IP Library Granted Patent US 11,214,661
Granted Patent B2
US 11,214,661 · App. 15/261,163 · Granted Jan 4, 2022

Three-dimensional nanofabrication by patterning of hydrogels

Inventors: Samuel G. Rodriques (Cambridge, MA); Daniel Oran (Cambridge, MA); Ruixuan Gao (Cambridge, MA); Shoh Asano (Cambridge, MA); Mark A. Skylar-Scott (Brookline, MA); Fei Chen (Cambridge, MA); Paul W. Tillberg (Cambridge, MA); Adam H. Marblestone (Medford, MA); Edward S. Boyden (Chestnut Hill, MA)
Assignee: Massachusetts Institute of Technology
C08J7/123B29C35/0805B33Y80/00C08J3/075C08J3/28C08J7/02C08J7/12B29C2035/0838B29K2105/0061C08J2333/26
View Patent ↗
Loading inventors, assignments & file history…
Monitor This Case
Get email alerts when status or documents change.
Order Certified Copies
Most orders are placed with the USPTO same day — all within 24 business hours.
Order via The Patent Place →
Pre-filled with this patent's details
Quick Facts
Patent No.
US 11,214,661
App. No.
15/261,163
Granted
Jan 4, 2022
Kind
B2
Abstract

The present invention enables three-dimensional nanofabrication by isotropic shrinking of patterned hydrogels. A hydrogel is first expanded, the rate of expansion being controlled by the concentration of the crosslinker. The hydrogel is then infused with a reactive group and patterned in three dimensions using a photon beam through a limited-diffraction microscope. Functional particles or materials are then deposited on the pattern. The hydrogel is then shrunk and cleaved from the pattern.

Claims (68)

1. A method for three-dimensional fabrication of a nanostructure, the method comprising the steps of:

a. providing a polyelectrolyte gel;

b. infusing the polyelectrolyte gel with one or more reactive groups;

c. illuminating selected voxels within the polyelectrolyte gel to yield a three-dimensional pattern of reactive group sites on the polyelectrolyte gel;

d. anchoring the one or more reactive groups to the reactive group sites;

e. removing excess reactive groups from the polyelectrolyte gel;

f. depositing nanomaterials on the reactive group sites;

g. shrinking the polyelectrolyte gel by a factor of at least 10× to yield a three-dimensional pattern of reduced scale;

the three-dimensional pattern is maintained and wherein the three-dimensional pattern of reduced scale is a three-dimensional pattern of nano scale.

2. The method of claim 1 , wherein shrinking the polyelectrolyte gel is achieved by exposing the polyelectrolyte gel to salt or an acid.

3. The method of claim 2 , further comprising the step of desolvating the polyelectrolyte gel wherein a salt or an acid is used to shrink the gel.

4. The method of claim 1 , wherein the nanomaterials comprise metal, or semiconductors.

5. The method of claim 1 , further comprising the step of depositing metal on the nanomaterials to grow or enhance the nanomaterials in situ.

6. The method of claim 4 , further comprising the step of sintering the nanomaterials.

7. The method of claim 6 , wherein the nanomaterials are sintered using any of: application of electrical current across the nanomaterials; a laser; plasma etching, a pulsed light source, or infrared light.

8. The method of claim 1 , comprising the additional step of removing a portion of the polyelectrolyte gel.

9. The method of claim 1 , wherein the one or more reactive groups further comprise semiconductor nanocrystals.

10. The method of claim 9 , wherein the semiconductor nanocrystals comprise cadmium telluride nanoparticles.

11. The method of claim 9 , wherein the semiconductor nanocrystals comprise cadmium selenide nanoparticles.

12. The method of claim 1 , wherein steps b-e are repeated and the one or more reactive groups formed from one iteration to the next are distinct.

13. The method of claim 1 , wherein steps b-f are repeated and the nanomaterials deposited on the reactive group sites from one iteration to the next are distinct.

14. The method of claim 5 , wherein the metal is silver.

15. The method of claim 1 , wherein any or all of steps b-e are repeated one or more times.

16. The method of claim 1 , wherein the three-dimensional pattern of reduced scale also comprises increased resolution.

17. A method for three-dimensional fabrication of a nanostructure, the method comprising the steps of:

a. providing a polyelectrolyte gel;

b. infusing the polyelectrolyte gel with one or more reactive groups;

c. illuminating selected voxels within the polyelectrolyte gel to yield a three-dimensional pattern of reactive group sites anchored to the polyelectrolyte gel;

d. removing excess reactive groups from the polyelectrolyte gel;

e. depositing nanomaterials on the reactive group sites; and

f. shrinking the polyelectrolyte gel to yield a three-dimensional pattern of reduced scale the three-dimensional pattern is maintained and wherein the three-dimensional pattern of reduced scale is a three-dimensional pattern of nanoscale.

18. The method of claim 17 , wherein shrinking the polyelectrolyte gel is achieved by exposing the polyelectrolyte gel to a salt or an acid.

