetic layer and the second magnetic layer;

a third magnetic layer disposed between the first magnetic layer and the first nonmagnetic layer; and

a second nonmagnetic layer disposed between the first magnetic layer and the third magnetic layer, wherein the second nonmagnetic layer is in contact with the first magnetic layer and the third magnetic layer, and wherein the second nonmagnetic layer comprises an alloy layer comprising at least one element selected from the group consisting of Mg, Ba, Ca, C, Sr, Sc, Y, Gd, Tb, Dy, Ce, Ho, Yb, Er, and B;

a first wiring electrically connected to the first magnetic layer of the magnetoresistive element; and

a second wiring electrically connected to the second magnetic layer of the magnetoresistive element.

2. The memory according to claim 1 , wherein the second magnetic layer comprises Mn and at least one element selected from the group consisting of Ga, Ge, and Al.

3. The memory according to claim 2 , wherein:

the second magnetic layer comprises a first magnetic portion and a second magnetic portion, the first magnetic portion being disposed between the first nonmagnetic layer and the second magnetic portion; and

the first magnetic portion has a higher spin polarizability than the second magnetic portion.

4. The memory according to claim 1 , further comprising:

a fourth magnetic layer disposed between the first nonmagnetic layer and the second magnetic layer; and

a third nonmagnetic layer disposed between the fourth magnetic layer and the second magnetic layer.

5. The memory according to claim 1 , wherein the third magnetic layer has a higher spin polarizability than the first magnetic layer.

6. A magnetic memory, comprising:

a magnetoresistive element comprising:

a first magnetic layer comprising Mn and at least one element selected from the group consisting of Ga, Ge, and Al;

a second magnetic layer;

a first nonmagnetic layer disposed between the first magnetic layer and the second magnetic layer;

a third magnetic layer disposed between the first magnetic layer and the first nonmagnetic layer; and

a second nonmagnetic layer disposed between the first magnetic layer and the third magnetic layer, wherein the second nonmagnetic layer comprises boron and at least one element selected from the group consisting of Mg, Ba, Ca, C, Sr, Sc, Y, Gd, Tb, Dy, Ce, Ho, Yb, and Er;

a first wiring electrically connected to the first magnetic layer of the magnetoresistive element; and

a second wiring electrically connected to the second magnetic layer of the magnetoresistive element.

7. The memory according to claim 6 , wherein the second magnetic layer comprises Mn and at least one element selected from the group consisting of Ga, Ge, and Al.

8. The memory according to claim 7 , wherein:

the second magnetic layer comprises a first magnetic portion and a second magnetic portion, the first magnetic portion being disposed between the first nonmagnetic layer and the second magnetic portion; and

the first magnetic portion has a higher spin polarizability than the second magnetic portion.

9. The memory according to claim 6 , further comprising:

a fourth magnetic layer disposed between the first nonmagnetic layer and the second magnetic layer; and

a third nonmagnetic layer disposed between the fourth magnetic layer and the second magnetic layer.

10. The memory according to claim 6 , wherein the third magnetic layer has a higher spin polarizability than the first magnetic layer.

11. A magnetic memory, comprising:

a magnetoresistive element comprising:

a first magnetic layer comprising Mn and at least one element selected from the group consisting of Ga, Ge, and Al;

a second magnetic layer;

a first nonmagnetic layer disposed between the first magnetic layer and the second magnetic layer;

a third magnetic layer disposed between the first magnetic layer and the first nonmagnetic layer; and

a second nonmagnetic layer disposed between the first magnetic layer and the third magnetic layer, wherein the second nonmagnetic layer comprises nitrogen and at least one element selected from the group consisting of Mg, Ba, Ca, C, B, Sr, Sc, Y, Gd, Tb, Dy, Ce, Ho, Yb, and Er;

a first wiring electrically connected to the first magnetic layer of the magnetoresistive element; and

a second wiring electrically connected to the second magnetic layer of the magnetoresistive element.

12. The memory according to claim 11 , wherein the third magnetic layer has a higher spin polarizability than the first magnetic layer.

