Mask frame assembly, evaporation method, and array substrate
View Patent ↗A mask frame assembly, an evaporation method and an array substrate are provided. The mask frame assembly according to the disclosure includes a frame, a covering mask and at least two evaporation masks, the evaporation masks are sequentially arranged on the frame with a gap between two adjacent evaporation masks. A first groove is arranged at a location corresponding to the gap in the frame. The first groove includes a first groove welding portion and a first groove weldless portion, the evaporation mask includes a first evaporation sub-mask corresponding to the first groove welding portion and a second evaporation sub-mask corresponding to the first groove weldless portion; and an edge of the first evaporation sub-mask and an edge of the first groove welding portion coincide.
1. A mask frame assembly, comprising:
a frame;
a covering mask;
at least two evaporation masks sequentially arranged on the frame with a gap between two adjacent evaporation masks;
a first groove in the frame at a location corresponding to the gap;
wherein at least one portion of the covering mask is in the first groove;
wherein the first groove comprises a first groove welding portion and a first groove weldless portion; each of the two adjacent evaporation masks comprises a first evaporation sub-mask corresponding to the first groove welding portion and a second evaporation sub-mask corresponding to the first groove weldless portion; and, for each of the two adjacent evaporation masks, an edge of the first evaporation sub-mask and an edge of the first groove welding portion coincide.
2. The mask frame assembly according to claim 1 , wherein the evaporation masks are arranged in columns side by side on the frame.
3. The mask frame assembly according to claim 1 , wherein a width of the first groove welding portion is less than a width of the first groove weldless portion.
4. The mask frame assembly according to claim 3 , wherein the covering mask comprises a first covering sub-mask in the first groove welding portion and a second covering sub-mask in the first groove weldless portion, and a width of the first covering sub-mask is less than a width of the second covering sub-mask.
5. The mask frame assembly according to claim 1 , wherein an edge of the second evaporation sub-mask of one of the two adjacent evaporation masks covers an edge of the first groove weldless portion.
6. The mask frame assembly according to claim 1 , further comprising a plurality of welding spots, wherein the welding spots are in a marginal region of the first evaporation sub-mask of one of the two adjacent evaporation masks, and the welding spots weld together the one evaporation mask and the frame.
7. The mask frame assembly according to claim 1 , wherein a depth of the first groove is greater than a thickness of the covering mask.
8. The mask frame assembly according to claim 1 , further comprising a second groove in the frame and a supporting mask in the second groove;
wherein the second groove is perpendicular to the first groove; the supporting mask is perpendicular to the covering mask; and the supporting mask supports one of the two evaporation masks.
9. The mask frame assembly according to claim 1 , wherein the covering mask comprises a first covering sub-mask in the first groove welding portion and a second covering sub-mask in the first groove weldless portion.
10. The mask frame assembly according to claim 9 , wherein the first covering sub-mask has no overlapping region with the first evaporation sub-mask of each of the two adjacent evaporation masks; and the second covering sub-mask overlaps with the second evaporation sub-mask of each of the two adjacent evaporation masks.
11. The mask frame assembly according to claim 10 , wherein a width of the first covering sub-mask is less than or equal to a width of the first groove welding portion.
12. The mask frame assembly according to claim 10 , wherein a width of the first groove welding portion is less than a width of the first groove weldless portion.
13. The mask frame assembly according to claim 9 , wherein the second covering sub-mask has an overlapping region with the second evaporation sub-mask of each of the two adjacent evaporation masks; and an area of each overlapping region is gradually increased in a length direction of the covering mask away from the first groove welding portion.
14. The mask frame assembly according to claim 13 , wherein a width of the first covering sub-mask is less than or equal to a width of the gap.
15. The mask frame assembly according to claim 9 , wherein a width of the first groove weldless portion is gradually increased in a length direction of the covering mask away from the first groove welding portion.
16. The mask frame assembly according to claim 15 , wherein a width of the first covering sub-mask is less than or equal to a width of the gap.
17. The mask frame assembly according to claim 9 , wherein a width of the second covering sub-mask is gradually increased in a length direction of the covering mask away from the first groove welding portion.
18. The mask frame assembly according to claim 17 , wherein a width of the first covering sub-mask is less than or equal to a width of the gap; and the width of the first covering sub-mask is less than the width of the second covering sub-mask.
19. An evaporation method, comprising:
positioning the mask frame assembly according to claim 1 above a target substrate; and
evaporating material on the target substrate through the mask frame assembly.