IP Library › Granted Patent US 9,953,889
Granted Patent B1
US 9,953,889 · App. 15/281,491 · Granted Apr 24, 2018

Process for making semiconductor dies, chips, and wafers using non-contact measurements obtained from DOEs of NCEM-enabled fill cells on test wafers that include multiple means/steps for enabling NC detection of GATECNT-GATE via opens

Inventors: Stephen Lam (Freemont, CA); Dennis Ciplickas (San Jose, CA); Tomasz Brozek (Morgan Hill, CA); Jeremy Cheng (San Jose, CA); Simone Comensoli (Darfo Boario Terme, IT); Indranil De (Mountain View, CA); Kelvin Doong (Hsinchu, TW); Hans Eisenmann (Tutzing, DE); Timothy Fiscus (New Galilee, PA); Jonathan Haigh (Pittsburgh, PA); Christopher Hess (Belmont, CA); John Kibarian (Los Altos Hills, CA); Sherry Lee (Monte Sereno, CA); Marci Liao (Santa Clara, CA); Sheng-Che Lin (Hsinchu, TW); Hideki Matsuhashi (Santa Clara, CA); Kimon Michaels (Monte Sereno, CA); Conor O'Sullivan (Campbell, CA); Markus Rauscher (Munich, DE); Vyacheslav Rovner (Pittsburgh, PA); Andrzej Strojwas (Pittsburgh, PA); Marcin Strojwas (Pittsburgh, PA); Carl Taylor (Pittsburgh, PA); Rakesh Vallishayee (Dublin, CA); Larg Weiland (Hollister, CA); Nobuharu Yokoyama (Tokyo, JP)
Assignee: PDF Solutions, Inc.
H01L22/34H01L22/20H01L27/0207
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Quick Facts
Patent No.
US 9,953,889
App. No.
15/281,491
Granted
Apr 24, 2018
Kind
B1
Abstract

Improved processes for manufacturing semiconductor wafers, chips, or dies utilize in-line data obtained from non-contact electrical measurements (“NCEM”) of fill cells that contain structures configured to target/expose a variety of open-circuit, short-circuit, leakage, and/or excessive resistance failure modes. Such processes include evaluating one or more Designs of Experiments (“DOEs”), each comprised of multiple NCEM-enabled fill cells, in at least two variants, targeted to the same failure mode. Such DOEs include multiple means/steps for enabling non-contact (NC) detection of GATECNT-GATE via opens.

Claims (858)

1. A method for making integrated circuits (ICs), comprising at least:

(a) performing initial processing steps to produce a test wafer that includes a first Design of Experiments (DOE) of Non-Contact Electrical Measurement (NCEM)-enabled, gate contact (GATECNT)-gate (GATE)-via-open-configured fill cells, said initial processing steps including:

(i) patterning, on the test wafer, a first means for enabling NC detection of GATECNT-GATE via opens; and,

(ii) patterning, on the test wafer, a second means for enabling NC detection of GATECNT-GATE via opens;

wherein the first and second means for enabling NC detection of GATECNT-GATE via opens are different;

(b) determining a presence or absence of GATECNT-GATE via opens on the test wafer by:

performing a voltage contrast examination of NCEM-enabled fill cells in the first DOE, including at least the first and second means for enabling NC detection of GATECNT-GATE via opens; and,

(c) using the results from step (b) to select NCEM-enabled fill cells for inclusion on a subsequent product wafer.

2. A method for making ICs, as defined in claim 1 ,

wherein step (c) includes:

selecting, for inclusion on the product wafer, a plurality of NCEM-enabled, GATECNT-GATE-via-open-configured fill cells, if step (b) indicated a presence of any GATECNT-GATE via opens.

3. A method for making ICs, as defined in claim 1 ,

wherein step (c) includes:

omitting, from inclusion on the product wafer, any NCEM-enabled, GATECNT-GATE-via-open-configured fill cells, if step (b) indicated an absence of any GATECNT-GATE via opens.

4. A method for making ICs, as defined in claim 1 , wherein the first and second means for enabling NC detection of GATECNT-GATE via opens are both selected from the list consisting of:

a A_PDF_VCI_FILL 8 _ 9 S 101 _ 0004 _ 1 means for enabling NC detection of GATECNT-GATE via opens;

a A_PDF_VCI_FILL 16 _ 9 S 101 _ 0004 _ 1 means for enabling NC detection of GATECNT-GATE via opens;

a A_PDF_VCI_FILL 32 _ 9 S 101 _ 0004 _ 1 means for enabling NC detection of GATECNT-GATE via opens;

a A_PDF_VCI_FILL 64 _ 9 S 101 _ 0004 _ 1 means for enabling NC detection of GATECNT-GATE via opens;

a A_PDF_VCI_FILL 8 _ 9 S 101 _ 0003 _ 1 means for enabling NC detection of GATECNT-GATE via opens;

a A_PDF_VCI_FILL 16 _ 9 S 101 _ 0003 _ 1 means for enabling NC detection of GATECNT-GATE via opens;

a A_PDF_VCI_FILL 32 _ 9 S 101 _ 0003 _ 1 means for enabling NC detection of GATECNT-GATE via opens;

a A_PDF_VCI_FILL 64 _ 9 S 101 _ 0003 _ 1 means for enabling NC detection of GATECNT-GATE via opens;

a A_PDF_VCI_FILL 8 _ 9 S 107 _ 0003 _ 1 means for enabling NC detection of GATECNT-GATE via opens;

a A_PDF_VCI_FILL 16 _ 9 S 107 _ 0002 _ 1 means for enabling NC detection of GATECNT-GATE via opens;

a A_PDF_VCI_FILL 32 _ 9 S 107 _ 0003 _ 1 means for enabling NC detection of GATECNT-GATE via opens;

a A_PDF_VCI_FILL 64 _ 9 S 107 _ 0003 _ 1 means for enabling NC detection of GATECNT-GATE via opens;

a A_PDF_VCI_FILL 8 _ 9 S 111 _ 0001 _ 1 means for enabling NC detection of GATECNT-GATE via opens;

a A_PDF_VCI_FILL 16 _ 9 S 111 _ 0001 _ 1 means for enabling NC detection of GATECNT-GATE via opens;

a A_PDF_VCI_FILL 32 _ 9 S 111 _ 0001 _ 1 means for enabling NC detection of GATECNT-GATE via opens; and,

a A_PDF_VCI_FILL 64 _ 9 S 111 _ 0001 _ 1 means for enabling NC detection of GATECNT-GATE via opens.

5. A method for making ICs, as defined in claim 1 , wherein the first and second means for enabling NC detection of GATECNT-GATE via opens are both selected from the list consisting of:

a C_V 682 _PDF_VCI_ 16 _ 2000140 _ 01 means for enabling NC detection of GATECNT-GATE via opens;

a C_V 682 _PDF_VCI_ 16 _ 2002240 _ 34 means for enabling NC detection of GATECNT-GATE via opens;

a C_V 682 _PDF_VCI_ 16 _ 2004340 _ 67 means for enabling NC detection of GATECNT-GATE via opens;

a C_V 682 _PDF_VCI_ 16 _ 2000146 _ 01 means for enabling NC detection of GATECNT-GATE via opens;

a C_V 682 _PDF_VCI_ 16 _ 2002246 _ 34 means for enabling NC detection of GATECNT-GATE via opens; and,

a C_V 682 _PDF_VCI_ 16 _ 2004346 _ 67 means for enabling NC detection of GATECNT-GATE via opens.

6. A method for making ICs, as defined in claim 1 , wherein the first and second means for enabling NC detection of GATECNT-GATE via opens are both selected from the list consisting of:

a D_PDF_VCI_VFILL 4 _ 12 S 01 _ 0105 _ 1 means for enabling NC detection of GATECNT-GATE via opens;

a D_PDF_VCI_VFILL 4 _ 12 S 01 _ 0037 _ 1 means for enabling NC detection of GATECNT-GATE via opens;

a D_PDF_VCI_VFILL 4 _ 12 S 01 _ 0034 _ 1 means for enabling NC detection of GATECNT-GATE via opens;

a D_PDF_VCI_VFILL 4 _ 12 S 01 _ 0097 _ 1 means for enabling NC detection of GATECNT-GATE via opens;

a D_PDF_VCI_VFILL 4 _ 12 S 01 _ 0088 _ 1 means for enabling NC detection of GATECNT-GATE via opens;

a D_PDF_VCI_VFILL 4 _ 12 S 01 _ 0087 _ 1 means for enabling NC detection of GATECNT-GATE via opens;

a D_PDF_VCI_VFILL 4 _ 12 S 01 _ 0019 _ 1 means for enabling NC detection of GATECNT-GATE via opens;

a D_PDF_VCI_VFILL 4 _ 12 S 01 _ 0083 _ 1 means for enabling NC detection of GATECNT-GATE via opens;

a D_PDF_VCI_VFILL 4 _ 12 S 01 _ 0008 _ 1 means for enabling NC detection of GATECNT-GATE via opens;

a D_PDF_VCI_VFILL 4 _ 12 S 01 _ 0070 _ 1 means for enabling NC detection of GATECNT-GATE via opens;

a D_PDF_VCI_VFILL 4 _ 12 S 01 _ 0001 _ 1 means for enabling NC detection of GATECNT-GATE via opens;

a D_PDF_VCI_VFILL 4 _ 12 S 01 _ 0065 _ 1 means for enabling NC detection of GATECNT-GATE via opens; and,

a D_PDF_VCI_VFILL 4 _ 12 S 01 _ 0052 _ 1 means for enabling NC detection of GATECNT-GATE via opens.

7. A method for making ICs, as defined in claim 1 , wherein the first and second means for enabling NC detection of GATECNT-GATE via opens are both selected from the list consisting of:

a E_PDF_VCI_FILL 8 _ 17 S 1 _ 0053 _ 1 means for enabling NC detection of GATECNT-GATE via opens;

a E_PDF_VCI_FILL 8 _ 17 S 1 _ 0051 _ 1 means for enabling NC detection of GATECNT-GATE via opens;

a E_PDF_VCI_FILL 8 _ 17 S 1 _ 0026 _ 1 means for enabling NC detection of GATECNT-GATE via opens;

a E_PDF_VCI_FILL 8 _ 17 S 1 _ 0022 _ 1 means for enabling NC detection of GATECNT-GATE via opens;

a E_PDF_VCI_FILL 8 _ 17 S 1 _ 0021 _ 1 means for enabling NC detection of GATECNT-GATE via opens;

a E_PDF_VCI_FILL 8 _ 17 S 1 _ 0020 _ 1 means for enabling NC detection of GATECNT-GATE via opens;

a E_PDF_VCI_FILL 8 _ 17 S 1 _ 0019 _ 1 means for enabling NC detection of GATECNT-GATE via opens;

a E_PDF_VCI_FILL 8 _ 17 S 1 _ 0018 _ 1 means for enabling NC detection of GATECNT-GATE via opens;

a E_PDF_VCI_FILL 8 _ 17 S 1 _ 0017 _ 1 means for enabling NC detection of GATECNT-GATE via opens;

a E_PDF_VCI_FILL 8 _ 17 S 1 _ 0008 _ 1 means for enabling NC detection of GATECNT-GATE via opens;

a E_PDF_VCI_FILL 8 _ 17 S 1 _ 0007 _ 1 means for enabling NC detection of GATECNT-GATE via opens;

a E_PDF_VCI_FILL 8 _ 17 S 1 _ 0006 _ 1 means for enabling NC detection of GATECNT-GATE via opens; and,

a E_PDF_VCI_FILL 8 _ 17 S 1 _ 0005 _ 1 means for enabling NC detection of GATECNT-GATE via opens.

8. A method for making ICs, as defined in claim 1 , wherein the first and second means for enabling NC detection of GATECNT-GATE via opens are both selected from the list consisting of:

a F_PDF_VCI_FILL 08 _ 24 S 1 _ 0084 _ 1 means for enabling NC detection of GATECNT-GATE via opens;

a F_PDF_VCI_FILL 08 _ 24 S 2 _ 0047 _ 1 means for enabling NC detection of GATECNT-GATE via opens;

a F_PDF_VCI_FILL 64 _ 24 S 1 _ 0080 _ 1 means for enabling NC detection of GATECNT-GATE via opens;

a F_PDF_VCI_FILL 64 _ 24 S 1 _ 0079 _ 1 means for enabling NC detection of GATECNT-GATE via opens;

a F_PDF_VCI_FILL 64 _ 24 S 1 _ 0078 _ 1 means for enabling NC detection of GATECNT-GATE via opens;

a F_PDF_VCI_FILL 64 _ 24 S 1 _ 0076 _ 1 means for enabling NC detection of GATECNT-GATE via opens;

a F_PDF_VCI_FILL 08 _ 24 S 1 _ 0077 _ 1 means for enabling NC detection of GATECNT-GATE via opens;

a F_PDF_VCI_FILL 08 _ 24 S 1 _ 0076 _ 1 means for enabling NC detection of GATECNT-GATE via opens;

a F_PDF_VCI_FILL 08 _ 24 S 1 _ 0075 _ 1 means for enabling NC detection of GATECNT-GATE via opens;

a F_PDF_VCI_FILL 08 _ 24 S 1 _ 0073 _ 1 means for enabling NC detection of GATECNT-GATE via opens;

a F_PDF_VCI_FILL 64 _ 24 S 1 _ 0060 _ 1 means for enabling NC detection of GATECNT-GATE via opens;

a F_PDF_VCI_FILL 64 _ 24 S 1 _ 0059 _ 1 means for enabling NC detection of GATECNT-GATE via opens;

a F_PDF_VCI_FILL 64 _ 24 S 1 _ 0058 _ 1 means for enabling NC detection of GATECNT-GATE via opens;

a F_PDF_VCI_FILL 64 _ 24 S 2 _ 0025 _ 1 means for enabling NC detection of GATECNT-GATE via opens;