13. A magnetic memory, comprising:

a magnetoresistive element comprising:

a first magnetic layer comprising Mn and at least one element selected from the group consisting of Ga, Ge, and Al;

a second magnetic layer;

a first nonmagnetic layer disposed between the first magnetic layer and the second magnetic layer;

a third magnetic layer disposed between the first magnetic layer and the first nonmagnetic layer; and

a second nonmagnetic layer disposed between the first magnetic layer and the third magnetic layer, wherein the second nonmagnetic layer comprises carbon and at least one element selected from the group consisting of Mg, Ba, Ca, B, Sr, Sc, Y, Gd, Tb, Dy, Ce, Ho, Yb, and Er;

a first wiring electrically connected to the first magnetic layer of the magnetoresistive element; and

a second wiring electrically connected to the second magnetic layer of the magnetoresistive element.

14. The memory according to claim 13 , wherein the third magnetic layer has a higher spin polarizability than the first magnetic layer.

15. A magnetic memory, comprising:

a magnetoresistive element comprising:

a first magnetic layer comprising Mn and at least one element selected from the group consisting of Ga, Ge, and Al;

a second magnetic layer;

a first nonmagnetic layer disposed between the first magnetic layer and the second magnetic layer;

a third magnetic layer disposed between the first magnetic layer and the first nonmagnetic layer; and

a second nonmagnetic layer disposed between the first magnetic layer and the third magnetic layer, wherein the second nonmagnetic layer comprises at least one element selected from the group consisting of Mg, Ba, Ca, C, Sr, Sc, Y, Gd, Tb, Dy, Ce, Ho, Yb, Er, and B;

a first wiring electrically connected to the first magnetic layer of the magnetoresistive element; and

a second wiring electrically connected to the second magnetic layer of the magnetoresistive element,

wherein:

the second nonmagnetic layer comprises a first portion and a second portion disposed between the first portion and the third magnetic layer;

the first portion comprises at least one element selected from the group consisting of Mg, Ba, Ca, C, Sr, Sc, Y, Gd, Tb, Dy, Ce, Ho, Yb, Er, and B; and

the second portion comprises at least one element selected from the group consisting of Ta, Ti, W, Nb, V, Cr, and Hf.

16. A magnetic memory comprising: a magnetoresistive element including: a first magnetic layer comprising Mn and at least one element selected from the group consisting of Ga, Ge, and Al; a second magnetic layer; a first nonmagnetic layer disposed between the first magnetic layer and the second magnetic layer; a third magnetic layer disposed between the first magnetic layer and the first nonmagnetic layer, wherein the third magnetic layer has a higher spin polarizability than the first magnetic layer; and a second nonmagnetic layer disposed between the first magnetic layer and the third magnetic layer, wherein the second nonmagnetic layer is in contact with the first magnetic layer and the third magnetic layer, and wherein the second nonmagnetic layer comprises a metal layer comprising Mg; a first wiring electrically connected to the first magnetic layer of the magnetoresistive element; and a second wiring electrically connected to the second magnetic layer of the magnetoresistive element.

17. The memory according to claim 16 , wherein the second magnetic layer comprises Mn and at least one element selected from the group consisting of Ga, Ge, and Al.

18. The memory according to claim 17 , wherein:

the second magnetic layer comprises a first magnetic portion and a second magnetic portion, the first magnetic portion being disposed between the first nonmagnetic layer and the second magnetic portion; and

the first magnetic portion has a higher spin polarizability than the second magnetic portion.

19. The memory according to claim 16 , further comprising:

a fourth magnetic layer disposed between the first nonmagnetic layer and the second magnetic layer; and

a third nonmagnetic layer disposed between the fourth magnetic layer and the second magnetic layer.

Assignments (4)
DE-MERGER Recorded Dec 12, 2019
From: KABUSHIKI KAISHA TOSHIBA
To: TOSHIBA MEMORY CORPORATION
Reel/Frame 051260/0291 →
MERGER Recorded Dec 12, 2019
From: TOSHIBA MEMORY CORPORATION; K.K PANGEA
To: TOSHIBA MEMORY CORPORATION
Reel/Frame 051262/0776 →
CHANGE OF NAME AND ADDRESS Recorded Dec 12, 2019
From: TOSHIBA MEMORY CORPORATION
To: KIOXIA CORPORATION
Reel/Frame 051262/0881 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Dec 15, 2016
From: DAIBOU, TADAOMI; KATO, YUSHI; OMINE, SHUMPEI; HASE, NAOKI; ITO, JUNICHI
To: KABUSHIKI KAISHA TOSHIBA
Reel/Frame 040983/0465 →
Priority Claims (1)
JP 2014-050839 · Mar 13, 2014 · national
Continuity (2)
Continuation PCTJP2015050939 · Jan 15, 2015
Related Publication 20160380186A1 · Dec 29, 2016