ESD testing structure, method of using same and method of forming same
An electrostatic discharge (ESD) testing structure includes a measurement device in a first die. The ESD testing structure further includes a fuse in a second die. The ESD testing structure further includes a plurality of bonds electrically connecting the first die to the second die, wherein a first bond of the plurality of bonds electrically connects the fuse to the measurement device.
1. An electrostatic discharge (ESD) testing structure comprising:
a measurement device in a first die;
a fuse, a first trim pad, and a second trim pad in a second die; and
a plurality of bonds electrically connecting the first die to the second die, wherein a first bond of the plurality of bonds electrically connects the fuse to the measurement device, the first trim pad is electrically connected to a first side of the fuse, and the second trim pad is electrically connected to the second side of the fuse.
2. The ESD testing structure of claim 1 , wherein the measurement device is configured to detect a voltage during an ESD event.
3. The ESD testing structure of claim 2 , wherein the measurement device comprises a capacitor.
4. The ESD testing structure of claim 1 , wherein the measurement device is configured to detect a current during an ESD event.
5. The ESD testing structure of claim 4 , wherein the measurement device comprises at least one diode.
6. The ESD testing structure of claim 5 , wherein the measurement device further includes a current recording structure.
7. The ESD testing structure of claim 6 , wherein the current recording structure is electrically between the at least one diode and the fuse.
8. The ESD testing structure of claim 6 , wherein the at least one diode is between the fuse and the current recording structure.
9. The ESD testing structure of claim 6 , wherein the current recording structure comprises:
a plurality of resistors; and
a plurality of fuses, wherein each resistor of the plurality of resistors is electrically connected in series with a corresponding fuse of the plurality of fuses.
10. The ESD testing structure of claim 9 , wherein each fuse of the plurality of fuses has a different threshold value for blowing the corresponding fuse.
11. The ESD testing structure of claim 1 , further comprising a second fuse between the measurement device and the first bond, wherein the measurement device is configured to electrically connect in parallel with a victim device.
12. The ESD testing structure of claim 1 , further comprising:
a plurality of measurement devices in the first die; and
a plurality of fuses in the second die, wherein each measurement device of the plurality of measurement devices is electrically connected to a corresponding fuse of the plurality of fuses through a corresponding bond of the plurality of bonds.
13. An electrostatic discharge (ESD) testing structure comprising:
a first measurement device in a first die;
a first fuse in a device structure;
a second measurement device in a second die;
a second fuse outside the second die;
a first plurality of bonds electrically connecting the first die to the device structure, wherein a bond of the first plurality of bonds electrically connects the first measurement device to the first fuse; and
a second plurality of bonds electrically connecting the second die to the first die, wherein a bond of the second plurality of bonds electrically connects the second measurement device to the second fuse.
14. The ESD testing structure of claim 13 , wherein the second fuse is in the first die.
15. The ESD testing structure of claim 13 , wherein the second fuse is in the device structure.
16. The ESD testing structure of claim 15 , further comprising a conductive structure extending through the first die to electrically connect the second measurement device to the second fuse.
17. The ESD testing structure of claim 13 , wherein a structure of the first measurement device is a same structure as the second measurement device.
18. The ESD testing structure of claim 13 , wherein a structure of the first measurement device is different from a structure of the second measurement device.
19. A method of using an electrostatic discharge (ESD) testing structure, the method comprising:
bonding a die to a device structure, wherein bonding the die to the device structure comprises electrically connecting each measurement device of a plurality of measurement devices in the die to a corresponding fuse of a plurality of fuses in the device structure to form a plurality of ESD testing structures;
trimming at least one fuse of the plurality of fuses prior to the bonding of the die to the device structure, wherein trimming the at least one fuse disables a corresponding measurement device of the plurality of measurement devices;
capturing a voltage or a current of an ESD event during bonding the die to the device structure using non-disabled measurement devices of the plurality of measurement devices; and
probing at least one non-disabled measurement device of the plurality of measurement devices of the second set of ESD testing structures.
20. The method of claim 19 , further comprising determining a location of the ESD event on the die based on the captured voltage or the captured current.