a F_PDF_VCI_FILL 64 _ 24 S 1 _ 0056 _ 1 means for enabling NC detection of GATECNT-GATE via opens;

a F_PDF_VCI_FILL 08 _ 24 S 1 _ 0057 _ 1 means for enabling NC detection of GATECNT-GATE via opens;

a F_PDF_VCI_FILL 64 _ 24 S 2 _ 0023 _ 1 means for enabling NC detection of GATECNT-GATE via opens;

a F_PDF_VCI_FILL 08 _ 24 S 1 _ 0056 _ 1 means for enabling NC detection of GATECNT-GATE via opens;

a F_PDF_VCI_FILL 64 _ 24 S 1 _ 0054 _ 1 means for enabling NC detection of GATECNT-GATE via opens;

a F_PDF_VCI_FILL 08 _ 24 S 1 _ 0055 _ 1 means for enabling NC detection of GATECNT-GATE via opens;

a F_PDF_VCI_FILL 08 _ 24 S 2 _ 0017 _ 1 means for enabling NC detection of GATECNT-GATE via opens;

a F_PDF_VCI_FILL 08 _ 24 S 1 _ 0053 _ 1 means for enabling NC detection of GATECNT-GATE via opens;

a F_PDF_VCI_FILL 08 _ 24 S 2 _ 0016 _ 1 means for enabling NC detection of GATECNT-GATE via opens;

a F_PDF_VCI_FILL 08 _ 24 S 1 _ 0051 _ 1 means for enabling NC detection of GATECNT-GATE via opens;

a F_PDF_VCI_FILL 32 _ 24 S 1 _ 0084 _ 1 means for enabling NC detection of GATECNT-GATE via opens;

a F_PDF_VCI_FILL 32 _ 24 S 2 _ 0045 _ 1 means for enabling NC detection of GATECNT-GATE via opens;

a F_PDF_VCI_FILL 32 _ 24 S 1 _ 0077 _ 1 means for enabling NC detection of GATECNT-GATE via opens;

a F_PDF_VCI_FILL 32 _ 24 S 1 _ 0076 _ 1 means for enabling NC detection of GATECNT-GATE via opens;

a F_PDF_VCI_FILL 32 _ 24 S 1 _ 0075 _ 1 means for enabling NC detection of GATECNT-GATE via opens;

a F_PDF_VCI_FILL 32 _ 24 S 1 _ 0073 _ 1 means for enabling NC detection of GATECNT-GATE via opens;

a F_PDF_VCI_FILL 32 _ 24 S 1 _ 0057 _ 1 means for enabling NC detection of GATECNT-GATE via opens;

a F_PDF_VCI_FILL 32 _ 24 S 1 _ 0056 _ 1 means for enabling NC detection of GATECNT-GATE via opens;

a F_PDF_VCI_FILL 32 _ 24 S 1 _ 0055 _ 1 means for enabling NC detection of GATECNT-GATE via opens;

a F_PDF_VCI_FILL 32 _ 24 S 2 _ 0033 _ 1 means for enabling NC detection of GATECNT-GATE via opens;

a F_PDF_VCI_FILL 32 _ 24 S 1 _ 0053 _ 1 means for enabling NC detection of GATECNT-GATE via opens;

a F_PDF_VCI_FILL 32 _ 24 S 2 _ 0031 _ 1 means for enabling NC detection of GATECNT-GATE via opens;

a F_PDF_VCI_FILL 32 _ 24 S 1 _ 0051 _ 1 means for enabling NC detection of GATECNT-GATE via opens;

a F_PDF_VCI_FILL 16 _ 24 S 1 _ 0043 _ 1 means for enabling NC detection of GATECNT-GATE via opens;

a F_PDF_VCI_FILL 16 _ 24 S 2 _ 0035 _ 1 means for enabling NC detection of GATECNT-GATE via opens;

a F_PDF_VCI_FILL 16 _ 24 S 1 _ 0036 _ 1 means for enabling NC detection of GATECNT-GATE via opens;

a F_PDF_VCI_FILL 16 _ 24 S 1 _ 0035 _ 1 means for enabling NC detection of GATECNT-GATE via opens;

a F_PDF_VCI_FILL 16 _ 24 S 1 _ 0034 _ 1 means for enabling NC detection of GATECNT-GATE via opens;

a F_PDF_VCI_FILL 16 _ 24 S 1 _ 0032 _ 1 means for enabling NC detection of GATECNT-GATE via opens;

a F_PDF_VCI_FILL 16 _ 24 S 1 _ 0016 _ 1 means for enabling NC detection of GATECNT-GATE via opens;

a F_PDF_VCI_FILL 16 _ 24 S 1 _ 0015 _ 1 means for enabling NC detection of GATECNT-GATE via opens;

a F_PDF_VCI_FILL 16 _ 24 S 1 _ 0014 _ 1 means for enabling NC detection of GATECNT-GATE via opens;

a F_PDF_VCI_FILL 16 _ 24 S 2 _ 0037 _ 1 means for enabling NC detection of GATECNT-GATE via opens;

a F_PDF_VCI_FILL 16 _ 24 S 1 _ 0012 _ 1 means for enabling NC detection of GATECNT-GATE via opens;

a F_PDF_VCI_FILL 16 _ 24 S 2 _ 0036 _ 1 means for enabling NC detection of GATECNT-GATE via opens;

a F_PDF_VCI_FILL 16 _ 24 S 1 _ 0010 _ 1 means for enabling NC detection of GATECNT-GATE via opens;

a F_PDF_VCI_FILL 64 _ 24 S 1 _ 0003 _ 1 means for enabling NC detection of GATECNT-GATE via opens;

a F_PDF_VCI_FILL 64 _ 24 S 2 _ 0045 _ 1 means for enabling NC detection of GATECNT-GATE via opens; and,

a F_PDF_VCI_FILL 08 _ 24 S 2 _ 0043 _ 1 means for enabling NC detection of GATECNT-GATE via opens.

9. A method for making ICs, as defined in claim 1 , wherein the first and second means for enabling NC detection of GATECNT-GATE via opens are both selected from the list consisting of:

a G_V 931 _PDF_VCI_ 20001 AC_ 01 means for enabling NC detection of GATECNT-GATE via opens;

a G_V 931 _PDF_VCI_ 2000 DAC_ 13 means for enabling NC detection of GATECNT-GATE via opens;

a G_V 931 _PDF_VCI_ 20019 AC_ 25 means for enabling NC detection of GATECNT-GATE via opens;

a H_PDF_VCI_V 16 _ 14 S 1 _ 08 means for enabling NC detection of GATECNT-GATE via opens;

a H_PDF_VCI_V 16 _ 14 S 1 _ 09 means for enabling NC detection of GATECNT-GATE via opens;

a H_PDF_VCI_V 16 _ 14 S 1 _ 10 means for enabling NC detection of GATECNT-GATE via opens; and,

a H_PDF_VCI_V 16 _ 14 S 1 _ 13 means for enabling NC detection of GATECNT-GATE via opens.

10. A method for making ICs, as defined in claim 1 , wherein the first and second means for enabling NC detection of GATECNT-GATE via opens are both selected from the list consisting of:

a I_V 421 _VCI_ 20 S 3000123 _ 001 means for enabling NC detection of GATECNT-GATE via opens;

a I_V 421 _VCI_ 20 S 3000223 _ 002 means for enabling NC detection of GATECNT-GATE via opens;

a I_V 421 _VCI_ 20 S 3000124 _ 001 means for enabling NC detection of GATECNT-GATE via opens;

a I_V 421 _VCI_ 20 S 3000224 _ 002 means for enabling NC detection of GATECNT-GATE via opens;

a I_V 421 _VCI_ 20 S 3000125 _ 001 means for enabling NC detection of GATECNT-GATE via opens;

a I_V 421 _VCI_ 20 S 3000225 _ 002 means for enabling NC detection of GATECNT-GATE via opens;

a I_V 421 _VCI_ 20 S 3000127 _ 001 means for enabling NC detection of GATECNT-GATE via opens;

a I_V 421 _VCI_ 20 S 3001227 _ 018 means for enabling NC detection of GATECNT-GATE via opens;

a I_V 421 _VCI_ 20 S 3002327 _ 035 means for enabling NC detection of GATECNT-GATE via opens;

a I_V 421 _VCI_ 20 S 3002427 _ 036 means for enabling NC detection of GATECNT-GATE via opens;

a I_V 421 _VCI_ 20 S 3003527 _ 053 means for enabling NC detection of GATECNT-GATE via opens;

a I_V 421 _VCI_ 20 S 3004627 _ 070 means for enabling NC detection of GATECNT-GATE via opens;

a I_V 421 _VCI_ 20 S 3000128 _ 001 means for enabling NC detection of GATECNT-GATE via opens;

a I_V 421 _VCI_ 20 S 3000 D 28 _ 013 means for enabling NC detection of GATECNT-GATE via opens;

a I_V 421 _VCI_ 20 S 3001928 _ 025 means for enabling NC detection of GATECNT-GATE via opens;

a I_V 421 _VCI_ 20 S 3001 A 28 _ 026 means for enabling NC detection of GATECNT-GATE via opens;

a I_V 421 _VCI_ 20 S 3002628 _ 038 means for enabling NC detection of GATECNT-GATE via opens;

a I_V 421 _VCI_ 20 S 3003228 _ 050 means for enabling NC detection of GATECNT-GATE via opens;

a I_V 421 _VCI_ 20 S 3000126 _ 001 means for enabling NC detection of GATECNT-GATE via opens;

a I_V 421 _VCI_ 20 S 3001226 _ 018 means for enabling NC detection of GATECNT-GATE via opens;

a I_V 421 _VCI_ 20 S 3002326 _ 035 means for enabling NC detection of GATECNT-GATE via opens;

a I_V 421 _VCI_ 20 S 3002426 _ 036 means for enabling NC detection of GATECNT-GATE via opens;

a I_V 421 _VCI_ 20 S 3003526 _ 053 means for enabling NC detection of GATECNT-GATE via opens; and,

a I_V 421 _VCI_ 20 S 3004626 _ 070 means for enabling NC detection of GATECNT-GATE via opens.

11. A method for making ICs, as defined in claim 1 , wherein the first and second means for enabling NC detection of GATECNT-GATE via opens are both selected from the list consisting of:

a J_PDF_VCI_VFILLCV 4 _ 7 S 101 _ 1 _ 1 means for enabling NC detection of GATECNT-GATE via opens;

a J_PDF_VCI_VFILLCV 4 _ 7 S 101 _ 31 _ 1 means for enabling NC detection of GATECNT-GATE via opens;

a J_PDF_VCI_VFILLCV 4 _ 7 S 102 _ 63 _ 1 means for enabling NC detection of GATECNT-GATE via opens;

a J_PDF_VCI_VFILLCV 4 _ 7 S 102 _ 92 _ 1 means for enabling NC detection of GATECNT-GATE via opens;

a J_PDF_VCI_VFILLCV 4 _ 7 S 102 _ 93 _ 1 means for enabling NC detection of GATECNT-GATE via opens;

a J_PDF_VCI_VFILLCV 4 _ 7 S 111 _ 282 _ 1 means for enabling NC detection of GATECNT-GATE via opens;

a J_PDF_VCI_VFILLCV 4 _ 7 S 111 _ 311 _ 1 means for enabling NC detection of GATECNT-GATE via opens;

a J_PDF_VCI_VFILLCV 4 _ 7 S 111 _ 312 _ 1 means for enabling NC detection of GATECNT-GATE via opens;

a J_PDF_VCI_VFILLCV 4 _ 7 S 112 _ 313 _ 1 means for enabling NC detection of GATECNT-GATE via opens;

a J_PDF_VCI_VFILLCV 4 _ 7 S 112 _ 342 _ 1 means for enabling NC detection of GATECNT-GATE via opens;

a J_PDF_VCI_VFILLCV 4 _ 7 S 112 _ 343 _ 1 means for enabling NC detection of GATECNT-GATE via opens;

a J_PDF_VCI_VFILLCV 4 _ 7 S 113 _ 344 _ 1 means for enabling NC detection of GATECNT-GATE via opens;

a J_PDF_VCI_VFILLCV 4 _ 7 S 113 _ 373 _ 1 means for enabling NC detection of GATECNT-GATE via opens;

a J_PDF_VCI_VFILLCV 4 _ 7 S 113 _ 374 _ 1 means for enabling NC detection of GATECNT-GATE via opens;

a J_PDF_VCI_VFILLCV 4 _ 7 S 114 _ 375 _ 1 means for enabling NC detection of GATECNT-GATE via opens;

a J_PDF_VCI_VFILLCV 4 _ 7 S 114 _ 404 _ 1 means for enabling NC detection of GATECNT-GATE via opens;

a J_PDF_VCI_VFILLCV 4 _ 7 S 114 _ 405 _ 1 means for enabling NC detection of GATECNT-GATE via opens;

a J_PDF_VCI_VFILLCV 8 _ 7 S 270 _ 0046 _ 1 means for enabling NC detection of GATECNT-GATE via opens;

a J_PDF_VCI_VFILLCV 8 _ 7 S 270 _ 0001 _ 1 means for enabling NC detection of GATECNT-GATE via opens;

a J_PDF_VCI_VFILLCV 4 _ 7 S 108 _ 140 _ 1 means for enabling NC detection of GATECNT-GATE via opens;

a J_PDF_VCI_VFILLCV 4 _ 7 S 108 _ 142 _ 1 means for enabling NC detection of GATECNT-GATE via opens;

a J_PDF_VCI_VFILLCV 4 _ 7 S 108 _ 171 _ 1 means for enabling NC detection of GATECNT-GATE via opens;

a J_PDF_VCI_VFILLCV 4 _ 7 S 109 _ 208 _ 1 means for enabling NC detection of GATECNT-GATE via opens;

a J_PDF_VCI_VFILLCV 4 _ 7 S 109 _ 210 _ 1 means for enabling NC detection of GATECNT-GATE via opens;

a J_PDF_VCI_VFILLCV 4 _ 7 S 109 _ 244 _ 1 means for enabling NC detection of GATECNT-GATE via opens;

a J_PDF_VCI_VFILLCV 4 _ 7 S 110 _ 245 _ 1 means for enabling NC detection of GATECNT-GATE via opens;

a J_PDF_VCI_VFILLCV 4 _ 7 S 110 _ 247 _ 1 means for enabling NC detection of GATECNT-GATE via opens;

a J_PDF_VCI_VFILLCV 4 _ 7 S 110 _ 281 _ 1 means for enabling NC detection of GATECNT-GATE via opens;

a J_PDF_VCI_VFILLCV 8 _ 7 S 271 _ 0083 _ 1 means for enabling NC detection of GATECNT-GATE via opens;

a J_PDF_VCI_VFILLCV 8 _ 7 S 271 _ 0002 _ 1 means for enabling NC detection of GATECNT-GATE via opens;

a J_PDF_VCI_VFILLCV 8 _ 7 S 271 _ 0001 _ 1 means for enabling NC detection of GATECNT-GATE via opens;

a J_PDF_VCI_FILL 8 _ 1 _ 1 means for enabling NC detection of GATECNT-GATE via opens;

a J_PDF_VCI_FILL 8 _ 2 _ 1 means for enabling NC detection of GATECNT-GATE via opens;

a J_PDF_VCI_FILL 8 _ 19 _ 1 means for enabling NC detection of GATECNT-GATE via opens;

a J_PDF_VCI_FILL 8 _ 28 _ 1 means for enabling NC detection of GATECNT-GATE via opens; and,

a J_PDF_VCI_FILL 8 _ 29 _ 1 means for enabling NC detection of GATECNT-GATE via opens.

