IMPEDANCE MATCHING DEVICE, LINEAR MOTION MODULE, AND RADIO FREQUENCY POWER SUPPLY DEVICE

1 . A radio frequency (RF) power supply device comprising:

a single RF power source; and

an impedance matching unit disposed between the RF power source and at least one load;

wherein the impedance matching unit comprises:

a first variable capacitor including a first shaft moving linearly;

a first linear motion unit axially coupled to the first shaft of the first variable capacitor to provide linear motion;

a first insulating joint connecting the first shaft to a first end of a first driving shaft of the first linear motion unit; and

a first displacement sensor adapted to measure a movement distance of the first driving shaft of the first linear motion unit; and

wherein the first linear motion unit comprises:

a coil bobbin coupled to a second end of the first driving shaft; and

a first permanent magnet unit disposed to encircle the first driving shaft and configured to provide linear motion to the coil bobbin.

2 . The radio frequency (RF) power supply device of claim 1 , further comprising:

a motion control unit adapted to control the first linear motion unit;

a power detection unit adapted to detect a reflected wave reflected in a direction of the RF power source; and

a control unit adapted to control the motion control unit by receiving an output signal of the power detection unit and an output signal of the first displacement sensor.

3 . A radio frequency (RF) power supply device comprising:

a single RF power source; and

an impedance matching unit disposed between the RF power source and at least one load;

wherein the impedance matching unit comprises:

a first variable capacitor including a first shaft moving linearly;

a first linear motion unit axially coupled to the first shaft of the first variable capacitor to provide linear motion;

a first insulating joint connecting the first shaft to a first end of a first driving shaft of the first linear motion unit;

a motion control unit adapted to control the first linear motion unit;

a power detection unit adapted to detect a reflected wave reflected in a direction of the RF power source; and

a control unit adapted to control the motion control unit by receiving an output signal of the power detection unit;

wherein the first linear motion unit comprises:

a coil bobbin coupled to a second end of the first driving shaft; and

a first permanent magnet unit disposed to encircle the first driving shaft and configured to provide linear motion to the coil bobbin; and

wherein a frequency of the RF power source is variable.

4 . A radio frequency (RF) power supply device comprising:

a single RF power source; and

an impedance matching unit disposed between the RF power source and at least one load,

wherein the impedance matching unit comprises:

a first variable capacitor including a first shaft moving linearly;

a first linear motion unit axially coupled to the first shaft of the first variable capacitor to provide linear motion;

a first insulating joint connecting the first shaft to a first end of a first driving shaft of the first linear motion unit;

a front-end flange coupled to a first electrode of the first variable capacitor;

a back-end flange coupled to the first linear motion unit; and

a fixing part disposed to encircle the first insulating joint and having a first end coupled to the front-end flange and a second end coupled to the back-end flange; and

wherein the first linear motion unit comprises:

a coil bobbin coupled to a second end of the first driving shaft; and

a first permanent magnet unit disposed to encircle the first driving shaft and configured to provide linear motion to the coil bobbin.