Load lock chamber and the cluster tool system using the same
Disclosed is a load lock chamber which includes a chamber body including: at least one pair of cavities, defined in a layer structure of the chamber body to carry one or more wafer substrates; at least one internal conduit, defined between and coupled with the paired cavities, such that the paired cavities are communicated with each other and capable of conducting gas refilling and exhaustion; and a plurality of wafer supports for carrying the wafer substrates, the plurality of wafer supports being securely received in the paired cavities and able to calibrate with a machine arm frontend finger, wherein the wafer support includes grooves defined thereon for calibrating the machine arm frontend finger.
1. A load lock chamber, having a chamber body, the chamber body comprising:
at least one pair of cavities, defined in the chamber body to carry one or more wafer substrates;
at least one internal conduit, defined between and coupled with the paired cavities, such that the paired cavities are communicated with each other and capable of conducting gas refilling and exhaustion; and
a plurality of wafer supports for carrying the wafer substrates, the plurality of wafer supports being securely received in the paired cavities and able to calibrate with a machine arm frontend finger, wherein the wafer support includes a panel, at least three support platforms provided on one side of the panel and plural positioning members next to the support platforms for positioning the wafer support in the corresponding cavity, each of the support platforms is provided with a position-limiting bump and a support bump for holding a wafer substrate in each of the at least one pair of cavities, the position-limiting bump has a height greater than that of the support bump of each of the support platform, and the position-limiting bumps of the support platforms surround the support bumps of the support platforms, and each of the support platforms has a height less than that of each of the positioning members.
2. The load lock chamber as claimed in claim 1 , wherein each of the plurality of wafer supports has grooves formed on the one side of the panel to guide the machine arm frontend finger.
3. The load lock chamber as claimed in claim 2 , wherein the wafer support has a transfer region defined between the grooves for the machine arm frontend finger passing therethrough.
4. The load lock chamber as claimed in claim 1 , wherein the chamber body includes a rack provided with interior walls defining the pair of cavities.
5. The load lock chamber as claimed in claim 4 , wherein the chamber body includes lids detachably mounted on the rack, the pair of cavities is defined by the lids and the interior walls of the rack.
6. The load lock chamber as claimed in claim 4 , wherein the rack is provided with a middle portion defined by the at least one internal conduit between the paired cavities.
7. The load lock chamber as claimed in claim 1 , wherein each of the positioning members has a top and a bottom, the wafer support is securely positioned in the pair of cavities with the top or bottom touching the interior wall defining the cavities.
8. The load lock chamber as claimed in claim 7 , wherein the wafer support is provided with a side wall which is separated, with a distance, from an edge of the machine arm frontend finger calibrating with the wafer support, said distance is used to calibrate the machine arm frontend finger to align with the wafer support.
9. A cluster tool, comprising:
a transfer chamber, provided with a machine arm having a frontend finger; and
the load lock chamber as claimed in claim 1 coupled to the transfer chamber.