IP Library › Granted Patent US 9,870,966
Granted Patent B1
US 9,870,966 · App. 15/281,508 · Granted Jan 16, 2018

Process for making semiconductor dies, chips and wafers using non-contact measurements obtained from DOEs of NCEM-enabled fill cells on test wafers that include multiple means/steps for enabling NC detection of AACNT-TS via opens

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Quick Facts
Patent No.
US 9,870,966
App. No.
15/281,508
Granted
Jan 16, 2018
Kind
B1
Abstract

Improved processes for manufacturing semiconductor wafers, chips, or dies utilize in-line data obtained from non-contact electrical measurements (“NCEM”) of fill cells that contain structures configured to target/expose a variety of open-circuit, short-circuit, leakage, and/or excessive resistance failure modes. Such processes include evaluating one or more Designs of Experiments (“DOEs”), each comprised of multiple NCEM-enabled fill cells, in at least two variants, targeted to the same failure mode. Such DOEs include multiple means/steps for enabling non-contact (NC) detection of AACNT-TS via opens.

Claims (267)

1. A method for making integrated circuits (ICs), comprising at least:

(a) performing initial processing steps to produce a test wafer that includes a first Design of Experiments (DOE) of Non-Contact Electrical Measurement (NCEM)-enabled, source/drain contact (AACNT)-source/drain silicide (TS)-via-open-configured fill cells, said initial processing steps including:

(i) patterning, on the test wafer, a first means for enabling NC detection of AACNT-TS via opens; and,

(ii) patterning, on the test wafer, a second means for enabling NC detection of AACNT-TS via opens;

wherein the first and second means for enabling NC detection of AACNT-TS via opens are different;

(b) determining a presence or absence of AACNT-TS via opens on the test wafer by:

performing a voltage contrast examination of NCEM-enabled fill cells in the first DOE, including at least the first and second means for enabling NC detection of AACNT-TS via opens; and,

(c) using the results from step (b) to select NCEM-enabled fill cells for inclusion on a subsequent product wafer.

2. A method for making ICs, as defined in claim 1 ,

wherein step (c) includes:

selecting, for inclusion on the product wafer, a plurality of NCEM-enabled, AACNT-TS-via-open-configured fill cells, if step (b) indicated a presence of any AACNT-TS via opens.

3. A method for making ICs, as defined in claim 1 ,

wherein step (c) includes:

omitting, from inclusion on the product wafer, any NCEM-enabled, AACNT-TS-via-open-configured fill cells, if step (b) indicated an absence of any AACNT-TS via opens.

4. A method for making ICs, as defined in claim 1 , wherein the first and second means for enabling NC detection of AACNT-TS via opens are both selected from the list consisting of:

a D_PDF_VCI_VFILLE_12S02_0053_1 means for enabling NC detection of AACNT-TS via opens;

a D_PDF_VCI_VFILLE_12S02_0051_1 means for enabling NC detection of AACNT-TS via opens; and,

a D_PDF_VCI_VFILLE_12S02_0050_1 means for enabling NC detection of AACNT-TS via opens.

5. A method for making ICs, as defined in claim 1 , wherein the first and second means for enabling NC detection of AACNT-TS via opens are both selected from the list consisting of:

a D_PDF_VCI_VFILL4_12S01_0094_1 means for enabling NC detection of AACNT-TS via opens;

a D_PDF_VCI_VFILL4_12S01_0015_1 means for enabling NC detection of AACNT-TS via opens;

a E_PDF_VCI_FILL8_17S1_0033_1 means for enabling NC detection of AACNT-TS via opens;

a E_PDF_VCI_FILL8_17S1_0029_1 means for enabling NC detection of AACNT-TS via opens;

a F_PDF_VCI_FILL64_24S1_0082_1 means for enabling NC detection of AACNT-TS via opens;

a F_PDF_VCI_FILL64_24S1_0081_1 means for enabling NC detection of AACNT-TS via opens;

a F_PDF_VCI_FILL08_24S1_0079_1 means for enabling NC detection of AACNT-TS via opens;

a F_PDF_VCI_FILL08_24S1_0078_1 means for enabling NC detection of AACNT-TS via opens;

a F_PDF_VCI_FILL32_24S1_0079_1 means for enabling NC detection of AACNT-TS via opens;

