Semiconductor device and method for manufacturing same
The semiconductor device according to the present invention has an upper electrode, a first lower layer wiring that also functions as a lower electrode, an electrical resistance-changing film interposed between the upper electrode and the first lower layer wiring, a second lower layer wiring, and a contact plug, the contact plug connecting to the upper electrode and to the second lower layer wiring. The present invention yields a semiconductor device with which it is possible to dispose elements in high density while maintaining the reliability and manufacturing yield of the electrical resistance-changing element.
1. A semiconductor device including:
an upper electrode;
a first lower-layer wiring also used as a lower electrode;
a resistance-changing film interposed between the upper electrode and the first lower-layer wiring;
a second lower-layer wiring; and
a contact plug,
wherein the contact plug connects to the upper electrode and the second lower-layer wiring,
wherein the upper electrode includes a first upper electrode in contact to the resistance-changing film, and a second upper electrode in contact to the first upper electrode on a surface opposite to the resistance-changing film, and
wherein the first upper electrode includes ruthenium, and the second upper electrode includes tantalum, titanium, or a nitrogen compound thereof.
2. A semiconductor device according to claim 1 , including an interlayer insulation film between the first lower-layer wiring and the second lower-layer wiring, and
including a first insulation barrier film on the first lower-layer wiring, the second lower-layer wiring, and the interlayer insulation film,
wherein the first insulation barrier film includes an opening portion on at least the first lower-layer wiring,
wherein the resistance-changing film is in contact to at least the first lower-layer wiring in the opening portion.
3. A semiconductor device according to claim 1 , wherein the side surface of the contact plug is in contact to at least a portion of both the side surface of the upper electrode and the side surface of the resistance-changing film.
4. A semiconductor device according to claim 1 , wherein a second insulation barrier film is interposed at least partially between the side surface of the upper electrode and the contact plug.
5. A semiconductor device according to claim 4 , wherein the second insulation barrier film includes a SiN film.
6. A semiconductor device according to claim 1 , wherein the contact plug is a contact plug of a slit type integrated with an upper-layer wiring.
7. A semiconductor device according to claim 1 , wherein the resistance-changing film includes a solid electrolyte.
8. A method for manufacturing a semiconductor device, including:
forming a first lower-layer wiring and a second lower-layer wiring on a first interlayer insulation film formed on a semiconductor substrate;
forming a first insulation barrier film on the first lower-layer wiring, the second lower-layer wiring, and the first interlayer insulation film, the first insulation barrier film having an opening portion through which at least the first lower-layer wiring is exposed;
forming, through the opening portion, a resistance-changing film and an upper electrode successively on at least the first lower-layer wiring;
forming a second insulation barrier film on at least side surface of the upper electrode;
forming a second interlayer insulation film on the second insulation barrier film;
forming a via-hole through the second interlayer insulation film and the second insulation barrier film, to expose the upper electrode and the second lower-layer wiring at the bottom of the via-hole; and
forming, in the via-hole, a contact plug connecting the upper electrode and the second lower-layer wiring.
9. A semiconductor device including an upper electrode, a first lower-layer wiring also used as a lower electrode, a resistance-changing film interposed between the upper electrode and the first lower-layer wiring and directly connected to the upper electrode and the first lower-layer wiring, a second lower-layer wiring, and a contact plug, wherein the contact plug directly connects to the upper electrode and the second lower-layer wiring.
10. A semiconductor device according to claim 9 , including an interlayer insulation film between the first lower-layer wiring and the second lower-layer wiring, and
including a first insulation barrier film on the first lower-layer wiring, the second lower-layer wiring, and the interlayer insulation film,
wherein the first insulation barrier film includes an opening portion on at least the first lower-layer wiring,
wherein the resistance-changing film is in contact to at least the first lower-layer wiring in the opening portion.
11. A semiconductor device according to claim 9 , wherein the side surface of the contact plug is in contact to at least a portion of both the side surface of the upper electrode and the side surface of the resistance-changing film.
12. A semiconductor device according to claim 9 , wherein a second insulation barrier film is interposed at least partially between the side surface of the upper electrode and the contact plug.
13. A semiconductor device according to claim 12 , wherein the second insulation barrier film includes a SiN film.
14. A semiconductor device according to claim 9 , wherein the upper electrode includes ruthenium.
15. A semiconductor device according to claim 9 , wherein the upper electrode includes a first upper electrode in contact to the resistance-changing film, a second upper electrode in contact to a the first upper electrode on the surface opposite to the resistance-changing film, wherein the first upper electrode includes ruthenium, wherein the second upper electrode includes tantalum, titanium, or a nitrogen compound thereof.
16. A semiconductor device according to claim 9 , wherein the contact plug is a contact plug of a slit type integrated with an upper-layer wiring.
17. A semiconductor device according to claim 9 , wherein the resistance-changing film includes a solid electrolyte.