12. A method for making ICs, as defined in claim 1 , wherein the first and second means for enabling NC detection of GATECNT-GATE via opens are both selected from the list consisting of:

a K_V 549 _PDF_VCI_ 300012 B_ 01 means for enabling NC detection of GATECNT-GATE via opens;

a K_V 549 _PDF_VCI_ 300102 B_ 16 means for enabling NC detection of GATECNT-GATE via opens;

a K_V 549 _PDF_VCI_ 3001 F 2 B_ 31 means for enabling NC detection of GATECNT-GATE via opens;

a K_V 549 _PDF_VCI_ 2000158 _ 01 means for enabling NC detection of GATECNT-GATE via opens;

a K_V 549 _PDF_VCI_ 2002458 _ 36 means for enabling NC detection of GATECNT-GATE via opens;

a K_V 549 _PDF_VCI_ 2004758 _ 71 means for enabling NC detection of GATECNT-GATE via opens;

a K_V 549 _PDF_VCI_ 300012 C_ 01 means for enabling NC detection of GATECNT-GATE via opens;

a K_V 549 _PDF_VCI_ 300102 C_ 16 means for enabling NC detection of GATECNT-GATE via opens;

a K_V 549 _PDF_VCI_ 3001 F 2 C_ 31 means for enabling NC detection of GATECNT-GATE via opens;

a K_V 549 _PDF_VCI_ 3000128 _ 01 means for enabling NC detection of GATECNT-GATE via opens;

a K_V 549 _PDF_VCI_ 3001028 _ 16 means for enabling NC detection of GATECNT-GATE via opens;

a K_V 549 _PDF_VCI_ 3001 F 28 _ 31 means for enabling NC detection of GATECNT-GATE via opens;

a K_V 549 _PDF_VCI_ 3002028 _ 32 means for enabling NC detection of GATECNT-GATE via opens;

a K_V 549 _PDF_VCI_ 3002 F 28 _ 47 means for enabling NC detection of GATECNT-GATE via opens;

a K_V 549 _PDF_VCI_ 3003 E 28 _ 62 means for enabling NC detection of GATECNT-GATE via opens;

a K_V 549 _PDF_VCI_ 2000100 _ 01 means for enabling NC detection of GATECNT-GATE via opens;

a K_V 549 _PDF_VCI_ 2001000 _ 16 means for enabling NC detection of GATECNT-GATE via opens;

a K_V 549 _PDF_VCI_ 2001 F 00 _ 31 means for enabling NC detection of GATECNT-GATE via opens;

a K_V 549 _PDF_VCI_ 200015 A_ 01 means for enabling NC detection of GATECNT-GATE via opens;

a K_V 549 _PDF_VCI_ 200175 A_ 23 means for enabling NC detection of GATECNT-GATE via opens;

a K_V 549 _PDF_VCI_ 2002 D 5 A_ 45 means for enabling NC detection of GATECNT-GATE via opens;

a K_V 549 _PDF_VCI_ 3000127 _ 01 means for enabling NC detection of GATECNT-GATE via opens;

a K_V 549 _PDF_VCI_ 3001027 _ 16 means for enabling NC detection of GATECNT-GATE via opens;

a K_V 549 _PDF_VCI_ 3001 F 27 _ 31 means for enabling NC detection of GATECNT-GATE via opens;

a K_V 549 _PDF_VCI_ 3002027 _ 32 means for enabling NC detection of GATECNT-GATE via opens;

a K_V 549 _PDF_VCI_ 3002 F 27 _ 47 means for enabling NC detection of GATECNT-GATE via opens;

a K_V 549 _PDF_VCI_ 3003 E 27 _ 62 means for enabling NC detection of GATECNT-GATE via opens;

a K_V 549 _PDF_VCI_ 3003 F 27 _ 63 means for enabling NC detection of GATECNT-GATE via opens;

a K_V 549 _PDF_VCI_ 3004 E 27 _ 78 means for enabling NC detection of GATECNT-GATE via opens;

a K_V 549 _PDF_VCI_ 3005 D 27 _ 93 means for enabling NC detection of GATECNT-GATE via opens;

a K_V 549 _PDF_VCI_ 2000101 _ 01 means for enabling NC detection of GATECNT-GATE via opens;

a K_V 549 _PDF_VCI_ 2001101 _ 17 means for enabling NC detection of GATECNT-GATE via opens;

a K_V 549 _PDF_VCI_ 2002101 _ 33 means for enabling NC detection of GATECNT-GATE via opens;

a K_V 549 _PDF_VCI_ 2001003 _ 16 means for enabling NC detection of GATECNT-GATE via opens;

a K_V 549 _PDF_VCI_ 2000103 _ 01 means for enabling NC detection of GATECNT-GATE via opens;

a K_V 549 _PDF_VCI_ 2001 F 03 _ 31 means for enabling NC detection of GATECNT-GATE via opens;

a K_V 549 _PDF_VCI_ 20001 C 3 _ 01 means for enabling NC detection of GATECNT-GATE via opens;

a K_V 549 _PDF_VCI_ 2000 AC 3 _ 10 means for enabling NC detection of GATECNT-GATE via opens;

a K_V 549 _PDF_VCI_ 20013 C 3 _ 19 means for enabling NC detection of GATECNT-GATE via opens;

a K_V 549 _PDF_VCI_ 20001 C 4 _ 01 means for enabling NC detection of GATECNT-GATE via opens;

a K_V 549 _PDF_VCI_ 2000 AC 4 _ 10 means for enabling NC detection of GATECNT-GATE via opens;

a K_V 549 _PDF_VCI_ 20013 C 4 _ 19 means for enabling NC detection of GATECNT-GATE via opens;

a K_V 549 _PDF_VCI_ 20001 C 5 _ 01 means for enabling NC detection of GATECNT-GATE via opens;

a K_V 549 _PDF_VCI_ 2000 AC 5 _ 10 means for enabling NC detection of GATECNT-GATE via opens;

a K_V 549 _PDF_VCI_ 20013 C 5 _ 19 means for enabling NC detection of GATECNT-GATE via opens;

a K_V 549 _PDF_VCI_ 2000194 _ 01 means for enabling NC detection of GATECNT-GATE via opens;

a K_V 549 _PDF_VCI_ 2001794 _ 23 means for enabling NC detection of GATECNT-GATE via opens;

a K_V 549 _PDF_VCI_ 2002 D 94 _ 45 means for enabling NC detection of GATECNT-GATE via opens;

a K_V 549 _PDF_VCI_ 3000136 _ 01 means for enabling NC detection of GATECNT-GATE via opens;

a K_V 549 _PDF_VCI_ 3000 D 36 _ 13 means for enabling NC detection of GATECNT-GATE via opens;

a K_V 549 _PDF_VCI_ 3001936 _ 25 means for enabling NC detection of GATECNT-GATE via opens;

a K_V 549 _PDF_VCI_ 3001 A 36 _ 26 means for enabling NC detection of GATECNT-GATE via opens;

a K_V 549 _PDF_VCI_ 3002636 _ 38 means for enabling NC detection of GATECNT-GATE via opens;

a K_V 549 _PDF_VCI_ 3003236 _ 50 means for enabling NC detection of GATECNT-GATE via opens;

a K_V 549 _PDF_VCI_ 3003336 _ 51 means for enabling NC detection of GATECNT-GATE via opens;

a K_V 549 _PDF_VCI_ 3003 F 36 _ 63 means for enabling NC detection of GATECNT-GATE via opens;

a K_V 549 _PDF_VCI_ 3004 B 36 _ 75 means for enabling NC detection of GATECNT-GATE via opens;

a K_V 549 _PDF_VCI_ 3004 C 36 _ 76 means for enabling NC detection of GATECNT-GATE via opens;

a K_V 549 _PDF_VCI_ 3005836 _ 88 means for enabling NC detection of GATECNT-GATE via opens;

a K_V 549 _PDF_VCI_ 3006436 _ 100 means for enabling NC detection of GATECNT-GATE via opens;

a K_V 549 _PDF_VCI_ 3000137 _ 01 means for enabling NC detection of GATECNT-GATE via opens;

a K_V 549 _PDF_VCI_ 3000 D 37 _ 13 means for enabling NC detection of GATECNT-GATE via opens;

a K_V 549 _PDF_VCI_ 3001937 _ 25 means for enabling NC detection of GATECNT-GATE via opens;

a K_V 549 _PDF_VCI_ 3001 A 37 _ 26 means for enabling NC detection of GATECNT-GATE via opens;

a K_V 549 _PDF_VCI_ 3002637 _ 38 means for enabling NC detection of GATECNT-GATE via opens;

a K_V 549 _PDF_VCI_ 3003237 _ 50 means for enabling NC detection of GATECNT-GATE via opens;

a K_V 549 _PDF_VCI_ 3003337 _ 51 means for enabling NC detection of GATECNT-GATE via opens;

a K_V 549 _PDF_VCI_ 3003 F 37 _ 63 means for enabling NC detection of GATECNT-GATE via opens;

a K_V 549 _PDF_VCI_ 3004 B 37 _ 75 means for enabling NC detection of GATECNT-GATE via opens;

a K_V 549 _PDF_VCI_ 3004 C 37 _ 76 means for enabling NC detection of GATECNT-GATE via opens;

a K_V 549 _PDF_VCI_ 3005837 _ 88 means for enabling NC detection of GATECNT-GATE via opens;

a K_V 549 _PDF_VCI_ 3006437 _ 100 means for enabling NC detection of GATECNT-GATE via opens;

a K_V 549 _PDF_VCI_ 20001 A 8 _ 01 means for enabling NC detection of GATECNT-GATE via opens;

a K_V 549 _PDF_VCI_ 20017 A 8 _ 23 means for enabling NC detection of GATECNT-GATE via opens;

a K_V 549 _PDF_VCI_ 20018 A 8 _ 24 means for enabling NC detection of GATECNT-GATE via opens; and,

a K_V 549 _PDF_VCI_ 2002 EA 8 _ 46 means for enabling NC detection of GATECNT-GATE via opens.

13. A method for making ICs, as defined in claim 1 , wherein the first and second means for enabling NC detection of GATECNT-GATE via opens are both selected from the list consisting of:

a L_V 54 C_B_PDF_VCI_ 100012 E_ 01 means for enabling NC detection of GATECNT-GATE via opens;

a L_V 54 C_B_PDF_VCI_ 100172 E_ 23 means for enabling NC detection of GATECNT-GATE via opens;

a L_V 54 C_B_PDF_VCI_ 100012 C_ 01 means for enabling NC detection of GATECNT-GATE via opens;

a L_V 54 C_B_PDF_VCI_ 100242 C_ 36 means for enabling NC detection of GATECNT-GATE via opens;

a L_V 54 C_B_PDF_VCI_ 100472 C_ 71 means for enabling NC detection of GATECNT-GATE via opens;

a L_V 54 C_M_PDF_VCI_ 300012 B_ 01 means for enabling NC detection of GATECNT-GATE via opens;

a L_V 54 C_M_PDF_VCI_ 300102 B_ 16 means for enabling NC detection of GATECNT-GATE via opens;

a L_V 54 C_M_PDF_VCI_ 3001 F 2 B_ 31 means for enabling NC detection of GATECNT-GATE via opens;

a L_V 54 C_M_PDF_VCI_ 300012 C_ 01 means for enabling NC detection of GATECNT-GATE via opens;

a L_V 54 C_M_PDF_VCI_ 300102 C_ 16 means for enabling NC detection of GATECNT-GATE via opens;

a L_V 54 C_M_PDF_VCI_ 3001 F 2 C_ 31 means for enabling NC detection of GATECNT-GATE via opens;

a L_V 54 C_M_PDF_VCI_ 3000127 _ 01 means for enabling NC detection of GATECNT-GATE via opens;

a L_V 54 C_M_PDF_VCI_ 3001027 _ 16 means for enabling NC detection of GATECNT-GATE via opens;

a L_V 54 C_M_PDF_VCI_ 3001 F 27 _ 31 means for enabling NC detection of GATECNT-GATE via opens;

a L_V 54 C_M_PDF_VCI_ 3002027 _ 32 means for enabling NC detection of GATECNT-GATE via opens;

