Interconnections for a substrate associated with a backside reveal
View Patent ↗An apparatus relating generally to a substrate is disclosed. In this apparatus, a post extends from the substrate. The post includes a conductor member. An upper portion of the post extends above an upper surface of the substrate. An exterior surface of the post associated with the upper portion is in contact with a dielectric layer. The dielectric layer is disposed on the upper surface of the substrate and adjacent to the post to provide a dielectric collar for the post. An exterior surface of the dielectric collar is in contact with a conductor layer. The conductor layer is disposed adjacent to the dielectric collar to provide a metal collar for the post, where a top surface of each of the conductor member, the dielectric collar and the metal collar have formed thereon a bond structure for interconnection of the metal collar and the conductor member.
1. A method, comprising:
obtaining a substrate having a post extending therefrom;
the post including a conductor member;
an upper portion of the post extending above an upper surface of the substrate;
depositing a dielectric layer over the upper surface of the substrate and the upper portion of the post;
an exterior surface of the post associated with the upper portion being in contact with the dielectric layer;
the dielectric layer being disposed on the upper surface of the substrate and adjacent to the post to provide a dielectric collar for the post;
depositing a conductor layer over the dielectric layer;
an exterior surface of the dielectric collar being in contact with the conductor layer;
the conductor layer being disposed adjacent to the dielectric collar to provide a metal collar for the post entirely above the uppermost surface of the substrate;
a top surface of the conductive member being higher than a portion of the conductor layer;
polishing the conductor layer and the post to expose a top surface of the conductive member of the post to be co-planar with a top surface of the conductor layer;
depositing a bonding material onto the top surface of the conductive member and a top surface of each of the dielectric collar and the metal collar; and
the top surface of each of the conductor member, the dielectric collar and the metal collar having formed thereon a bond structure formed of the bonding material for interconnection of the metal collar and the conductor member.
2. The method according to claim 1 , wherein the conductor layer is a redistribution metal layer.
3. The method according to claim 1 , wherein the post is of a through-substrate-via.
4. The method according to claim 1 , wherein the dielectric layer is a combination of a first dielectric coating and a second dielectric coating.
5. The method according to claim 1 , further comprising:
depositing a sacrificial layer prior to the polishing;
wherein a top surface of the sacrificial layer is at least approximately level with the top surface of the conductor member.
6. A method, comprising:
obtaining a substrate having a post extending therefrom;
the post including a conductor member;
an upper portion of the post extending above an upper surface of the substrate;
depositing a dielectric layer over the upper surface of the substrate and the upper portion of the post;
an exterior surface of the post associated with the upper portion being in contact with the dielectric layer;
the dielectric layer being disposed on the upper surface of the substrate and adjacent to the post to provide a dielectric collar for the post;
depositing a conductor layer over the dielectric layer;
an exterior surface of the dielectric collar being in contact with the conductor layer;
the conductor layer being disposed adjacent to the dielectric collar to provide a metal collar for the post entirely above the uppermost surface of the substrate;
a top surface of the conductive member being higher than a portion of the conductor layer;
etching the conductor layer and the dielectric layer to provide an opening and to expose the top surface of the conductor member;
depositing a bonding material into the opening, onto the top surface of the conductive member, onto a top surface of the dielectric collar, and onto a top surface of the metal collar; and
the top surface of each of the conductor member, the dielectric collar and the metal collar having formed thereon a bond structure formed of the bonding material for interconnection of the metal collar and the conductor member.
7. The method according to claim 6 , wherein the etching comprises:
masking a portion of the conductor layer with a first mask;
removing a portion of the conductor layer responsive to the first mask;
masking to expose an uppermost surface of the post with a second mask; and
removing the dielectric layer responsive to the second mask to provide the opening and to expose the top surface of the conductor layer.
8. The method according to claim 6 , wherein:
the conductor layer is a redistribution layer; and
the post is of a through-substrate via.
9. The method according to claim 6 , wherein the etching comprises:
masking a portion of the conductor layer with a mask; and
removing a portion of the conductor layer and the dielectric layer responsive to the mask to provide the opening and to expose the top surface of the conductor layer.
10. The method according to claim 9 , further comprising:
depositing a polymer layer on the conductor layer;
wherein a portion of the metal collar and the bond structure are located above an uppermost surface of the polymer layer.