a F_PDF_VCI_FILL32_24S1_0078_1 means for enabling NC detection of AACNT-TS via opens;

a F_PDF_VCI_FILL16_24S1_0038_1 means for enabling NC detection of AACNT-TS via opens;

a F_PDF_VCI_FILL16_24S1_0037_1 means for enabling NC detection of AACNT-TS via opens;

a I_V421_VCI_20S3000122_001 means for enabling NC detection of AACNT-TS via opens;

a J_PDF_VCI_VFILLCV4_7S210_0038_1 means for enabling NC detection of AACNT-TS via opens;

a J_PDF_VCI_VFILLCV4_7S210_0020_1 means for enabling NC detection of AACNT-TS via opens;

a J_PDF_VCI_VFILLCV4_7S210_0019_1 means for enabling NC detection of AACNT-TS via opens;

a J_PDF_VCI_VFILLCV4_7S210_0001_1 means for enabling NC detection of AACNT-TS via opens;

a K_V549_PDF_VCI_3000121_01 means for enabling NC detection of AACNT-TS via opens;

a K_V549_PDF_VCI_3000D21_13 means for enabling NC detection of AACNT-TS via opens; and,

a K_V549_PDF_VCI_3001921_25 means for enabling NC detection of AACNT-TS via opens.

6. A method for making ICs, as defined in claim 1 , wherein the first and second means for enabling NC detection of AACNT-TS via opens are both selected from the list consisting of:

a K_V549_PDF_VCI_3001A21_26 means for enabling NC detection of AACNT-TS via opens;

a K_V549_PDF_VCI_3002221_34 means for enabling NC detection of AACNT-TS via opens; and,

a K_V549_PDF_VCI_3002A21_42 means for enabling NC detection of AACNT-TS via opens.

7. A method for making ICs, as defined in claim 1 , wherein the first and second means for enabling NC detection of AACNT-TS via opens are both selected from the list consisting of:

a K_V549_PDF_VCI_3000122_01 means for enabling NC detection of AACNT-TS via opens;

a K_V549_PDF_VCI_3000D22_13 means for enabling NC detection of AACNT-TS via opens; and,

a K_V549_PDF_VCI_3001922_25 means for enabling NC detection of AACNT-TS via opens.

8. A method for making ICs, as defined in claim 1 , wherein the first and second means for enabling NC detection of AACNT-TS via opens are both selected from the list consisting of:

a K_V549_PDF_VCI_3001A22_26 means for enabling NC detection of AACNT-TS via opens;

a K_V549_PDF_VCI_3002222_34 means for enabling NC detection of AACNT-TS via opens; and,

a K_V549_PDF_VCI_3002A22_42 means for enabling NC detection of AACNT-TS via opens.

9. A method for making ICs, as defined in claim 1 , wherein the first and second means for enabling NC detection of AACNT-TS via opens are both selected from the list consisting of:

a L_V54C_M_PDF_VCI_3000122_01 means for enabling NC detection of AACNT-TS via opens;

a L_V54C_M_PDF_VCI_3000D22_13 means for enabling NC detection of AACNT-TS via opens; and,

a L_V54C_M_PDF_VCI_3001922_25 means for enabling NC detection of AACNT-TS via opens.

10. A method for making ICs, as defined in claim 1 , wherein the first and second means for enabling NC detection of AACNT-TS via opens are both selected from the list consisting of:

a L_V54C_M_PDF_VCI_3001A22_26 means for enabling NC detection of AACNT-TS via opens;

a L_V54C_M_PDF_VCI_3002222_34 means for enabling NC detection of AACNT-TS via opens; and,

a L_V54C_M_PDF_VCI_3002A22_42 means for enabling NC detection of AACNT-TS via opens.

11. A method for making ICs, as defined in claim 1 , wherein the first and second means for enabling NC detection of AACNT-TS via opens are both selected from the list consisting of:

a L_V54C_M_PDF_VCI_3000121_01 means for enabling NC detection of AACNT-TS via opens;

a L_V54C_M_PDF_VCI_3000D21_13 means for enabling NC detection of AACNT-TS via opens; and,

a L_V54C_M_PDF_VCI_3001921_25 means for enabling NC detection of AACNT-TS via opens.

