IP Library › Granted Patent US 10,620,420
Granted Patent B2
US 10,620,420 · App. 15/273,995 · Granted Apr 14, 2020

Optical system for use with microscope

Inventor: Scott A. Chalmers (San Diego, CA)
Assignee: FILMETRICS, INC.
G02B21/361G02B21/082G02B21/241G02B21/248G02B21/362H04N5/23212
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Quick Facts
Patent No.
US 10,620,420
App. No.
15/273,995
Granted
Apr 14, 2020
Kind
B2
Abstract

Embodiments include a spectral reflectance system comprising a detector and a light source coupled to a support member. The system includes a turret coupled to the support member. The turret is configured to receive objective lenses and configured to selectively position each lens in an imaging position relative to a sample to be imaged. A first objective lens is configured to image the sample at the detector when placed in the imaging position. A second objective lens includes an optical director that is configured to form an optical path with an auxiliary detector and image the sample at the auxiliary detector when the second objective lens is in the imaging position.

Claims (30)

1. A spectral reflectance system comprising:

a support member;

a detector and a light source coupled to the support member;

an auxiliary detector;

a turret coupled to the support member, wherein the turret is configured to receive a plurality of objective lenses and configured to selectively position each lens of the plurality of objective lenses in an imaging position relative to a sample to be imaged, and wherein the turret is selectively moveable to place each objective lens in the imaging position;

a first objective lens of the plurality of objective lenses disposed on the turret, wherein the first objective lens is configured to image the sample at the detector using the light source when placed in the imaging position, and wherein the first objective lens includes a first focusing lens disposed in the first objective lens; and

a second objective lens of the plurality of objective lenses disposed on the turret, wherein the second objective lens includes a second focusing lens and an optical director disposed in the second objective lens, wherein the optical director is configured to form an optical path with the auxiliary detector and image the sample at the auxiliary detector using the light source when the second objective lens is in the imaging position.

2. The spectral reflectance system of claim 1 , wherein the auxiliary detector is independent of the second objective lens.

3. The spectral reflectance system of claim 1 , wherein the auxiliary detector is independent of the detector.

4. The spectral reflectance system of claim 1 , wherein a position of the auxiliary detector is maintained relative to a vertical position of the second objective lens in the imaging position.

5. The spectral reflectance system of claim 1 , wherein the auxiliary detector comprises an auxiliary wavelength range that is different from a wavelength range of the first detector.

6. The spectral reflectance system of claim 1 , wherein the second objective lens is configured to image the sample at the auxiliary detector using the light source.

7. The spectral reflectance system of claim 1 , wherein the optical director comprises at least one mirror, wherein the at least one mirror couples the optical path between the sample and the auxiliary detector via a port of the second objective lens.

8. The spectral reflectance system of claim 7 , wherein the at least one mirror couples the optical path between the light source and the sample.

9. The spectral reflectance system of claim 1 , wherein the optical director includes a beam splitter.

10. The spectral reflectance system of claim 1 , wherein when the second objective lens is in the imaging position and a position of the auxiliary detector is maintained relative to the second objective lens.

11. The spectral reflectance system of claim 10 , wherein the position includes a vertical position.

12. The spectral reflectance system of claim 10 , wherein the position includes a horizontal position.

13. The spectral reflectance system of claim 10 , wherein the auxiliary detector is connected to the support, wherein vertical movement of the second objective lens causes vertical movement of the auxiliary detector.

14. A method comprising:

configuring a turret of a microscope to receive a plurality of objective lenses and to selectively position each lens of the plurality of objective lenses in an imaging position relative to a sample to be imaged, wherein the turret is coupled to a support member along with a detector and a light source;

positioning a first objective lens of the plurality of objective lenses that is disposed on the turret in the imaging position and imaging the sample at the detector using the light source and the first objective lens when the first objective lens is in the imaging position, wherein the first objective lens includes a first focusing lens disposed in the first objective lens; and

positioning a second objective lens of the plurality of objective lenses that is disposed on the turret in the imaging position, wherein the second objective lens includes a second focusing lens and an optical director disposed in the second objective lens, wherein the positioning of the second objective lens forms an optical path between the optical director of the second objective lens and an auxiliary detector, and imaging the sample at the auxiliary detector using the light source and the second objective lens when the second objective lens is in the imaging position.

15. The method of claim 14 , comprising selectively moving the turret to place an objective lens of the plurality of objective lenses in the imaging position.

16. The method of claim 14 , comprising maintaining a position of the auxiliary detector relative to a vertical position of the second objective lens in the imaging position.

17. The method of claim 14 , wherein the auxiliary detector comprises an auxiliary wavelength range that is different from a wavelength range of the first detector.

18. The method of claim 14 , comprising maintaining a position of the auxiliary detector relative to the second objective lens when the second objective lens is in the imaging position.

19. The method of claim 18 , wherein the position includes a vertical position.

20. The method of claim 18 , wherein the position includes a horizontal position.

21. The method of claim 18 , wherein the auxiliary detector is connected to the support, wherein vertical movement of the second objective lens causes vertical movement of the auxiliary detector.

Assignments (2)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Mar 20, 2024
From: FILMETRICS, INC.
To: KLA-TENCOR CORPORATION
Reel/Frame 066832/0987 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jan 12, 2017
From: CHALMERS, SCOTT A.
To: FILMETRICS, INC.
Reel/Frame 040952/0460 →
Continuity (2)
Provisional Application 62222584 · Sep 23, 2015
Related Publication 20170108688A1 · Apr 20, 2017