a L_V 54 C_M_PDF_VCI_ 3002 F 27 _ 47 means for enabling NC detection of GATECNT-GATE via opens;

a L_V 54 C_M_PDF_VCI_ 3003 E 27 _ 62 means for enabling NC detection of GATECNT-GATE via opens;

a L_V 54 C_M_PDF_VCI_ 3003 F 27 _ 63 means for enabling NC detection of GATECNT-GATE via opens;

a L_V 54 C_M_PDF_VCI_ 3004 E 27 _ 78 means for enabling NC detection of GATECNT-GATE via opens;

a L_V 54 C_M_PDF_VCI_ 3005 D 27 _ 93 means for enabling NC detection of GATECNT-GATE via opens;

a L_V 54 C_M_PDF_VCI_ 3000128 _ 01 means for enabling NC detection of GATECNT-GATE via opens;

a L_V 54 C_M_PDF_VCI_ 3001028 _ 16 means for enabling NC detection of GATECNT-GATE via opens;

a L_V 54 C_M_PDF_VCI_ 3001 F 28 _ 31 means for enabling NC detection of GATECNT-GATE via opens;

a L_V 54 C_M_PDF_VCI_ 3002028 _ 32 means for enabling NC detection of GATECNT-GATE via opens;

a L_V 54 C_M_PDF_VCI_ 3002 F 28 _ 47 means for enabling NC detection of GATECNT-GATE via opens;

a L_V 54 C_M_PDF_VCI_ 3003 E 28 _ 62 means for enabling NC detection of GATECNT-GATE via opens;

a L_V 54 C_M_PDF_VCI_ 3000136 _ 01 means for enabling NC detection of GATECNT-GATE via opens;

a L_V 54 C_M_PDF_VCI_ 3000 D 36 _ 13 means for enabling NC detection of GATECNT-GATE via opens;

a L_V 54 C_M_PDF_VCI_ 3001936 _ 25 means for enabling NC detection of GATECNT-GATE via opens;

a L_V 54 C_M_PDF_VCI_ 3001 A 36 _ 26 means for enabling NC detection of GATECNT-GATE via opens;

a L_V 54 C_M_PDF_VCI_ 3002636 _ 38 means for enabling NC detection of GATECNT-GATE via opens;

a L_V 54 C_M_PDF_VCI_ 3003236 _ 50 means for enabling NC detection of GATECNT-GATE via opens;

a L_V 54 C_M_PDF_VCI_ 3003336 _ 51 means for enabling NC detection of GATECNT-GATE via opens;

a L_V 54 C_M_PDF_VCI_ 3003 F 36 _ 63 means for enabling NC detection of GATECNT-GATE via opens;

a L_V 54 C_M_PDF_VCI_ 3004 B 36 _ 75 means for enabling NC detection of GATECNT-GATE via opens;

a L_V 54 C_M_PDF_VCI_ 3004 C 36 _ 76 means for enabling NC detection of GATECNT-GATE via opens;

a L_V 54 C_M_PDF_VCI_ 3005836 _ 88 means for enabling NC detection of GATECNT-GATE via opens;

a L_V 54 C_M_PDF_VCI_ 3006436 _ 100 means for enabling NC detection of GATECNT-GATE via opens;

a L_V 54 C_M_PDF_VCI_ 2000100 _ 01 means for enabling NC detection of GATECNT-GATE via opens;

a L_V 54 C_M_PDF_VCI_ 2001000 _ 16 means for enabling NC detection of GATECNT-GATE via opens;

a L_V 54 C_M_PDF_VCI_ 2001 F 00 _ 31 means for enabling NC detection of GATECNT-GATE via opens;

a L_V 54 C_M_PDF_VCI_ 2000101 _ 01 means for enabling NC detection of GATECNT-GATE via opens;

a L_V 54 C_M_PDF_VCI_ 2000601 _ 06 means for enabling NC detection of GATECNT-GATE via opens;

a L_V 54 C_M_PDF_VCI_ 2000 B 01 _ 11 means for enabling NC detection of GATECNT-GATE via opens;

a L_V 54 C_M_PDF_VCI_ 2000103 _ 01 means for enabling NC detection of GATECNT-GATE via opens;

a L_V 54 C_M_PDF_VCI_ 2001003 _ 16 means for enabling NC detection of GATECNT-GATE via opens;

a L_V 54 C_M_PDF_VCI_ 2001 F 03 _ 31 means for enabling NC detection of GATECNT-GATE via opens;

a L_V 54 C_M_PDF_VCI_ 20001 A 8 _ 01 means for enabling NC detection of GATECNT-GATE via opens;

a L_V 54 C_M_PDF_VCI_ 20017 A 8 _ 23 means for enabling NC detection of GATECNT-GATE via opens;

a L_V 54 C_M_PDF_VCI_ 20018 A 8 _ 24 means for enabling NC detection of GATECNT-GATE via opens;

a L_V 54 C_M_PDF_VCI_ 2002 EA 8 _ 46 means for enabling NC detection of GATECNT-GATE via opens;

a L_V 54 C_M_PDF_VCI_ 20001 C 3 _ 01 means for enabling NC detection of GATECNT-GATE via opens;

a L_V 54 C_M_PDF_VCI_ 2000 AC 3 _ 10 means for enabling NC detection of GATECNT-GATE via opens;

a L_V 54 C_M_PDF_VCI_ 20013 C 3 _ 19 means for enabling NC detection of GATECNT-GATE via opens;

a L_V 54 C_M_PDF_VCI_ 20001 C 4 _ 01 means for enabling NC detection of GATECNT-GATE via opens;

a L_V 54 C_M_PDF_VCI_ 2000 AC 4 _ 10 means for enabling NC detection of GATECNT-GATE via opens;

a L_V 54 C_M_PDF_VCI_ 20013 C 4 _ 19 means for enabling NC detection of GATECNT-GATE via opens;

a L_V 54 C_M_PDF_VCI_ 20001 C 5 _ 01 means for enabling NC detection of GATECNT-GATE via opens;

a L_V 54 C_M_PDF_VCI_ 2000 AC 5 _ 10 means for enabling NC detection of GATECNT-GATE via opens; and,

a L_V 54 C_M_PDF_VCI_ 20013 C 5 _ 19 means for enabling NC detection of GATECNT-GATE via opens.

14. A method for making ICs, as defined in claim 1 , wherein the first and second means for enabling NC detection of GATECNT-GATE via opens are both selected from the list consisting of:

a M_V 54 B_PDF_VCI_ 100012 E_ 01 means for enabling NC detection of GATECNT-GATE via opens;

a M_V 54 B_PDF_VCI_ 100172 E_ 23 means for enabling NC detection of GATECNT-GATE via opens; and,

a M_V 54 B_PDF_VCI_ 100182 E_ 24 means for enabling NC detection of GATECNT-GATE via opens.

15. A method for making ICs, comprising at least:

(a) performing initial processing steps to produce a test wafer that includes a first DOE of NCEM-enabled, GATECNT-GATE-via-open-configured fill cells, said initial processing steps including:

(i) patterning, on the test wafer, a first means for enabling NC detection of GATECNT-GATE via opens; and,

(ii) patterning, on the test wafer, a second means for enabling NC detection of GATECNT-GATE via opens;

wherein the first and second means for enabling NC detection of GATECNT-GATE via opens are different;

(b) determining a presence or absence of GATECNT-GATE via opens on the test wafer by:

performing a voltage contrast examination of NCEM-enabled fill cells in the first DOE, including at least the first and second means for enabling NC detection of GATECNT-GATE via opens; and,

(c) using the results from step (b) in processing of a subsequent product wafer.

16. A method for making ICs, comprising at least:

(a) performing initial processing steps to produce a test wafer that includes a first DOE of NCEM-enabled, GATECNT-GATE-via-open-configured fill cells, said initial processing steps including:

(i) first step for enabling, on the test wafer, NC detection of GATECNT-GATE via opens; and,

(ii) second step for enabling, on the test wafer, NC detection of GATECNT-GATE via opens;

wherein the first and second steps for enabling NC detection of GATECNT-GATE via opens are different;

(b) determining a presence or absence of GATECNT-GATE via opens on the test wafer by:

performing a voltage contrast examination of NCEM-enabled fill cells in the first DOE; and,

(c) using the results from step (b) to select NCEM-enabled fill cells for inclusion on a subsequent product wafer.

17. A method for making ICs, as defined in claim 16 , wherein the first and second steps for enabling NC detection of GATECNT-GATE via opens are both selected from the list consisting of:

a A_PDF_VCI_FILL 8 _ 9 S 101 _ 0004 _ 1 step for enabling NC detection of GATECNT-GATE via opens;

a A_PDF_VCI_FILL 16 _ 9 S 101 _ 0004 _ 1 step for enabling NC detection of GATECNT-GATE via opens;

a A_PDF_VCI_FILL 32 _ 9 S 101 _ 0004 _ 1 step for enabling NC detection of GATECNT-GATE via opens;

a A_PDF_VCI_FILL 64 _ 9 S 101 _ 0004 _ 1 step for enabling NC detection of GATECNT-GATE via opens;

a A_PDF_VCI_FILL 8 _ 9 S 101 _ 0003 _ 1 step for enabling NC detection of GATECNT-GATE via opens;

a A_PDF_VCI_FILL 16 _ 9 S 101 _ 0003 _ 1 step for enabling NC detection of GATECNT-GATE via opens;

a A_PDF_VCI_FILL 32 _ 9 S 101 _ 0003 _ 1 step for enabling NC detection of GATECNT-GATE via opens;

a A_PDF_VCI_FILL 64 _ 9 S 101 _ 0003 _ 1 step for enabling NC detection of GATECNT-GATE via opens;

a A_PDF_VCI_FILL 8 _ 9 S 107 _ 0003 _ 1 step for enabling NC detection of GATECNT-GATE via opens;

a A_PDF_VCI_FILL 16 _ 9 S 107 _ 0002 _ 1 step for enabling NC detection of GATECNT-GATE via opens;

a A_PDF_VCI_FILL 32 _ 9 S 107 _ 0003 _ 1 step for enabling NC detection of GATECNT-GATE via opens;

a A_PDF_VCI_FILL 64 _ 9 S 107 _ 0003 _ 1 step for enabling NC detection of GATECNT-GATE via opens;

a A_PDF_VCI_FILL 8 _ 9 S 111 _ 0001 _ 1 step for enabling NC detection of GATECNT-GATE via opens;

a A_PDF_VCI_FILL 16 _ 9 S 111 _ 0001 _ 1 step for enabling NC detection of GATECNT-GATE via opens;

a A_PDF_VCI_FILL 32 _ 9 S 111 _ 0001 _ 1 step for enabling NC detection of GATECNT-GATE via opens; and,

a A_PDF_VCI_FILL 64 _ 9 S 111 _ 0001 _ 1 step for enabling NC detection of GATECNT-GATE via opens.

18. A method for making ICs, as defined in claim 16 , wherein the first and second steps for enabling NC detection of GATECNT-GATE via opens are both selected from the list consisting of:

a C_V 682 _PDF_VCI_ 16 _ 2000140 _ 01 step for enabling NC detection of GATECNT-GATE via opens;

a C_V 682 _PDF_VCI_ 16 _ 2002240 _ 34 step for enabling NC detection of GATECNT-GATE via opens;

a C_V 682 _PDF_VCI_ 16 _ 2004340 _ 67 step for enabling NC detection of GATECNT-GATE via opens;

a C_V 682 _PDF_VCI_ 16 _ 2000146 _ 01 step for enabling NC detection of GATECNT-GATE via opens;

a C_V 682 _PDF_VCI_ 16 _ 2002246 _ 34 step for enabling NC detection of GATECNT-GATE via opens; and,

a C_V 682 _PDF_VCI_ 16 _ 2004346 _ 67 step for enabling NC detection of GATECNT-GATE via opens.

19. A method for making ICs, as defined in claim 16 , wherein the first and second steps for enabling NC detection of GATECNT-GATE via opens are both selected from the list consisting of:

a D_PDF_VCI_VFILL 4 _ 12 S 01 _ 0105 _ 1 step for enabling NC detection of GATECNT-GATE via opens;

a D_PDF_VCI_VFILL 4 _ 12 S 01 _ 0037 _ 1 step for enabling NC detection of GATECNT-GATE via opens;

a D_PDF_VCI_VFILL 4 _ 12 S 01 _ 0034 _ 1 step for enabling NC detection of GATECNT-GATE via opens;

a D_PDF_VCI_VFILL 4 _ 12 S 01 _ 0097 _ 1 step for enabling NC detection of GATECNT-GATE via opens;

a D_PDF_VCI_VFILL 4 _ 12 S 01 _ 0088 _ 1 step for enabling NC detection of GATECNT-GATE via opens;

a D_PDF_VCI_VFILL 4 _ 12 S 01 _ 0087 _ 1 step for enabling NC detection of GATECNT-GATE via opens;

a D_PDF_VCI_VFILL 4 _ 12 S 01 _ 0019 _ 1 step for enabling NC detection of GATECNT-GATE via opens;

a D_PDF_VCI_VFILL 4 _ 12 S 01 _ 0083 _ 1 step for enabling NC detection of GATECNT-GATE via opens;

a D_PDF_VCI_VFILL 4 _ 12 S 01 _ 0008 _ 1 step for enabling NC detection of GATECNT-GATE via opens;

a D_PDF_VCI_VFILL 4 _ 12 S 01 _ 0070 _ 1 step for enabling NC detection of GATECNT-GATE via opens;

a D_PDF_VCI_VFILL 4 _ 12 S 01 _ 0001 _ 1 step for enabling NC detection of GATECNT-GATE via opens;

a D_PDF_VCI_VFILL 4 _ 12 S 01 _ 0065 _ 1 step for enabling NC detection of GATECNT-GATE via opens; and,

a D_PDF_VCI_VFILL 4 _ 12 S 01 _ 0052 _ 1 step for enabling NC detection of GATECNT-GATE via opens.

