Transducer element and MEMS microphone
The present application relates to a transducer element ( 1 ) which comprises: a movable diaphragm ( 2, 2 a, 2 b ) which has a border ( 4 ), a frame ( 5 ) to which the border ( 4 ) of the diaphragm ( 2, 2 a, 2 b ) is attached, and a reinforcement element ( 10 ) which connects to one another a first sub-section of the frame ( 5 ) and a second sub-section of the frame ( 5 ) which lies opposite the first sub-section.
1. A transducer element comprising
a movable diaphragm which has a border,
a frame to which the border of the diaphragm is attached, and
a reinforcement element which connects to one another a first sub-section of the frame and a second sub-section of the frame which lies opposite the first sub-section,
wherein the reinforcement element has a height corresponding to the height of the frame minus a minimum distance between the reinforcement element and the movable diaphragm, wherein the first sub-section of the frame and the second sub-section of the frame extend from a lower edge of the frame, which is arranged on a side pointing away from the diaphragm, as far as a height corresponding to the height of the frame minus a minimum distance between the reinforcement element and the diaphragm, such that the reinforcement element ensures that the first sub-section and the second sub-section of the frame are at the same distance from one another along the entire height of the reinforcement element.
2. The transducer element according to claim 1 ,
wherein the reinforcement element has a height which is less than a height of the frame.
3. The transducer element according to claim 1 , wherein the reinforcement element and the frame are composed of the same material.
4. The transducer element according to claim 1 ,
wherein the reinforcement element connects to one another a third sub-section of the frame and a fourth sub-section of the frame which lies opposite the third sub-section.
5. The transducer element according to claim 1 ,
wherein the reinforcement element is in the shape of a strip.
6. The transducer element according to claim 1 , wherein the reinforcement element is in the shape of a cross.
7. The transducer element according to claim 1 , wherein the reinforcement element is in the shape of a star.
8. The transducer element according to claim 1 , wherein the diaphragm is elliptical or rectangular.
9. The transducer element according to claim 1 , wherein the reinforcement element has a height between 150 μm and 700 μm.
10. An MEMS microphone having a transducer element according to claim 1 .
11. The transducer element according to claim 1 ,
wherein the transducer element comprises a fixed back plate and wherein the reinforcement element is arranged on a side of the diaphragm opposite of the fixed back plate.
12. The transducer element according to claim 1 ,
wherein the frame is composed of silicon.
13. The transducer element according to claim 2 ,
wherein the reinforcement element connects to one another a third sub-section of the frame and a fourth sub-section of the frame which lies opposite the third sub-section.
14. The transducer element according to claim 3 ,
wherein the reinforcement element connects to one another a third sub-section of the frame and a fourth sub-section of the frame which lies opposite the third sub-section.
15. The transducer element according to claim 14 , wherein the reinforcement element and the frame are composed of the same material.
16. The transducer element according to claim 2 , wherein the reinforcement element is in the shape of a strip or of a cross or of a star.
17. The transducer element according to claim 2 , wherein the diaphragm is elliptical or rectangular.
18. The transducer element according to claim 2 , wherein the reinforcement element has a height between 150 μm and 700 μm.
19. The transducer element according to claim 13 , wherein the reinforcement element has a height between 150 μm and 700 μm.