12. A method for making ICs, as defined in claim 1 , wherein the first and second means for enabling NC detection of AACNT-TS via opens are both selected from the list consisting of:

a L_V54C_M_PDF_VCI_3001A21_26 means for enabling NC detection of AACNT-TS via opens;

a L_V54C_M_PDF_VCI_3002221_34 means for enabling NC detection of AACNT-TS via opens; and,

a L_V54C_M_PDF_VCI_3002A21_42 means for enabling NC detection of AACNT-TS via opens.

13. A method for making ICs, comprising at least:

(a) performing initial processing steps to produce a test wafer that includes a first DOE of NCEM-enabled, AACNT-TS-via-open-configured fill cells, said initial processing steps including:

(i) patterning, on the test wafer, a first means for enabling NC detection of AACNT-TS via opens; and,

(ii) patterning, on the test wafer, a second means for enabling NC detection of AACNT-TS via opens;

wherein the first and second means for enabling NC detection of AACNT-TS via opens are different;

(b) determining a presence or absence of AACNT-TS via opens on the test wafer by:

performing a voltage contrast examination of NCEM-enabled fill cells in the first DOE, including at least the first and second means for enabling NC detection of AACNT-TS via opens; and,

(c) using the results from step (b) in processing of a subsequent product wafer.

14. A method for making ICs, as defined in claim 1 , wherein step (a) further includes patterning at least three additional fill cells selected from the list consisting of:

AA-tip-to-tip-short-configured, NCEM-enabled fill cells;

AACNT-tip-to-tip-short-configured, NCEM-enabled fill cells;

AACNT-AA-tip-to-tip-short-configured, NCEM-enabled fill cells;

TS-tip-to-tip-short-configured, NCEM-enabled fill cells;

GATE-tip-to-tip-short-configured, NCEM-enabled fill cells;

GATECNT-GATE-tip-to-tip-short-configured, NCEM-enabled fill cells;

GATECNT-tip-to-tip-short-configured, NCEM-enabled fill cells;

GATECNT-AACNT-tip-to-tip-short-configured, NCEM-enabled fill cells;

M1-tip-to-tip-short-configured, NCEM-enabled fill cells;

V0-tip-to-tip-short-configured, NCEM-enabled fill cells;

M1-V0-tip-to-tip-short-configured, NCEM-enabled fill cells;

V1-M1-tip-to-tip-short-configured, NCEM-enabled fill cells;

V1-tip-to-tip-short-configured, NCEM-enabled fill cells;

M2-tip-to-tip-short-configured, NCEM-enabled fill cells;

M2-V1-tip-to-tip-short-configured, NCEM-enabled fill cells;

V2-M2-tip-to-tip-short-configured, NCEM-enabled fill cells;

M3-tip-to-tip-short-configured, NCEM-enabled fill cells;

V2-tip-to-tip-short-configured, NCEM-enabled fill cells;

M3-V2-tip-to-tip-short-configured, NCEM-enabled fill cells;

AA-tip-to-side-short-configured, NCEM-enabled fill cells;

AACNT-tip-to-side-short-configured, NCEM-enabled fill cells;

AACNT-AA-tip-to-side-short-configured, NCEM-enabled fill cells;

GATE-AA-tip-to-side-short-configured, NCEM-enabled fill cells;

GATECNT-GATE-tip-to-side-short-configured, NCEM-enabled fill cells;

GATECNT-tip-to-side-short-configured, NCEM-enabled fill cells;

TS-GATECNT-tip-to-side-short-configured, NCEM-enabled fill cells;

GATECNT-AACNT-tip-to-side-short-configured, NCEM-enabled fill cells;

M1-tip-to-side-short-configured, NCEM-enabled fill cells;

V0-tip-to-side-short-configured, NCEM-enabled fill cells;

M1-V0-tip-to-side-short-configured, NCEM-enabled fill cells;

V1-M1-tip-to-side-short-configured, NCEM-enabled fill cells;

V1-tip-to-side-short-configured, NCEM-enabled fill cells;

M2-tip-to-side-short-configured, NCEM-enabled fill cells;

M2-V1-tip-to-side-short-configured, NCEM-enabled fill cells;

V2-M2-tip-to-side-short-configured, NCEM-enabled fill cells;

M3-tip-to-side-short-configured, NCEM-enabled fill cells;

