Silicon speaker
The present invention provides a silicon speaker comprising an MEMS acoustoelectric chip and a PCB substrate, wherein the MEMS acoustoelectric chip comprises a corrugated diaphragm on a silicon substrate; and one side surface of the MEMS acoustoelectric chip is metalized, and the metalized side surface of the MEMS acoustoelectric chip is connected with the PCB substrate. The corrugated diaphragm is electrically conductive and interconnected with metal paths on MEMS acoustoelectric chip, which is led out to a first PCB metal path as one electrode. A second PCB metal path below the MEMS chip forms another electrode of the electrostatic actuator. The silicon speaker provided by the present invention lowers manufacturing costs of the speaker, and allows the diaphragm to generate high and repeatable/reliable sound pressure upon large displacements so as to improve the sounding effects of the speaker.
1. A silicon speaker comprising an MEMS acoustoelectric chip and a PCB substrate, wherein
the MEMS acoustoelectric chip comprises a silicon substrate and a corrugated diaphragm provided at one side of the silicon substrate,
the corrugated diaphragm is provided between the PCB substrate and the silicon substrate,
metal paths are provided on the PCB substrate,
a portion of a surface of the corrugated diaphragm, which surface faces the PCB substrate is metalized through metal deposition and patterning, and the metalized portion is in contact with the metal paths on the PCB substrate, and
a portion of the metal paths are on an opposite side of a space from the corrugated diaphragm.
2. The silicon speaker according to claim 1 , wherein a dielectric protrusion is provided at the center of the corrugated diaphragm.
3. The silicon speaker according to claim 1 , wherein the corrugated diaphragm has at least one layer of conductive material therein.
4. The silicon speaker according to claim 1 , wherein the MEMS acoustoelectric chip is flip-chip mounted on the PCB substrate with flux-less process.
5. The silicon speaker according to claim 1 , wherein the PCB substrate is provided with an IC driver and/or a flip-chip thereon.
6. The silicon speaker according to claim 1 , further comprising a sealing cover which is attached onto the PCB substrate.
7. The silicon speaker according to claim 6 , when the sealing cover and the PCB substrate form a front chamber of the silicon speaker, an opening for transmitting sounds of the silicon speaker is provided at the top of the silicon speaker or on a side surface of the silicon speaker on the sealing cover.
8. The silicon speaker according to claim 6 , wherein at least one through hole is provided on the PCB substrate and the through hole is the opening for transmitting sounds of the silicon speaker.
9. The silicon speaker according to claim 8 , when the sealing cover and the PCB substrate form a back chamber of the silicon speaker, the opening is provided at the bottom of the silicon speaker.