20. A method for making ICs, as defined in claim 16 , wherein the first and second steps for enabling NC detection of GATECNT-GATE via opens are both selected from the list consisting of:

a E_PDF_VCI_FILL 8 _ 17 S 1 _ 0053 _ 1 step for enabling NC detection of GATECNT-GATE via opens;

a E_PDF_VCI_FILL 8 _ 17 S 1 _ 0051 _ 1 step for enabling NC detection of GATECNT-GATE via opens;

a E_PDF_VCI_FILL 8 _ 17 S 1 _ 0026 _ 1 step for enabling NC detection of GATECNT-GATE via opens;

a E_PDF_VCI_FILL 8 _ 17 S 1 _ 0022 _ 1 step for enabling NC detection of GATECNT-GATE via opens;

a E_PDF_VCI_FILL 8 _ 17 S 1 _ 0021 _ 1 step for enabling NC detection of GATECNT-GATE via opens;

a E_PDF_VCI_FILL 8 _ 17 S 1 _ 0020 _ 1 step for enabling NC detection of GATECNT-GATE via opens;

a E_PDF_VCI_FILL 8 _ 17 S 1 _ 0019 _ 1 step for enabling NC detection of GATECNT-GATE via opens;

a E_PDF_VCI_FILL 8 _ 17 S 1 _ 0018 _ 1 step for enabling NC detection of GATECNT-GATE via opens;

a E_PDF_VCI_FILL 8 _ 17 S 1 _ 0017 _ 1 step for enabling NC detection of GATECNT-GATE via opens;

a E_PDF_VCI_FILL 8 _ 17 S 1 _ 0008 _ 1 step for enabling NC detection of GATECNT-GATE via opens;

a E_PDF_VCI_FILL 8 _ 17 S 1 _ 0007 _ 1 step for enabling NC detection of GATECNT-GATE via opens;

a E_PDF_VCI_FILL 8 _ 17 S 1 _ 0006 _ 1 step for enabling NC detection of GATECNT-GATE via opens; and,

a E_PDF_VCI_FILL 8 _ 17 S 1 _ 0005 _ 1 step for enabling NC detection of GATECNT-GATE via opens.

21. A method for making ICs, as defined in claim 16 , wherein the first and second steps for enabling NC detection of GATECNT-GATE via opens are both selected from the list consisting of:

a F_PDF_VCI_FILL 08 _ 24 S 1 _ 0084 _ 1 step for enabling NC detection of GATECNT-GATE via opens;

a F_PDF_VCI_FILL 08 _ 24 S 2 _ 0047 _ 1 step for enabling NC detection of GATECNT-GATE via opens;

a F_PDF_VCI_FILL 64 _ 24 S 1 _ 0080 _ 1 step for enabling NC detection of GATECNT-GATE via opens;

a F_PDF_VCI_FILL 64 _ 24 S 1 _ 0079 _ 1 step for enabling NC detection of GATECNT-GATE via opens;

a F_PDF_VCI_FILL 64 _ 24 S 1 _ 0078 _ 1 step for enabling NC detection of GATECNT-GATE via opens;

a F_PDF_VCI_FILL 64 _ 24 S 1 _ 0076 _ 1 step for enabling NC detection of GATECNT-GATE via opens;

a F_PDF_VCI_FILL 08 _ 24 S 1 _ 0077 _ 1 step for enabling NC detection of GATECNT-GATE via opens;

a F_PDF_VCI_FILL 08 _ 24 S 1 _ 0076 _ 1 step for enabling NC detection of GATECNT-GATE via opens;

a F_PDF_VCI_FILL 08 _ 24 S 1 _ 0075 _ 1 step for enabling NC detection of GATECNT-GATE via opens;

a F_PDF_VCI_FILL 08 _ 24 S 1 _ 0073 _ 1 step for enabling NC detection of GATECNT-GATE via opens;

a F_PDF_VCI_FILL 64 _ 24 S 1 _ 0060 _ 1 step for enabling NC detection of GATECNT-GATE via opens;

a F_PDF_VCI_FILL 64 _ 24 S 1 _ 0059 _ 1 step for enabling NC detection of GATECNT-GATE via opens;

a F_PDF_VCI_FILL 64 _ 24 S 1 _ 0058 _ 1 step for enabling NC detection of GATECNT-GATE via opens;

a F_PDF_VCI_FILL 64 _ 24 S 2 _ 0025 _ 1 step for enabling NC detection of GATECNT-GATE via opens;

a F_PDF_VCI_FILL 64 _ 24 S 1 _ 0056 _ 1 step for enabling NC detection of GATECNT-GATE via opens;

a F_PDF_VCI_FILL 08 _ 24 S 1 _ 0057 _ 1 step for enabling NC detection of GATECNT-GATE via opens;

a F_PDF_VCI_FILL 64 _ 24 S 2 _ 0023 _ 1 step for enabling NC detection of GATECNT-GATE via opens;

a F_PDF_VCI_FILL 08 _ 24 S 1 _ 0056 _ 1 step for enabling NC detection of GATECNT-GATE via opens;

a F_PDF_VCI_FILL 64 _ 24 S 1 _ 0054 _ 1 step for enabling NC detection of GATECNT-GATE via opens;

a F_PDF_VCI_FILL 08 _ 24 S 1 _ 0055 _ 1 step for enabling NC detection of GATECNT-GATE via opens;

a F_PDF_VCI_FILL 08 _ 24 S 2 _ 0017 _ 1 step for enabling NC detection of GATECNT-GATE via opens;

a F_PDF_VCI_FILL 08 _ 24 S 1 _ 0053 _ 1 step for enabling NC detection of GATECNT-GATE via opens;

a F_PDF_VCI_FILL 08 _ 24 S 2 _ 0016 _ 1 step for enabling NC detection of GATECNT-GATE via opens;

a F_PDF_VCI_FILL 08 _ 24 S 1 _ 0051 _ 1 step for enabling NC detection of GATECNT-GATE via opens;

a F_PDF_VCI_FILL 32 _ 24 S 1 _ 0084 _ 1 step for enabling NC detection of GATECNT-GATE via opens;

a F_PDF_VCI_FILL 32 _ 24 S 2 _ 0045 _ 1 step for enabling NC detection of GATECNT-GATE via opens;

a F_PDF_VCI_FILL 32 _ 24 S 1 _ 0077 _ 1 step for enabling NC detection of GATECNT-GATE via opens;

a F_PDF_VCI_FILL 32 _ 24 S 1 _ 0076 _ 1 step for enabling NC detection of GATECNT-GATE via opens;

a F_PDF_VCI_FILL 32 _ 24 S 1 _ 0075 _ 1 step for enabling NC detection of GATECNT-GATE via opens;

a F_PDF_VCI_FILL 32 _ 24 S 1 _ 0073 _ 1 step for enabling NC detection of GATECNT-GATE via opens;

a F_PDF_VCI_FILL 32 _ 24 S 1 _ 0057 _ 1 step for enabling NC detection of GATECNT-GATE via opens;

a F_PDF_VCI_FILL 32 _ 24 S 1 _ 0056 _ 1 step for enabling NC detection of GATECNT-GATE via opens;

a F_PDF_VCI_FILL 32 _ 24 S 1 _ 0055 _ 1 step for enabling NC detection of GATECNT-GATE via opens;

a F_PDF_VCI_FILL 32 _ 24 S 2 _ 0033 _ 1 step for enabling NC detection of GATECNT-GATE via opens;

a F_PDF_VCI_FILL 32 _ 24 S 1 _ 0053 _ 1 step for enabling NC detection of GATECNT-GATE via opens;

a F_PDF_VCI_FILL 32 _ 24 S 2 _ 0031 _ 1 step for enabling NC detection of GATECNT-GATE via opens;

a F_PDF_VCI_FILL 32 _ 24 S 1 _ 0051 _ 1 step for enabling NC detection of GATECNT-GATE via opens;

a F_PDF_VCI_FILL 16 _ 24 S 1 _ 0043 _ 1 step for enabling NC detection of GATECNT-GATE via opens;

a F_PDF_VCI_FILL 16 _ 24 S 2 _ 0035 _ 1 step for enabling NC detection of GATECNT-GATE via opens;

a F_PDF_VCI_FILL 16 _ 24 S 1 _ 0036 _ 1 step for enabling NC detection of GATECNT-GATE via opens;

a F_PDF_VCI_FILL 16 _ 24 S 1 _ 0035 _ 1 step for enabling NC detection of GATECNT-GATE via opens;

a F_PDF_VCI_FILL 16 _ 24 S 1 _ 0034 _ 1 step for enabling NC detection of GATECNT-GATE via opens;

a F_PDF_VCI_FILL 16 _ 24 S 1 _ 0032 _ 1 step for enabling NC detection of GATECNT-GATE via opens;

a F_PDF_VCI_FILL 16 _ 24 S 1 _ 0016 _ 1 step for enabling NC detection of GATECNT-GATE via opens;

a F_PDF_VCI_FILL 16 _ 24 S 1 _ 0015 _ 1 step for enabling NC detection of GATECNT-GATE via opens;

a F_PDF_VCI_FILL 16 _ 24 S 1 _ 0014 _ 1 step for enabling NC detection of GATECNT-GATE via opens;

a F_PDF_VCI_FILL 16 _ 24 S 2 _ 0037 _ 1 step for enabling NC detection of GATECNT-GATE via opens;

a F_PDF_VCI_FILL 16 _ 24 S 1 _ 0012 _ 1 step for enabling NC detection of GATECNT-GATE via opens;

a F_PDF_VCI_FILL 16 _ 24 S 2 _ 0036 _ 1 step for enabling NC detection of GATECNT-GATE via opens;

a F_PDF_VCI_FILL 16 _ 24 S 1 _ 0010 _ 1 step for enabling NC detection of GATECNT-GATE via opens;

a F_PDF_VCI_FILL 64 _ 24 S 1 _ 0003 _ 1 step for enabling NC detection of GATECNT-GATE via opens;

a F_PDF_VCI_FILL 64 _ 24 S 2 _ 0045 _ 1 step for enabling NC detection of GATECNT-GATE via opens; and,

a F_PDF_VCI_FILL 08 _ 24 S 2 _ 0043 _ 1 step for enabling NC detection of GATECNT-GATE via opens.

22. A method for making ICs, as defined in claim 16 , wherein the first and second steps for enabling NC detection of GATECNT-GATE via opens are both selected from the list consisting of:

a G_V 931 _PDF_VCI_ 20001 AC_ 01 step for enabling NC detection of GATECNT-GATE via opens;

a G_V 931 _PDF_VCI_ 2000 DAC_ 13 step for enabling NC detection of GATECNT-GATE via opens;

a G_V 931 _PDF_VCI_ 20019 AC_ 25 step for enabling NC detection of GATECNT-GATE via opens;

a H_PDF_VCI_V 16 _ 14 S 1 _ 08 step for enabling NC detection of GATECNT-GATE via opens;

a H_PDF_VCI_V 16 _ 14 S 1 _ 09 step for enabling NC detection of GATECNT-GATE via opens;

a H_PDF_VCI_V 16 _ 14 S 1 _ 10 step for enabling NC detection of GATECNT-GATE via opens; and,

a H_PDF_VCI_V 16 _ 14 S 1 _ 13 step for enabling NC detection of GATECNT-GATE via opens.

23. A method for making ICs, as defined in claim 16 , wherein the first and second steps for enabling NC detection of GATECNT-GATE via opens are both selected from the list consisting of:

a I_V 421 _VCI_ 20 S 3000123 _ 001 step for enabling NC detection of GATECNT-GATE via opens;

a I_V 421 _VCI_ 20 S 3000223 _ 002 step for enabling NC detection of GATECNT-GATE via opens;

a I_V 421 _VCI_ 20 S 3000124 _ 001 step for enabling NC detection of GATECNT-GATE via opens;

a I_V 421 _VCI_ 20 S 3000224 _ 002 step for enabling NC detection of GATECNT-GATE via opens;

a I_V 421 _VCI_ 20 S 3000125 _ 001 step for enabling NC detection of GATECNT-GATE via opens;

a I_V 421 _VCI_ 20 S 3000225 _ 002 step for enabling NC detection of GATECNT-GATE via opens;

a I_V 421 _VCI_ 20 S 3000127 _ 001 step for enabling NC detection of GATECNT-GATE via opens;

a I_V 421 _VCI_ 20 S 3001227 _ 018 step for enabling NC detection of GATECNT-GATE via opens;

a I_V 421 _VCI_ 20 S 3002327 _ 035 step for enabling NC detection of GATECNT-GATE via opens;

a I_V 421 _VCI_ 20 S 3002427 _ 036 step for enabling NC detection of GATECNT-GATE via opens;

a I_V 421 _VCI_ 20 S 3003527 _ 053 step for enabling NC detection of GATECNT-GATE via opens;

a I_V 421 _VCI_ 20 S 3004627 _ 070 step for enabling NC detection of GATECNT-GATE via opens;

a I_V 421 _VCI_ 20 S 3000128 _ 001 step for enabling NC detection of GATECNT-GATE via opens;

a I_V 421 _VCI_ 20 S 3000 D 28 _ 013 step for enabling NC detection of GATECNT-GATE via opens;

a I_V 421 _VCI_ 20 S 3001928 _ 025 step for enabling NC detection of GATECNT-GATE via opens;

a I_V 421 _VCI_ 20 S 3001 A 28 _ 026 step for enabling NC detection of GATECNT-GATE via opens;

a I_V 421 _VCI_ 20 S 3002628 _ 038 step for enabling NC detection of GATECNT-GATE via opens;

a I_V 421 _VCI_ 20 S 3003228 _ 050 step for enabling NC detection of GATECNT-GATE via opens;

a I_V 421 _VCI_ 20 S 3000126 _ 001 step for enabling NC detection of GATECNT-GATE via opens;

a I_V 421 _VCI_ 20 S 3001226 _ 018 step for enabling NC detection of GATECNT-GATE via opens;

a I_V 421 _VCI_ 20 S 3002326 _ 035 step for enabling NC detection of GATECNT-GATE via opens;

a I_V 421 _VCI_ 20 S 3002426 _ 036 step for enabling NC detection of GATECNT-GATE via opens;

a I_V 421 _VCI_ 20 S 3003526 _ 053 step for enabling NC detection of GATECNT-GATE via opens; and,

a I_V 421 _VCI_ 20 S 3004626 _ 070 step for enabling NC detection of GATECNT-GATE via opens.