19. The method of claim 17 , wherein the three-dimensional pattern of reduced scale also comprises increased resolution.

20. The method of claim 17 , further comprising the step of desolvating the polyelectrolyte gel wherein a salt or an acid is used to shrink the gel.

21. The method of claim 17 , wherein the nanomaterials comprise metal, and/or a semiconductors.

22. The method of claim 21 , further comprising the step of depositing metal on the nanomaterials to grow or enhance the nanomaterials in situ.

23. The method of claim 21 , further comprising the step of sintering the nanomaterials.

24. The method of claim 23 , wherein the nanomaterials are sintered using any of: application of electrical current across the nanomaterials, a laser, a pulsed light source, infrared light or plasma etching.

25. The method of claim 17 , comprising the additional step of removing a portion of the polyelectrolyte gel.

26. The method of claim 17 , wherein the one or more reactive groups further comprise semiconductor nanocrystals.

27. The method of claim 26 , wherein the semiconductor nanocrystals comprise cadmium telluride nanoparticles.

28. The method of claim 26 , wherein the semiconductor nanocrystals comprise cadmium selenide nanoparticles.

29. The method of claim 17 , wherein steps b-e are repeated and the one or more reactive groups formed from one iteration to the next are distinct.

30. The method of claim 17 , wherein steps b-f are repeated and the nanoparticles deposited on the reactive group sites from one iteration to the next are distinct.

31. The method of claim 22 , wherein the metal is silver.

32. The method of claim 17 , wherein any or all of steps b-e are repeated one or more times.

33. A method for three-dimensional fabrication of a nanostructure, the method comprising the steps of:

a. providing a polyelectrolyte gel containing nanomaterials in one or more patterns; and

b. depositing metal on the patterned nanomaterials to grow or enhance the nanomaterials in situ; and

c. shrinking the polyelectrolyte gel to yield a three-dimensional pattern of reduced scale the three-dimensional pattern is maintained and wherein the three-dimensional pattern of reduced scale is a three-dimensional pattern of nano scale.

34. The method of claim 33 , wherein the three-dimensional pattern of reduced scale also comprises increased resolution.

35. The method of claim 33 , wherein shrinking the polyelectrolyte gel is achieved by exposing the polyelectrolyte gel to a salt or an acid.

36. The method of claim 33 , further comprising the optional step of desolvating the polyelectrolyte gel wherein a salt or an acid is used to shrink the gel.

37. The method of claim 33 , comprising the additional step of removing a portion of the polyelectrolyte gel.

38. A method for three-dimensional fabrication of nanostructures, the method comprising the steps of:

a. providing a polyelectrolyte gel;

b. infusing the polyelectrolyte gel with one or more reactive groups;

c. illuminating selected voxels within the polyelectrolyte gel to yield a three-dimensional pattern of reactive group sites anchored to the polyelectrolyte gel;

d. removing excess reactive groups from the polyelectrolyte gel;

e. depositing functional molecules on the reactive group sites;

f. shrinking the polyelectrolyte gel to yield a three-dimensional pattern of reduced scale and increased resolution the three-dimensional pattern is maintained and wherein the three-dimensional pattern of reduced scale is a three-dimensional pattern of nano scale.

39. The method of claim 38 , optionally further comprising the step of expanding the polyelectrolyte gel to yield an expanded gel at any point prior to step f.

40. The method of claim 38 , wherein shrinking the polyelectrolyte gel is achieved by exposing the polyelectrolyte gel to a salt or an acid.

41. The method of claim 38 , further comprising the optional step of desolvating the polyelectrolyte gel wherein a salt or an acid is used to shrink the gel.

42. The method of claim 38 , comprising the additional step of removing a portion of the polyelectrolyte gel.

43. The method of claim 38 , wherein steps b-e are repeated and the one or more reactive groups formed from one iteration to the next are distinct.

44. The method of claim 38 , wherein steps b-f are repeated and the functional molecules deposited on the reactive group sites from one iteration to the next are distinct.

45. The method of claim 38 , wherein any or all of steps b-e are repeated one or more times.

Assignments (2)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Sep 10, 2020
From: RODRIQUES, SAMUEL G.; ORAN, DANIEL; GAO, RUIXUAN; ASANO, SHOH; SKYLAR-SCOTT, MARK A.; CHEN, FEI; TILLBERG, PAUL W.; MARBLESTONE, ADAM H.; BOYDEN, EDWARD S.
To: MASSACHUSETTS INSTITUTE OF TECHNOLOGY
Reel/Frame 053731/0515 →
CONFIRMATORY LICENSE Recorded Apr 27, 2017
From: MASSACHUSETTS INSTITUTE OF TECHNOLOGY
To: NATIONAL INSTITUTES OF HEALTH (NIH), U.S. DEPT. OF HEALTH AND HUMAN SERVICES (DHHS), U.S. GOVERNMENT
Reel/Frame 042348/0268 →
Continuity (3)
Provisional Application 62366841 · Jul 26, 2016
Provisional Application 62219938 · Sep 17, 2015
Related Publication 20170081489A1 · Mar 23, 2017
Cited By (1)
US 12,379,380