V2-tip-to-side-short-configured, NCEM-enabled fill cells;

M3-V2-tip-to-side-short-configured, NCEM-enabled fill cells;

AA-side-to-side-short-configured, NCEM-enabled fill cells;

AACNT-side-to-side-short-configured, NCEM-enabled fill cells;

AACNT-AA-side-to-side-short-configured, NCEM-enabled fill cells;

AACNT-GATE-side-to-side-short-configured, NCEM-enabled fill cells;

GATE-side-to-side-short-configured, NCEM-enabled fill cells;

GATECNT-GATE-side-to-side-short-configured, NCEM-enabled fill cells;

TS-GATE-side-to-side-short-configured, NCEM-enabled fill cells;

GATECNT-side-to-side-short-configured, NCEM-enabled fill cells;

GATECNT-AACNT-side-to-side-short-configured, NCEM-enabled fill cells;

M1-side-to-side-short-configured, NCEM-enabled fill cells;

V0-side-to-side-short-configured, NCEM-enabled fill cells;

M1-V0-side-to-side-short-configured, NCEM-enabled fill cells;

V1-M1-side-to-side-short-configured, NCEM-enabled fill cells;

V1-side-to-side-short-configured, NCEM-enabled fill cells;

M2-side-to-side-short-configured, NCEM-enabled fill cells;

M2-V1-side-to-side-short-configured, NCEM-enabled fill cells;

V2-M2-side-to-side-short-configured, NCEM-enabled fill cells;

M3-side-to-side-short-configured, NCEM-enabled fill cells;

V2-side-to-side-short-configured, NCEM-enabled fill cells;

M3-V2-side-to-side-short-configured, NCEM-enabled fill cells;

AA-L-shape-interlayer-short-configured, NCEM-enabled fill cells;

AACNT-L-shape-interlayer-short-configured, NCEM-enabled fill cells;

AACNT-AA-L-shape-interlayer-short-configured, NCEM-enabled fill cells;

GATE-AA-L-shape-interlayer-short-configured, NCEM-enabled fill cells;

GATE-TS-L-shape-interlayer-short-configured, NCEM-enabled fill cells;

GATECNT-GATE-L-shape-interlayer-short-configured, NCEM-enabled fill cells;

GATECNT-AA-L-shape-interlayer-short-configured, NCEM-enabled fill cells;

GATECNT-TS-L-shape-interlayer-short-configured, NCEM-enabled fill cells;

GATECNT-AACNT-L-shape-interlayer-short-configured, NCEM-enabled fill cells;

V0-AA-L-shape-interlayer-short-configured, NCEM-enabled fill cells;

V0-TS-L-shape-interlayer-short-configured, NCEM-enabled fill cells;

V0-AACNT-L-shape-interlayer-short-configured, NCEM-enabled fill cells;

V0-GATE-L-shape-interlayer-short-configured, NCEM-enabled fill cells;

V0-GATECNT-L-shape-interlayer-short-configured, NCEM-enabled fill cells;

M1-AACNT-L-shape-interlayer-short-configured, NCEM-enabled fill cells;

M1-GATECNT-L-shape-interlayer-short-configured, NCEM-enabled fill cells;

M1-V0-L-shape-interlayer-short-configured, NCEM-enabled fill cells;

V1-M1-L-shape-interlayer-short-configured, NCEM-enabled fill cells;

V1-V0-L-shape-interlayer-short-configured, NCEM-enabled fill cells;

M2-M1-L-shape-interlayer-short-configured, NCEM-enabled fill cells;

M2-V1-L-shape-interlayer-short-configured, NCEM-enabled fill cells;

V2-V1-L-shape-interlayer-short-configured, NCEM-enabled fill cells;

V2-M2-L-shape-interlayer-short-configured, NCEM-enabled fill cells;

M3-M2-L-shape-interlayer-short-configured, NCEM-enabled fill cells;

M3-V2-L-shape-interlayer-short-configured, NCEM-enabled fill cells;

AA-diagonal-short-configured, NCEM-enabled fill cells;

TS-diagonal-short-configured, NCEM-enabled fill cells;

AACNT-diagonal-short-configured, NCEM-enabled fill cells;

AACNT-AA-diagonal-short-configured, NCEM-enabled fill cells;