24. A method for making ICs, as defined in claim 16 , wherein the first and second steps for enabling NC detection of GATECNT-GATE via opens are both selected from the list consisting of:

a J_PDF_VCI_VFILLCV 4 _ 7 S 101 _ 1 _ 1 step for enabling NC detection of GATECNT-GATE via opens;

a J_PDF_VCI_VFILLCV 4 _ 7 S 101 _ 31 _ 1 step for enabling NC detection of GATECNT-GATE via opens;

a J_PDF_VCI_VFILLCV 4 _ 7 S 102 _ 63 _ 1 step for enabling NC detection of GATECNT-GATE via opens;

a J_PDF_VCI_VFILLCV 4 _ 7 S 102 _ 92 _ 1 step for enabling NC detection of GATECNT-GATE via opens;

a J_PDF_VCI_VFILLCV 4 _ 7 S 102 _ 93 _ 1 step for enabling NC detection of GATECNT-GATE via opens;

a J_PDF_VCI_VFILLCV 4 _ 7 S 111 _ 282 _ 1 step for enabling NC detection of GATECNT-GATE via opens;

a J_PDF_VCI_VFILLCV 4 _ 7 S 111 _ 311 _ 1 step for enabling NC detection of GATECNT-GATE via opens;

a J_PDF_VCI_VFILLCV 4 _ 7 S 111 _ 312 _ 1 step for enabling NC detection of GATECNT-GATE via opens;

a J_PDF_VCI_VFILLCV 4 _ 7 S 112 _ 313 _ 1 step for enabling NC detection of GATECNT-GATE via opens;

a J_PDF_VCI_VFILLCV 4 _ 7 S 112 _ 342 _ 1 step for enabling NC detection of GATECNT-GATE via opens;

a J_PDF_VCI_VFILLCV 4 _ 7 S 112 _ 343 _ 1 step for enabling NC detection of GATECNT-GATE via opens;

a J_PDF_VCI_VFILLCV 4 _ 7 S 113 _ 344 _ 1 step for enabling NC detection of GATECNT-GATE via opens;

a J_PDF_VCI_VFILLCV 4 _ 7 S 113 _ 373 _ 1 step for enabling NC detection of GATECNT-GATE via opens;

a J_PDF_VCI_VFILLCV 4 _ 7 S 113 _ 374 _ 1 step for enabling NC detection of GATECNT-GATE via opens;

a J_PDF_VCI_VFILLCV 4 _ 7 S 114 _ 375 _ 1 step for enabling NC detection of GATECNT-GATE via opens;

a J_PDF_VCI_VFILLCV 4 _ 7 S 114 _ 404 _ 1 step for enabling NC detection of GATECNT-GATE via opens;

a J_PDF_VCI_VFILLCV 4 _ 7 S 114 _ 405 _ 1 step for enabling NC detection of GATECNT-GATE via opens;

a J_PDF_VCI_VFILLCV 8 _ 7 S 270 _ 0046 _ 1 step for enabling NC detection of GATECNT-GATE via opens;

a J_PDF_VCI_VFILLCV 8 _ 7 S 270 _ 0001 _ 1 step for enabling NC detection of GATECNT-GATE via opens;

a J_PDF_VCI_VFILLCV 4 _ 7 S 108 _ 140 _ 1 step for enabling NC detection of GATECNT-GATE via opens;

a J_PDF_VCI_VFILLCV 4 _ 7 S 108 _ 142 _ 1 step for enabling NC detection of GATECNT-GATE via opens;

a J_PDF_VCI_VFILLCV 4 _ 7 S 108 _ 171 _ 1 step for enabling NC detection of GATECNT-GATE via opens;

a J_PDF_VCI_VFILLCV 4 _ 7 S 109 _ 208 _ 1 step for enabling NC detection of GATECNT-GATE via opens;

a J_PDF_VCI_VFILLCV 4 _ 7 S 109 _ 210 _ 1 step for enabling NC detection of GATECNT-GATE via opens;

a J_PDF_VCI_VFILLCV 4 _ 7 S 109 _ 244 _ 1 step for enabling NC detection of GATECNT-GATE via opens;

a J_PDF_VCI_VFILLCV 4 _ 7 S 110 _ 245 _ 1 step for enabling NC detection of GATECNT-GATE via opens;

a J_PDF_VCI_VFILLCV 4 _ 7 S 110 _ 247 _ 1 step for enabling NC detection of GATECNT-GATE via opens;

a J_PDF_VCI_VFILLCV 4 _ 7 S 110 _ 281 _ 1 step for enabling NC detection of GATECNT-GATE via opens;

a J_PDF_VCI_VFILLCV 8 _ 7 S 271 _ 0083 _ 1 step for enabling NC detection of GATECNT-GATE via opens;

a J_PDF_VCI_VFILLCV 8 _ 7 S 271 _ 0002 _ 1 step for enabling NC detection of GATECNT-GATE via opens;

a J_PDF_VCI_VFILLCV 8 _ 7 S 271 _ 0001 _ 1 step for enabling NC detection of GATECNT-GATE via opens;

a J_PDF_VCI_FILL 8 _ 1 _ 1 step for enabling NC detection of GATECNT-GATE via opens;

a J_PDF_VCI_FILL 8 _ 2 _ 1 step for enabling NC detection of GATECNT-GATE via opens;

a J_PDF_VCI_FILL 8 _ 19 _ 1 step for enabling NC detection of GATECNT-GATE via opens;

a J_PDF_VCI_FILL 8 _ 28 _ 1 step for enabling NC detection of GATECNT-GATE via opens; and,

a J_PDF_VCI_FILL 8 _ 29 _ 1 step for enabling NC detection of GATECNT-GATE via opens.

25. A method for making ICs, as defined in claim 16 , wherein the first and second steps for enabling NC detection of GATECNT-GATE via opens are both selected from the list consisting of:

a K_V 549 _PDF_VCI_ 300012 B_ 01 step for enabling NC detection of GATECNT-GATE via opens;

a K_V 549 _PDF_VCI_ 300102 B_ 16 step for enabling NC detection of GATECNT-GATE via opens;

a K_V 549 _PDF_VCI_ 3001 F 2 B_ 31 step for enabling NC detection of GATECNT-GATE via opens;

a K_V 549 _PDF_VCI_ 2000158 _ 01 step for enabling NC detection of GATECNT-GATE via opens;

a K_V 549 _PDF_VCI_ 2002458 _ 36 step for enabling NC detection of GATECNT-GATE via opens;

a K_V 549 _PDF_VCI_ 2004758 _ 71 step for enabling NC detection of GATECNT-GATE via opens;

a K_V 549 _PDF_VCI_ 300012 C_ 01 step for enabling NC detection of GATECNT-GATE via opens;

a K_V 549 _PDF_VCI_ 300102 C_ 16 step for enabling NC detection of GATECNT-GATE via opens;

a K_V 549 _PDF_VCI_ 3001 F 2 C_ 31 step for enabling NC detection of GATECNT-GATE via opens;

a K_V 549 _PDF_VCI_ 3000128 _ 01 step for enabling NC detection of GATECNT-GATE via opens;

a K_V 549 _PDF_VCI_ 3001028 _ 16 step for enabling NC detection of GATECNT-GATE via opens;

a K_V 549 _PDF_VCI_ 3001 F 28 _ 31 step for enabling NC detection of GATECNT-GATE via opens;

a K_V 549 _PDF_VCI_ 3002028 _ 32 step for enabling NC detection of GATECNT-GATE via opens;

a K_V 549 _PDF_VCI_ 3002 F 28 _ 47 step for enabling NC detection of GATECNT-GATE via opens;

a K_V 549 _PDF_VCI_ 3003 E 28 _ 62 step for enabling NC detection of GATECNT-GATE via opens;

a K_V 549 _PDF_VCI_ 2000100 _ 01 step for enabling NC detection of GATECNT-GATE via opens;

a K_V 549 _PDF_VCI_ 2001000 _ 16 step for enabling NC detection of GATECNT-GATE via opens;

a K_V 549 _PDF_VCI_ 2001 F 00 _ 31 step for enabling NC detection of GATECNT-GATE via opens;

a K_V 549 _PDF_VCI_ 200015 A_ 01 step for enabling NC detection of GATECNT-GATE via opens;

a K_V 549 _PDF_VCI_ 200175 A_ 23 step for enabling NC detection of GATECNT-GATE via opens;

a K_V 549 _PDF_VCI_ 2002 D 5 A_ 45 step for enabling NC detection of GATECNT-GATE via opens;

a K_V 549 _PDF_VCI_ 3000127 _ 01 step for enabling NC detection of GATECNT-GATE via opens;

a K_V 549 _PDF_VCI_ 3001027 _ 16 step for enabling NC detection of GATECNT-GATE via opens;

a K_V 549 _PDF_VCI_ 3001 F 27 _ 31 step for enabling NC detection of GATECNT-GATE via opens;

a K_V 549 _PDF_VCI_ 3002027 _ 32 step for enabling NC detection of GATECNT-GATE via opens;

a K_V 549 _PDF_VCI_ 3002 F 27 _ 47 step for enabling NC detection of GATECNT-GATE via opens;

a K_V 549 _PDF_VCI_ 3003 E 27 _ 62 step for enabling NC detection of GATECNT-GATE via opens;

a K_V 549 _PDF_VCI_ 3003 F 27 _ 63 step for enabling NC detection of GATECNT-GATE via opens;

a K_V 549 _PDF_VCI_ 3004 E 27 _ 78 step for enabling NC detection of GATECNT-GATE via opens;

a K_V 549 _PDF_VCI_ 3005 D 27 _ 93 step for enabling NC detection of GATECNT-GATE via opens;

a K_V 549 _PDF_VCI_ 2000101 _ 01 step for enabling NC detection of GATECNT-GATE via opens;

a K_V 549 _PDF_VCI_ 2001101 _ 17 step for enabling NC detection of GATECNT-GATE via opens;

a K_V 549 _PDF_VCI_ 2002101 _ 33 step for enabling NC detection of GATECNT-GATE via opens;

a K_V 549 _PDF_VCI_ 2001003 _ 16 step for enabling NC detection of GATECNT-GATE via opens;

a K_V 549 _PDF_VCI_ 2000103 _ 01 step for enabling NC detection of GATECNT-GATE via opens;

a K_V 549 _PDF_VCI_ 2001 F 03 _ 31 step for enabling NC detection of GATECNT-GATE via opens;

a K_V 549 _PDF_VCI_ 20001 C 3 _ 01 step for enabling NC detection of GATECNT-GATE via opens;

a K_V 549 _PDF_VCI_ 2000 AC 3 _ 10 step for enabling NC detection of GATECNT-GATE via opens;

a K_V 549 _PDF_VCI_ 20013 C 3 _ 19 step for enabling NC detection of GATECNT-GATE via opens;

a K_V 549 _PDF_VCI_ 20001 C 4 _ 01 step for enabling NC detection of GATECNT-GATE via opens;

a K_V 549 _PDF_VCI_ 2000 AC 4 _ 10 step for enabling NC detection of GATECNT-GATE via opens;

a K_V 549 _PDF_VCI_ 20013 C 4 _ 19 step for enabling NC detection of GATECNT-GATE via opens;

a K_V 549 _PDF_VCI_ 20001 C 5 _ 01 step for enabling NC detection of GATECNT-GATE via opens;

a K_V 549 _PDF_VCI_ 2000 AC 5 _ 10 step for enabling NC detection of GATECNT-GATE via opens;

a K_V 549 _PDF_VCI_ 20013 C 5 _ 19 step for enabling NC detection of GATECNT-GATE via opens;

a K_V 549 _PDF_VCI_ 2000194 _ 01 step for enabling NC detection of GATECNT-GATE via opens;

a K_V 549 _PDF_VCI_ 2001794 _ 23 step for enabling NC detection of GATECNT-GATE via opens;

a K_V 549 _PDF_VCI_ 2002 D 94 _ 45 step for enabling NC detection of GATECNT-GATE via opens;

a K_V 549 _PDF_VCI_ 3000136 _ 01 step for enabling NC detection of GATECNT-GATE via opens;

a K_V 549 _PDF_VCI_ 3000 D 36 _ 13 step for enabling NC detection of GATECNT-GATE via opens;

a K_V 549 _PDF_VCI_ 3001936 _ 25 step for enabling NC detection of GATECNT-GATE via opens;

a K_V 549 _PDF_VCI_ 3001 A 36 _ 26 step for enabling NC detection of GATECNT-GATE via opens;

a K_V 549 _PDF_VCI_ 3002636 _ 38 step for enabling NC detection of GATECNT-GATE via opens;

a K_V 549 _PDF_VCI_ 3003236 _ 50 step for enabling NC detection of GATECNT-GATE via opens;

a K_V 549 _PDF_VCI_ 3003336 _ 51 step for enabling NC detection of GATECNT-GATE via opens;

a K_V 549 _PDF_VCI_ 3003 F 36 _ 63 step for enabling NC detection of GATECNT-GATE via opens;

a K_V 549 _PDF_VCI_ 3004 B 36 _ 75 step for enabling NC detection of GATECNT-GATE via opens;

a K_V 549 _PDF_VCI_ 3004 C 36 _ 76 step for enabling NC detection of GATECNT-GATE via opens;

