IP Library Granted Patent US 10,598,622
Granted Patent B2
US 10,598,622 · App. 15/304,430 · Granted Mar 24, 2020

Permeability evaluation method

Inventors: Koji Suzumura (Tokyo, JP); Kazuhiro Yamamoto (Tokyo, JP); Tomoko Murahashi (Tokyo, JP)
Assignee: HITACHI CHEMICAL COMPANY, LTD.
G01N27/06C09J133/068G01N13/00G01N15/08G01N2013/003
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Quick Facts
Patent No.
US 10,598,622
App. No.
15/304,430
Granted
Mar 24, 2020
Kind
B2
Abstract

A permeability evaluation method for evaluating permeability of heavy metal ions through a specimen, comprising a step of, in a state in which a first liquid containing heavy metal ions and a second liquid containing water and an organic solvent are separated by a specimen, applying a voltage between a positive electrode provided on the side of the first liquid and a negative electrode provided on the side of the second liquid and measuring the value of the current flowing between the positive electrode and the negative electrode, wherein the specimen contains an insulating material used in semiconductor production, and the heavy metal ion concentration of the first liquid is 0.5 mg/kg or more.

Claims (44)

1. A permeability evaluation method for evaluating permeability of heavy metal ions through a specimen, comprising:

a step of, in a state in which a first liquid containing heavy metal ions provided in a first cell and a second liquid containing water and an organic solvent provided in a second cell are separated by a specimen, applying a voltage between a positive electrode provided in contact with the first liquid and a negative electrode provided in contact with the second liquid and measuring a value of a current flowing between the positive electrode and the negative electrode,

wherein the specimen contains an insulating material used in semiconductor production,

a heavy metal ion concentration of the first liquid is 0.5 mg/kg or more, and

evaluating the permeability of heavy metal ions based on the value of the current flowing between the positive electrode and the negative electrode.

2. The evaluation method according to claim 1 , wherein the second liquid contains N-methyl-2-pyrrolidone as the organic solvent.

3. The evaluation method according to claim 2 , wherein a content of N-methyl-2-pyrrolidone of the second liquid is 20% by mass or more and 80% by mass or less.

4. The evaluation method according to claim 1 , wherein an electrical conductivity of the second liquid is 1 μS or more at 23° C.

5. The evaluation method according to claim 1 , wherein the first liquid contains copper ions as the heavy metal ions.

6. The evaluation method according to claim 5 , wherein a copper ion concentration of the first liquid is 0.5 to 50000 mg/kg.

7. The evaluation method according to claim 1 , wherein the insulating material used in semiconductor production is adhesive tape for a semiconductor.

8. A permeability evaluation method for evaluating permeability of heavy metal ions through a specimen, comprising:

a step of, in a state in which a first liquid containing heavy metal ions provided in a first cell and a second liquid containing water and an organic solvent provided in a second cell are separated by a specimen, and, after applying a voltage between a positive electrode provided in contact with the first liquid and a negative electrode provided in contact with the second liquid, measuring a heavy metal ion concentration of the second liquid,

wherein the specimen contains an insulating material used in semiconductor production, and

a heavy metal ion concentration of the first liquid is 0.5 mg/kg or more, and

evaluating the permeability of heavy metal ions based on the value of the heavy metal ion concentration of the second liquid.

9. The evaluation method according to claim 8 , wherein the second liquid contains N-methyl-2-pyrrolidone as the organic solvent.

10. The evaluation method according to claim 9 , wherein a content of N-methyl-2-pyrrolidone of the second liquid is 20% by mass or more and 80% by mass or less.

11. The evaluation method according to claim 8 , wherein an electrical conductivity of the second liquid is 1 μS or more at 23° C.

12. The evaluation method according to claim 8 , wherein the first liquid contains copper ions as the heavy metal ions.

13. The evaluation method according to claim 12 , wherein a copper ion concentration of the first liquid is 0.5 mg/kg to 50000 mg/kg.