GATE-diagonal-short-configured, NCEM-enabled fill cells;

GATE-AACNT-diagonal-short-configured, NCEM-enabled fill cells;

GATECNT-GATE-diagonal-short-configured, NCEM-enabled fill cells;

GATECNT-diagonal-short-configured, NCEM-enabled fill cells;

GATECNT-AACNT-diagonal-short-configured, NCEM-enabled fill cells;

M1-diagonal-short-configured, NCEM-enabled fill cells;

V0-diagonal-short-configured, NCEM-enabled fill cells;

M1-V0-diagonal-short-configured, NCEM-enabled fill cells;

V1-M1-diagonal-short-configured, NCEM-enabled fill cells;

V1-diagonal-short-configured, NCEM-enabled fill cells;

M2-diagonal-short-configured, NCEM-enabled fill cells;

M2-V1-diagonal-short-configured, NCEM-enabled fill cells;

M3-diagonal-short-configured, NCEM-enabled fill cells;

V2-M2-diagonal-short-configured, NCEM-enabled fill cells;

V2-diagonal-short-configured, NCEM-enabled fill cells;

M3-V2-diagonal-short-configured, NCEM-enabled fill cells;

AA-corner-short-configured, NCEM-enabled fill cells;

AACNT-corner-short-configured, NCEM-enabled fill cells;

AACNT-AA-corner-short-configured, NCEM-enabled fill cells;

GATE-corner-short-configured, NCEM-enabled fill cells;

GATECNT-GATE-corner-short-configured, NCEM-enabled fill cells;

GATECNT-TS-corner-short-configured, NCEM-enabled fill cells;

GATECNT-corner-short-configured, NCEM-enabled fill cells;

GATECNT-AACNT-corner-short-configured, NCEM-enabled fill cells;

M1-corner-short-configured, NCEM-enabled fill cells;

V0-corner-short-configured, NCEM-enabled fill cells;

M1-V0-corner-short-configured, NCEM-enabled fill cells;

V1-M1-corner-short-configured, NCEM-enabled fill cells;

V1-corner-short-configured, NCEM-enabled fill cells;

M2-corner-short-configured, NCEM-enabled fill cells;

M2-V1-corner-short-configured, NCEM-enabled fill cells;

M3-corner-short-configured, NCEM-enabled fill cells;

V2-M2-corner-short-configured, NCEM-enabled fill cells;

V2-corner-short-configured, NCEM-enabled fill cells;

M3-V2-corner-short-configured, NCEM-enabled fill cells;

GATE-AA-interlayer-overlap-short-configured, NCEM-enabled fill cells;

GATE-AACNT-interlayer-overlap-short-configured, NCEM-enabled fill cells;

GATE-TS-interlayer-overlap-short-configured, NCEM-enabled fill cells;

GATECNT-TS-interlayer-overlap-short-configured, NCEM-enabled fill cells;

GATECNT-AA-interlayer-overlap-short-configured, NCEM-enabled fill cells;

V0-AA-interlayer-overlap-short-configured, NCEM-enabled fill cells;

V0-AACNT-interlayer-overlap-short-configured, NCEM-enabled fill cells;

V0-TS-interlayer-overlap-short-configured, NCEM-enabled fill cells;

V0-GATE-interlayer-overlap-short-configured, NCEM-enabled fill cells;

M1-GATECNT-interlayer-overlap-short-configured, NCEM-enabled fill cells;

M1-AACNT-interlayer-overlap-short-configured, NCEM-enabled fill cells;

V1-V0-interlayer-overlap-short-configured, NCEM-enabled fill cells;

M2-M1-interlayer-overlap-short-configured, NCEM-enabled fill cells;

V2-V1-interlayer-overlap-short-configured, NCEM-enabled fill cells;

M3-M2-interlayer-overlap-short-configured, NCEM-enabled fill cells;

V0-GATECNT-via-chamfer-short-configured, NCEM-enabled fill cells;

V0-AACNT-via-chamfer-short-configured, NCEM-enabled fill cells;

V1-M1-via-chamfer-short-configured, NCEM-enabled fill cells;

V2-M2-via-chamfer-short-configured, NCEM-enabled fill cells;

V0-merged-via-short-configured, NCEM-enabled fill cells;

V1-merged-via-short-configured, NCEM-enabled fill cells;

