Heat treatable coated article with zirconium based layer(s) in coating
In certain example embodiments, a coated article includes a doped zirconium based layer before heat treatment (HT). The coated article is heat treated sufficiently to cause the doped zirconium oxide and/or nitride based layer to result in a doped zirconium oxide based layer that is scratch resistant and/or chemically durable. The doping of the layer has been found to improve scratch resistance.
1. A method of making a heat treated coated article, the method comprising:
sputter-depositing a tungsten oxycarbide doped layer comprising an oxide and/or nitride of zirconium on a glass substrate;
wherein said sputter-depositing of the tungsten oxycarbide doped layer comprising an oxide and/or nitride of zirconium includes sputtering a target comprising zirconium in the presence of at least a carbon inclusive gas;
thermally tempering the glass substrate with the tungsten oxycarbide doped layer comprising an oxide and/or nitride of zirconium sputtered thereon, so that after the tempering a layer comprising tungsten oxycarbide doped zirconium oxide is provided on the glass substrate.
2. The method of claim 1 , wherein the carbon inclusive gas comprises C 2 F 6 .
3. The method of claim 1 , further comprising sputter depositing a layer comprising silicon nitride on the glass substrate so as to be located between the glass substrate and the tungsten oxycarbide doped layer comprising an oxide and/or nitride of zirconium.
4. A method of making a coated article, the method comprising:
sputter-depositing a tungsten oxycarbide doped layer comprising a nitride of zirconium on a glass substrate;
wherein said sputter-depositing of the tungsten oxycarbide doped layer comprising the nitride of zirconium includes sputtering a target comprising zirconium;
thermally tempering the glass substrate with the tungsten oxycarbide doped layer comprising the nitride of zirconium sputtered thereon so that after said tempering a layer comprising tungsten oxycarbide doped zirconium oxide is provided on the glass substrate.
5. The method of claim 4 , further comprising sputter depositing a layer comprising silicon nitride on the glass substrate so as to be located between the glass substrate and the tungsten oxycarbide doped layer comprising the nitride of zirconium.
6. A method of making a heat treated coated article, the method comprising:
having a coated article comprising a tungsten oxycarbide doped layer comprising an oxide and/or nitride of zirconium on a glass substrate;
heat treating the coated article, including the glass substrate and the tungsten oxycarbide doped layer comprising an oxide and/or nitride of zirconium on the glass substrate, so that after the heat treating a layer comprising tungsten oxycarbide doped zirconium oxide is provided on the heat treated glass substrate.
7. The method of claim 6 , wherein said heat treating comprises thermal tempering the glass substrate.