14. The evaluation method according to claim 8 , wherein the insulating material used in semiconductor production is adhesive tape for a semiconductor.

15. A permeability evaluation method for evaluating permeability of heavy metal ions through a specimen, comprising:

a step of, in a state in which a first liquid containing heavy metal ions and a second liquid containing water and an organic solvent are provided in a cell and separated by a specimen, applying a voltage between a positive electrode provided in contact with the first liquid and a negative electrode provided in contact with the second liquid and measuring a value of a current flowing between the positive electrode and the negative electrode,

wherein the specimen contains an insulating material used in semiconductor production,

a heavy metal ion concentration of the first liquid is 0.5 mg/kg or more, and

evaluating the permeability of heavy metal ions based on the value of the current flowing between the positive electrode and the negative electrode.

16. The evaluation method according to claim 15 , wherein the second liquid contains N-methyl-2-pyrrolidone as the organic solvent.

17. The evaluation method according to claim 16 , wherein a content of N-methyl-2-pyrrolidone of the second liquid is 20% by mass or more and 80% by mass or less.

18. The evaluation method according to claim 15 , wherein an electrical conductivity of the second liquid is 1 μS or more at 23° C.

19. The evaluation method according to claim 15 , wherein the first liquid contains copper ions as the heavy metal ions.

20. The evaluation method according to claim 19 , wherein a copper ion concentration of the first liquid is 0.5 to 50000 mg/kg.

21. The evaluation method according to claim 15 , wherein the insulating material used in semiconductor production is adhesive tape for a semiconductor.

22. A permeability evaluation method for evaluating permeability of heavy metal ions through a specimen, comprising:

a step of, in a state in which a first liquid containing heavy metal ions and a second liquid containing water and an organic solvent are provided in a cell and separated by a specimen, and, after applying a voltage between a positive electrode provided in contact with the first liquid and a negative electrode provided in contact with the second liquid, measuring a heavy metal ion concentration of the second liquid,

wherein the specimen contains an insulating material used in semiconductor production, and

a heavy metal ion concentration of the first liquid is 0.5 mg/kg or more, and

evaluating the permeability of heavy metal ions based on the value of the heavy metal ion concentration of the second liquid.

23. The evaluation method according to claim 22 , wherein the second liquid contains N-methyl-2-pyrrolidone as the organic solvent.

24. The evaluation method according to claim 23 , wherein a content of N-methyl-2-pyrrolidone of the second liquid is 20% by mass or more and 80% by mass or less.

25. The evaluation method according to claim 22 , wherein an electrical conductivity of the second liquid is 1 μS or more at 23° C.

26. The evaluation method according to claim 22 , wherein the first liquid contains copper ions as the heavy metal ions.

27. The evaluation method according to claim 26 , wherein a copper ion concentration of the first liquid is 0.5 to 50000 mg/kg.

28. The evaluation method according to claim 22 , wherein the insulating material used in semiconductor production is adhesive tape for a semiconductor.

Assignments (4)
CHANGE OF ADDRESS Recorded Feb 14, 2024
From: RESONAC CORPORATION
To: RESONAC CORPORATION
Reel/Frame 066599/0037 →
CHANGE OF NAME Recorded Mar 3, 2023
From: SHOWA DENKO MATERIALS CO., LTD.
To: RESONAC CORPORATION
Reel/Frame 062946/0125 →
CHANGE OF NAME Recorded Mar 2, 2023
From: HITACHI CHEMICAL COMPANY, LTD.
To: SHOWA DENKO MATERIALS CO., LTD.
Reel/Frame 062917/0865 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jun 26, 2017
From: SUZUMURA, KOJI; YAMAMOTO, KAZUHIRO; MURAHASHI, TOMOKO
To: HITACHI CHEMICAL COMPANY, LTD.
Reel/Frame 042818/0858 →
Continuity (1)
Related Publication 20170038324A1 · Feb 9, 2017