a K_V 549 _PDF_VCI_ 3005836 _ 88 step for enabling NC detection of GATECNT-GATE via opens;

a K_V 549 _PDF_VCI_ 3006436 _ 100 step for enabling NC detection of GATECNT-GATE via opens;

a K_V 549 _PDF_VCI_ 3000137 _ 01 step for enabling NC detection of GATECNT-GATE via opens;

a K_V 549 _PDF_VCI_ 3000 D 37 _ 13 step for enabling NC detection of GATECNT-GATE via opens;

a K_V 549 _PDF_VCI_ 3001937 _ 25 step for enabling NC detection of GATECNT-GATE via opens;

a K_V 549 _PDF_VCI_ 3001 A 37 _ 26 step for enabling NC detection of GATECNT-GATE via opens;

a K_V 549 _PDF_VCI_ 3002637 _ 38 step for enabling NC detection of GATECNT-GATE via opens;

a K_V 549 _PDF_VCI_ 3003237 _ 50 step for enabling NC detection of GATECNT-GATE via opens;

a K_V 549 _PDF_VCI_ 3003337 _ 51 step for enabling NC detection of GATECNT-GATE via opens;

a K_V 549 _PDF_VCI_ 3003 F 37 _ 63 step for enabling NC detection of GATECNT-GATE via opens;

a K_V 549 _PDF_VCI_ 3004 B 37 _ 75 step for enabling NC detection of GATECNT-GATE via opens;

a K_V 549 _PDF_VCI_ 3004 C 37 _ 76 step for enabling NC detection of GATECNT-GATE via opens;

a K_V 549 _PDF_VCI_ 3005837 _ 88 step for enabling NC detection of GATECNT-GATE via opens;

a K_V 549 _PDF_VCI_ 3006437 _ 100 step for enabling NC detection of GATECNT-GATE via opens;

a K_V 549 _PDF_VCI_ 20001 A 8 _ 01 step for enabling NC detection of GATECNT-GATE via opens;

a K_V 549 _PDF_VCI_ 20017 A 8 _ 23 step for enabling NC detection of GATECNT-GATE via opens;

a K_V 549 _PDF_VCI_ 20018 A 8 _ 24 step for enabling NC detection of GATECNT-GATE via opens; and,

a K_V 549 _PDF_VCI_ 2002 EA 8 _ 46 step for enabling NC detection of GATECNT-GATE via opens.

26. A method for making ICs, as defined in claim 16 , wherein the first and second steps for enabling NC detection of GATECNT-GATE via opens are both selected from the list consisting of:

a L_V 54 C_B_PDF_VCI_ 100012 E_ 01 step for enabling NC detection of GATECNT-GATE via opens;

a L_V 54 C_B_PDF_VCI_ 100172 E_ 23 step for enabling NC detection of GATECNT-GATE via opens;

a L_V 54 C_B_PDF_VCI_ 100012 C_ 01 step for enabling NC detection of GATECNT-GATE via opens;

a L_V 54 C_B_PDF_VCI_ 100242 C_ 36 step for enabling NC detection of GATECNT-GATE via opens;

a L_V 54 C_B_PDF_VCI_ 100472 C_ 71 step for enabling NC detection of GATECNT-GATE via opens;

a L_V 54 C_M_PDF_VCI_ 300012 B_ 01 step for enabling NC detection of GATECNT-GATE via opens;

a L_V 54 C_M_PDF_VCI_ 300102 B_ 16 step for enabling NC detection of GATECNT-GATE via opens;

a L_V 54 C_M_PDF_VCI_ 3001 F 2 B_ 31 step for enabling NC detection of GATECNT-GATE via opens;

a L_V 54 C_M_PDF_VCI_ 300012 C_ 01 step for enabling NC detection of GATECNT-GATE via opens;

a L_V 54 C_M_PDF_VCI_ 300102 C_ 16 step for enabling NC detection of GATECNT-GATE via opens;

a L_V 54 C_M_PDF_VCI_ 3001 F 2 C_ 31 step for enabling NC detection of GATECNT-GATE via opens;

a L_V 54 C_M_PDF_VCI_ 3000127 _ 01 step for enabling NC detection of GATECNT-GATE via opens;

a L_V 54 C_M_PDF_VCI_ 3001027 _ 16 step for enabling NC detection of GATECNT-GATE via opens;

a L_V 54 C_M_PDF_VCI_ 3001 F 27 _ 31 step for enabling NC detection of GATECNT-GATE via opens;

a L_V 54 C_M_PDF_VCI_ 3002027 _ 32 step for enabling NC detection of GATECNT-GATE via opens;

a L_V 54 C_M_PDF_VCI_ 3002 F 27 _ 47 step for enabling NC detection of GATECNT-GATE via opens;

a L_V 54 C_M_PDF_VCI_ 3003 E 27 _ 62 step for enabling NC detection of GATECNT-GATE via opens;

a L_V 54 C_M_PDF_VCI_ 3003 F 27 _ 63 step for enabling NC detection of GATECNT-GATE via opens;

a L_V 54 C_M_PDF_VCI_ 3004 E 27 _ 78 step for enabling NC detection of GATECNT-GATE via opens;

a L_V 54 C_M_PDF_VCI_ 3005 D 27 _ 93 step for enabling NC detection of GATECNT-GATE via opens;

a L_V 54 C_M_PDF_VCI_ 3000128 _ 01 step for enabling NC detection of GATECNT-GATE via opens;

a L_V 54 C_M_PDF_VCI_ 3001028 _ 16 step for enabling NC detection of GATECNT-GATE via opens;

a L_V 54 C_M_PDF_VCI_ 3001 F 28 _ 31 step for enabling NC detection of GATECNT-GATE via opens;

a L_V 54 C_M_PDF_VCI_ 3002028 _ 32 step for enabling NC detection of GATECNT-GATE via opens;

a L_V 54 C_M_PDF_VCI_ 3002 F 28 _ 47 step for enabling NC detection of GATECNT-GATE via opens;

a L_V 54 C_M_PDF_VCI_ 3003 E 28 _ 62 step for enabling NC detection of GATECNT-GATE via opens;

a L_V 54 C_M_PDF_VCI_ 3000136 _ 01 step for enabling NC detection of GATECNT-GATE via opens;

a L_V 54 C_M_PDF_VCI_ 3000 D 36 _ 13 step for enabling NC detection of GATECNT-GATE via opens;

a L_V 54 C_M_PDF_VCI_ 3001936 _ 25 step for enabling NC detection of GATECNT-GATE via opens;

a L_V 54 C_M_PDF_VCI_ 3001 A 36 _ 26 step for enabling NC detection of GATECNT-GATE via opens;

a L_V 54 C_M_PDF_VCI_ 3002636 _ 38 step for enabling NC detection of GATECNT-GATE via opens;

a L_V 54 C_M_PDF_VCI_ 3003236 _ 50 step for enabling NC detection of GATECNT-GATE via opens;

a L_V 54 C_M_PDF_VCI_ 3003336 _ 51 step for enabling NC detection of GATECNT-GATE via opens;

a L_V 54 C_M_PDF_VCI_ 3003 F 36 _ 63 step for enabling NC detection of GATECNT-GATE via opens;

a L_V 54 C_M_PDF_VCI_ 3004 B 36 _ 75 step for enabling NC detection of GATECNT-GATE via opens;

a L_V 54 C_M_PDF_VCI_ 3004 C 36 _ 76 step for enabling NC detection of GATECNT-GATE via opens;

a L_V 54 C_M_PDF_VCI_ 3005836 _ 88 step for enabling NC detection of GATECNT-GATE via opens;

a L_V 54 C_M_PDF_VCI_ 3006436 _ 100 step for enabling NC detection of GATECNT-GATE via opens;

a L_V 54 C_M_PDF_VCI_ 2000100 _ 01 step for enabling NC detection of GATECNT-GATE via opens;

a L_V 54 C_M_PDF_VCI_ 2001000 _ 16 step for enabling NC detection of GATECNT-GATE via opens;

a L_V 54 C_M_PDF_VCI_ 2001 F 00 _ 31 step for enabling NC detection of GATECNT-GATE via opens;

a L_V 54 C_M_PDF_VCI_ 2000101 _ 01 step for enabling NC detection of GATECNT-GATE via opens;

a L_V 54 C_M_PDF_VCI_ 2000601 _ 06 step for enabling NC detection of GATECNT-GATE via opens;

a L_V 54 C_M_PDF_VCI_ 2000 B 01 _ 11 step for enabling NC detection of GATECNT-GATE via opens;

a L_V 54 C_M_PDF_VCI_ 2000103 _ 01 step for enabling NC detection of GATECNT-GATE via opens;

a L_V 54 C_M_PDF_VCI_ 2001003 _ 16 step for enabling NC detection of GATECNT-GATE via opens;

a L_V 54 C_M_PDF_VCI_ 2001 F 03 _ 31 step for enabling NC detection of GATECNT-GATE via opens;

a L_V 54 C_M_PDF_VCI_ 20001 A 8 _ 01 step for enabling NC detection of GATECNT-GATE via opens;

a L_V 54 C_M_PDF_VCI_ 20017 A 8 _ 23 step for enabling NC detection of GATECNT-GATE via opens;

a L_V 54 C_M_PDF_VCI_ 20018 A 8 _ 24 step for enabling NC detection of GATECNT-GATE via opens;

a L_V 54 C_M_PDF_VCI_ 2002 EA 8 _ 46 step for enabling NC detection of GATECNT-GATE via opens;

a L_V 54 C_M_PDF_VCI_ 20001 C 3 _ 01 step for enabling NC detection of GATECNT-GATE via opens;

a L_V 54 C_M_PDF_VCI_ 2000 AC 3 _ 10 step for enabling NC detection of GATECNT-GATE via opens;

a L_V 54 C_M_PDF_VCI_ 20013 C 3 _ 19 step for enabling NC detection of GATECNT-GATE via opens;

a L_V 54 C_M_PDF_VCI_ 20001 C 4 _ 01 step for enabling NC detection of GATECNT-GATE via opens;

a L_V 54 C_M_PDF_VCI_ 2000 AC 4 _ 10 step for enabling NC detection of GATECNT-GATE via opens;

a L_V 54 C_M_PDF_VCI_ 20013 C 4 _ 19 step for enabling NC detection of GATECNT-GATE via opens;

a L_V 54 C_M_PDF_VCI_ 20001 C 5 _ 01 step for enabling NC detection of GATECNT-GATE via opens;

a L_V 54 C_M_PDF_VCI_ 2000 AC 5 _ 10 step for enabling NC detection of GATECNT-GATE via opens; and,

a L_V 54 C_M_PDF_VCI_ 20013 C 5 _ 19 step for enabling NC detection of GATECNT-GATE via opens.

27. A method for making ICs, as defined in claim 16 , wherein the first and second steps for enabling NC detection of GATECNT-GATE via opens are both selected from the list consisting of:

a M_V 54 B_PDF_VCI_ 100012 E_ 01 step for enabling NC detection of GATECNT-GATE via opens;

a M_V 54 B_PDF_VCI_ 100172 E_ 23 step for enabling NC detection of GATECNT-GATE via opens; and,

a M_V 54 B_PDF_VCI_ 100182 E_ 24 step for enabling NC detection of GATECNT-GATE via opens.

28. A method for making ICs, as defined in claim 1 , wherein step (a) further includes patterning at least three additional fill cells selected from the list consisting of:

AA-tip-to-tip-short-configured, NCEM-enabled fill cells;

AACNT-tip-to-tip-short-configured, NCEM-enabled fill cells;

AACNT-AA-tip-to-tip-short-configured, NCEM-enabled fill cells;

TS-tip-to-tip-short-configured, NCEM-enabled fill cells;

GATE-tip-to-tip-short-configured, NCEM-enabled fill cells;

GATECNT-GATE-tip-to-tip-short-configured, NCEM-enabled fill cells;

GATECNT-tip-to-tip-short-configured, NCEM-enabled fill cells;

GATECNT-AACNT-tip-to-tip-short-configured, NCEM-enabled fill cells;

M 1 -tip-to-tip-short-configured, NCEM-enabled fill cells;

V 0 -tip-to-tip-short-configured, NCEM-enabled fill cells;

M 1 -V 0 -tip-to-tip-short-configured, NCEM-enabled fill cells;

V 1 -M 1 -tip-to-tip-short-configured, NCEM-enabled fill cells;

V 1 -tip-to-tip-short-configured, NCEM-enabled fill cells;

M 2 -tip-to-tip-short-configured, NCEM-enabled fill cells;

M 2 -V 1 -tip-to-tip-short-configured, NCEM-enabled fill cells;

V 2 -M 2 -tip-to-tip-short-configured, NCEM-enabled fill cells;

M 3 -tip-to-tip-short-configured, NCEM-enabled fill cells;

V 2 -tip-to-tip-short-configured, NCEM-enabled fill cells;

M 3 -V 2 -tip-to-tip-short-configured, NCEM-enabled fill cells;

AA-tip-to-side-short-configured, NCEM-enabled fill cells;

AACNT-tip-to-side-short-configured, NCEM-enabled fill cells;

AACNT-AA-tip-to-side-short-configured, NCEM-enabled fill cells;

GATE-AA-tip-to-side-short-configured, NCEM-enabled fill cells;

GATECNT-GATE-tip-to-side-short-configured, NCEM-enabled fill cells;

GATECNT-tip-to-side-short-configured, NCEM-enabled fill cells;

TS-GATECNT-tip-to-side-short-configured, NCEM-enabled fill cells;

GATECNT-AACNT-tip-to-side-short-configured, NCEM-enabled fill cells;

M 1 -tip-to-side-short-configured, NCEM-enabled fill cells;

V 0 -tip-to-side-short-configured, NCEM-enabled fill cells;

M 1 -V 0 -tip-to-side-short-configured, NCEM-enabled fill cells;