V2-merged-via-short-configured, NCEM-enabled fill cells;

AA-snake-open-configured, NCEM-enabled fill cells;

TS-snake-open-configured, NCEM-enabled fill cells;

AACNT-snake-open-configured, NCEM-enabled fill cells;

GATE-snake-open-configured, NCEM-enabled fill cells;

GATECNT-snake-open-configured, NCEM-enabled fill cells;

V0-snake-open-configured, NCEM-enabled fill cells;

M1-snake-open-configured, NCEM-enabled fill cells;

V1-snake-open-configured, NCEM-enabled fill cells;

M2-snake-open-configured, NCEM-enabled fill cells;

V2-snake-open-configured, NCEM-enabled fill cells;

M3-snake-open-configured, NCEM-enabled fill cells;

AA-stitch-open-configured, NCEM-enabled fill cells;

TS-stitch-open-configured, NCEM-enabled fill cells;

AACNT-stitch-open-configured, NCEM-enabled fill cells;

GATECNT-stitch-open-configured, NCEM-enabled fill cells;

V0-stitch-open-configured, NCEM-enabled fill cells;

M1-stitch-open-configured, NCEM-enabled fill cells;

V1-stitch-open-configured, NCEM-enabled fill cells;

M2-stitch-open-configured, NCEM-enabled fill cells;

V2-stitch-open-configured, NCEM-enabled fill cells;

M3-stitch-open-configured, NCEM-enabled fill cells;

AACNT-AA-via-open-configured, NCEM-enabled fill cells;

TS-AA-via-open-configured, NCEM-enabled fill cells;

GATECNT-GATE-via-open, NCEM-enabled fill cells;

V0-GATECNT-via-open-configured, NCEM-enabled fill cells;

V0-AA-via-open-configured, NCEM-enabled fill cells;

V0-TS-via-open-configured, NCEM-enabled fill cells;

V0-AACNT-via-open-configured, NCEM-enabled fill cells;

V0-GATE-via-open-configured, NCEM-enabled fill cells;

V0-via-open-configured, NCEM-enabled fill cells;

M1-V0-via-open-configured, NCEM-enabled fill cells;

V1-M1-via-open-configured, NCEM-enabled fill cells;

V1-M2-via-open-configured, NCEM-enabled fill cells;

M1-GATECNT-via-open-configured, NCEM-enabled fill cells;

M1-AANCT-via-open-configured, NCEM-enabled fill cells;

V2-M2-via-open-configured, NCEM-enabled fill cells;

V2-M3-via-open-configured, NCEM-enabled fill cells;

M1-metal-island-open-configured, NCEM-enabled fill cells;

M2-metal-island-open-configured, NCEM-enabled fill cells;

M3-metal-island-open-configured, NCEM-enabled fill cells;

V0-merged-via-open-configured, NCEM-enabled fill cells;

V0-AACNT-merged-via-open-configured, NCEM-enabled fill cells;

V0-GATECNT-merged-via-open-configured, NCEM-enabled fill cells;

V1-merged-via-open-configured, NCEM-enabled fill cells;

V2-merged-via-open-configured, NCEM-enabled fill cells;

V1-M1-merged-via-open-configured, NCEM-enabled fill cells; and,

V2-M2-merged-via-open-configured, NCEM-enabled fill cells.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Oct 10, 2016
From: LAM, STEPHEN; CIPLICKAS, DENNIS; BROZEK, TOMASZ; CHENG, JEREMY; COMENSOLI, SIMONE; DE, INDRANIL; DOONG, KELVIN; EISENMANN, HANS; FISCUS, TIMOTHY; HAIGH, JONATHAN; HESS, CHRISTOPHER; KIBARIAN, JOHN; LEE, SHERRY; LIAO, MARCI; LIN, SHENG-CHE; MATSUHASHI, HIDEKI; MICHAELS, KIMON; O'SULLIVAN, CONOR; RAUSCHER, MARKUS; ROVNER, VYACHESLAV; STROJWAS, ANDRZEJ; STROJWAS, MARCIN; TAYLOR, CARL; VALLISHAYEE, RAKESH; WEILAND, LARG; YOKOYAMA, NOBUHARU
To: PDF SOLUTIONS, INC.
Reel/Frame 039975/0427 →