V 1 -M 1 -tip-to-side-short-configured, NCEM-enabled fill cells;

V 1 -tip-to-side-short-configured, NCEM-enabled fill cells;

M 2 -tip-to-side-short-configured, NCEM-enabled fill cells;

M 2 -V 1 -tip-to-side-short-configured, NCEM-enabled fill cells;

V 2 -M 2 -tip-to-side-short-configured, NCEM-enabled fill cells;

M 3 -tip-to-side-short-configured, NCEM-enabled fill cells;

V 2 -tip-to-side-short-configured, NCEM-enabled fill cells;

M 3 -V 2 -tip-to-side-short-configured, NCEM-enabled fill cells;

AA-side-to-side-short-configured, NCEM-enabled fill cells;

AACNT-side-to-side-short-configured, NCEM-enabled fill cells;

AACNT-AA-side-to-side-short-configured, NCEM-enabled fill cells;

AACNT-GATE-side-to-side-short-configured, NCEM-enabled fill cells;

GATE-side-to-side-short-configured, NCEM-enabled fill cells;

GATECNT-GATE-side-to-side-short-configured, NCEM-enabled fill cells;

TS-GATE-side-to-side-short-configured, NCEM-enabled fill cells;

GATECNT-side-to-side-short-configured, NCEM-enabled fill cells;

GATECNT-AACNT-side-to-side-short-configured, NCEM-enabled fill cells;

M 1 -side-to-side-short-configured, NCEM-enabled fill cells;

V 0 -side-to-side-short-configured, NCEM-enabled fill cells;

M 1 -V 0 -side-to-side-short-configured, NCEM-enabled fill cells;

V 1 -M 1 -side-to-side-short-configured, NCEM-enabled fill cells;

V 1 -side-to-side-short-configured, NCEM-enabled fill cells;

M 2 -side-to-side-short-configured, NCEM-enabled fill cells;

M 2 -V 1 -side-to-side-short-configured, NCEM-enabled fill cells;

V 2 -M 2 -side-to-side-short-configured, NCEM-enabled fill cells;

M 3 -side-to-side-short-configured, NCEM-enabled fill cells;

V 2 -side-to-side-short-configured, NCEM-enabled fill cells;

M 3 -V 2 -side-to-side-short-configured, NCEM-enabled fill cells;

AA-L-shape-interlayer-short-configured, NCEM-enabled fill cells;

AACNT-L-shape-interlayer-short-configured, NCEM-enabled fill cells;

AACNT-AA-L-shape-interlayer-short-configured, NCEM-enabled fill cells;

GATE-AA-L-shape-interlayer-short-configured, NCEM-enabled fill cells;

GATE-TS-L-shape-interlayer-short-configured, NCEM-enabled fill cells;

GATECNT-GATE-L-shape-interlayer-short-configured, NCEM-enabled fill cells;

GATECNT-AA-L-shape-interlayer-short-configured, NCEM-enabled fill cells;

GATECNT-TS-L-shape-interlayer-short-configured, NCEM-enabled fill cells;

GATECNT-AACNT-L-shape-interlayer-short-configured, NCEM-enabled fill cells;

V 0 -AA-L-shape-interlayer-short-configured, NCEM-enabled fill cells;

V 0 -TS-L-shape-interlayer-short-configured, NCEM-enabled fill cells;

V 0 -AACNT-L-shape-interlayer-short-configured, NCEM-enabled fill cells;

V 0 -GATE-L-shape-interlayer-short-configured, NCEM-enabled fill cells;

V 0 -GATECNT-L-shape-interlayer-short-configured, NCEM-enabled fill cells;

M 1 -AACNT-L-shape-interlayer-short-configured, NCEM-enabled fill cells;

M 1 -GATECNT-L-shape-interlayer-short-configured, NCEM-enabled fill cells;

M 1 -V 0 -L-shape-interlayer-short-configured, NCEM-enabled fill cells;

V 1 -M 1 -L-shape-interlayer-short-configured, NCEM-enabled fill cells;

V 1 -V 0 -L-shape-interlayer-short-configured, NCEM-enabled fill cells;

M 2 -M 1 -L-shape-interlayer-short-configured, NCEM-enabled fill cells;

M 2 -V 1 -L-shape-interlayer-short-configured, NCEM-enabled fill cells;

V 2 -V 1 -L-shape-interlayer-short-configured, NCEM-enabled fill cells;

V 2 -M 2 -L-shape-interlayer-short-configured, NCEM-enabled fill cells;

M 3 -M 2 -L-shape-interlayer-short-configured, NCEM-enabled fill cells;

M 3 -V 2 -L-shape-interlayer-short-configured, NCEM-enabled fill cells;

AA-diagonal-short-configured, NCEM-enabled fill cells;

TS-diagonal-short-configured, NCEM-enabled fill cells;

AACNT-diagonal-short-configured, NCEM-enabled fill cells;

AACNT-AA-diagonal-short-configured, NCEM-enabled fill cells;

GATE-diagonal-short-configured, NCEM-enabled fill cells;

GATE-AACNT-diagonal-short-configured, NCEM-enabled fill cells;

GATECNT-GATE-diagonal-short-configured, NCEM-enabled fill cells;

GATECNT-diagonal-short-configured, NCEM-enabled fill cells;

GATECNT-AACNT-diagonal-short-configured, NCEM-enabled fill cells;

M 1 -diagonal-short-configured, NCEM-enabled fill cells;

V 0 -diagonal-short-configured, NCEM-enabled fill cells;

M 1 -V 0 -diagonal-short-configured, NCEM-enabled fill cells;

V 1 -M 1 -diagonal-short-configured, NCEM-enabled fill cells;

V 1 -diagonal-short-configured, NCEM-enabled fill cells;

M 2 -diagonal-short-configured, NCEM-enabled fill cells;

M 2 -V 1 -diagonal-short-configured, NCEM-enabled fill cells;

M 3 -diagonal-short-configured, NCEM-enabled fill cells;

V 2 -M 2 -diagonal-short-configured, NCEM-enabled fill cells;

V 2 -diagonal-short-configured, NCEM-enabled fill cells;

M 3 -V 2 -diagonal-short-configured, NCEM-enabled fill cells;

AA-corner-short-configured, NCEM-enabled fill cells;

AACNT-corner-short-configured, NCEM-enabled fill cells;

AACNT-AA-corner-short-configured, NCEM-enabled fill cells;

GATE-corner-short-configured, NCEM-enabled fill cells;

GATECNT-GATE-corner-short-configured, NCEM-enabled fill cells;

GATECNT-TS-corner-short-configured, NCEM-enabled fill cells;

GATECNT-corner-short-configured, NCEM-enabled fill cells;

GATECNT-AACNT-corner-short-configured, NCEM-enabled fill cells;

M 1 -corner-short-configured, NCEM-enabled fill cells;

V 0 -corner-short-configured, NCEM-enabled fill cells;

M 1 -V 0 -corner-short-configured, NCEM-enabled fill cells;

V 1 -M 1 -corner-short-configured, NCEM-enabled fill cells;

V 1 -corner-short-configured, NCEM-enabled fill cells;

M 2 -corner-short-configured, NCEM-enabled fill cells;

M 2 -V 1 -corner-short-configured, NCEM-enabled fill cells;

M 3 -corner-short-configured, NCEM-enabled fill cells;

V 2 -M 2 -corner-short-configured, NCEM-enabled fill cells;

V 2 -corner-short-configured, NCEM-enabled fill cells;

M 3 -V 2 -corner-short-configured, NCEM-enabled fill cells;

GATE-AA-interlayer-overlap-short-configured, NCEM-enabled fill cells;

GATE-AACNT-interlayer-overlap-short-configured, NCEM-enabled fill cells;

GATE-TS-interlayer-overlap-short-configured, NCEM-enabled fill cells;

GATECNT-TS-interlayer-overlap-short-configured, NCEM-enabled fill cells;

GATECNT-AA-interlayer-overlap-short-configured, NCEM-enabled fill cells;

V 0 -AA-interlayer-overlap-short-configured, NCEM-enabled fill cells;

V 0 -AACNT-interlayer-overlap-short-configured, NCEM-enabled fill cells;

V 0 -TS-interlayer-overlap-short-configured, NCEM-enabled fill cells;

V 0 -GATE-interlayer-overlap-short-configured, NCEM-enabled fill cells;

M 1 -GATECNT-interlayer-overlap-short-configured, NCEM-enabled fill cells;

M 1 -AACNT-interlayer-overlap-short-configured, NCEM-enabled fill cells;

V 1 -V 0 -interlayer-overlap-short-configured, NCEM-enabled fill cells;

M 2 -M 1 -interlayer-overlap-short-configured, NCEM-enabled fill cells;

V 2 -V 1 -interlayer-overlap-short-configured, NCEM-enabled fill cells;

M 3 -M 2 -interlayer-overlap-short-configured, NCEM-enabled fill cells;

V 0 -GATECNT-via-chamfer-short-configured, NCEM-enabled fill cells;

V 0 -AACNT-via-chamfer-short-configured, NCEM-enabled fill cells;

V 1 -M 1 -via-chamfer-short-configured, NCEM-enabled fill cells;

V 2 -M 2 -via-chamfer-short-configured, NCEM-enabled fill cells;

V 0 -merged-via-short-configured, NCEM-enabled fill cells;

V 1 -merged-via-short-configured, NCEM-enabled fill cells;

V 2 -merged-via-short-configured, NCEM-enabled fill cells;

AA-snake-open-configured, NCEM-enabled fill cells;

TS-snake-open-configured, NCEM-enabled fill cells;

AACNT-snake-open-configured, NCEM-enabled fill cells;

GATE-snake-open-configured, NCEM-enabled fill cells;

GATECNT-snake-open-configured, NCEM-enabled fill cells;

V 0 -snake-open-configured, NCEM-enabled fill cells;

M 1 -snake-open-configured, NCEM-enabled fill cells;

V 1 -snake-open-configured, NCEM-enabled fill cells;

M 2 -snake-open-configured, NCEM-enabled fill cells;

V 2 -snake-open-configured, NCEM-enabled fill cells;

M 3 -snake-open-configured, NCEM-enabled fill cells;

AA-stitch-open-configured, NCEM-enabled fill cells;

TS-stitch-open-configured, NCEM-enabled fill cells;

AACNT-stitch-open-configured, NCEM-enabled fill cells;

GATECNT-stitch-open-configured, NCEM-enabled fill cells;

V 0 -stitch-open-configured, NCEM-enabled fill cells;

M 1 -stitch-open-configured, NCEM-enabled fill cells;

V 1 -stitch-open-configured, NCEM-enabled fill cells;

M 2 -stitch-open-configured, NCEM-enabled fill cells;

V 2 -stitch-open-configured, NCEM-enabled fill cells;

M 3 -stitch-open-configured, NCEM-enabled fill cells;

AACNT-TS-via-open-configured, NCEM-enabled fill cells;

AACNT-AA-via-open-configured, NCEM-enabled fill cells;

TS-AA-via-open-configured, NCEM-enabled fill cells;

V 0 -GATECNT-via-open-configured, NCEM-enabled fill cells;

V 0 -AA-via-open-configured, NCEM-enabled fill cells;

V 0 -TS-via-open-configured, NCEM-enabled fill cells;

V 0 -AACNT-via-open-configured, NCEM-enabled fill cells;

V 0 -GATE-via-open-configured, NCEM-enabled fill cells;

V 0 -via-open-configured, NCEM-enabled fill cells;

M 1 -V 0 -via-open-configured, NCEM-enabled fill cells;

V 1 -M 1 -via-open-configured, NCEM-enabled fill cells;

V 1 -M 2 -via-open-configured, NCEM-enabled fill cells;

M 1 -GATECNT-via-open-configured, NCEM-enabled fill cells;

M 1 -AANCT-via-open-configured, NCEM-enabled fill cells;

V 2 -M 2 -via-open-configured, NCEM-enabled fill cells;

V 2 -M 3 -via-open-configured, NCEM-enabled fill cells;

M 1 -metal-island-open-configured, NCEM-enabled fill cells;

M 2 -metal-island-open-configured, NCEM-enabled fill cells;

M 3 -metal-island-open-configured, NCEM-enabled fill cells;

V 0 -merged-via-open-configured, NCEM-enabled fill cells;

V 0 -AACNT-merged-via-open-configured, NCEM-enabled fill cells;

V 0 -GATECNT-merged-via-open-configured, NCEM-enabled fill cells;

V 1 -merged-via-open-configured, NCEM-enabled fill cells;

V 2 -merged-via-open-configured, NCEM-enabled fill cells;

V 1 -M 1 -merged-via-open-configured, NCEM-enabled fill cells; and,

V 2 -M 2 -merged-via-open-configured, NCEM-enabled fill cells.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Oct 10, 2016
From: LAM, STEPHEN; CIPLICKAS, DENNIS; BROZEK, TOMASZ; CHENG, JEREMY; COMENSOLI, SIMONE; DE, INDRANIL; DOONG, KELVIN; EISENMANN, HANS; FISCUS, TIMOTHY; HAIGH, JONATHAN; HESS, CHRISTOPHER; KIBARIAN, JOHN; LEE, SHERRY; LIAO, MARCI; LIN, SHENG-CHE; MATSUHASHI, HIDEKI; MICHAELS, KIMON; O'SULLIVAN, CONOR; RAUSCHER, MARKUS; ROVNER, VYACHESLAV; STROJWAS, ANDRZEJ; STROJWAS, MARCIN; TAYLOR, CARL; VALLISHAYEE, RAKESH; WEILAND, LARG; YOKOYAMA, NOBUHARU
To: PDF SOLUTIONS, INC.
Reel/Frame 039975/0427 →
Continuity (4)
Continuation 15090256 · Apr 4, 2016
Continuation 15090267 · Apr 4, 2016
Continuation 15090274 · Apr 4, 2016
Provisional Application 62268463 · Dec 16, 2015