Flexible TFT substrate having a plurality of grooves in organic material
View Patent ↗The invention provides a flexible TFT substrate and manufacturing method thereof. The method forms a flexible base and a first organic layer on rigid substrate and forms a plurality of grooves, manufactures TFT devices in the grooves and forms a second organic layer on the first organic layer, finally peels the flexible base from the rigid substrate to obtain a flexible TFT substrate, wherein because a plurality of grooves is disposed in the first organic layer, a plurality of recessed structures and raised structures are formed on the first organic layer so that the second organic layer and the first organic layer are engaged with each other and bonded tightly, and protects the TFT devices sandwiched between the two to prevent the breaking wires, TFT peeling, and leaking light in the bending process, to enhance the flexible TFT substrate quality to prolong the lifespan of flexible TFT substrate.
1. A manufacturing method of flexible thin film transistor (TFT) substrate, which comprises:
Step 1: providing a rigid substrate, coating a first organic material on the rigid substrate to form a flexible base;
Step 2: coating a second organic material on the flexible base to form a first organic layer, performing patterning on the first organic layer with a halftone mask to form a plurality of first grooves, a plurality of second grooves, a plurality of third grooves and a plurality of fourth grooves; wherein the first grooves intersecting with the second grooves, the third grooves connected respectively to the first grooves and the second grooves, and the fourth grooves connected to the third grooves;
Step 3: forming a scan line in each first groove, forming a gate in the third groove, the gate being connected to the scan line;
forming a gate insulation layer on the scan line and the gate;
forming an active layer on the gate insulation layer at location corresponding to above the gate;
forming a data line in each second groove, forming a source and a drain in the third groove, the source connected to the data line, the source and the drain connected respectively to the two sides of the active layer;
forming a passivation layer on the data line, the source, the drain, the active layer and bottom of the fourth groove, forming a first via on the passivation layer at location corresponding to above the drain;
forming a pixel electrode on the passivation layer at location corresponding to above the bottom of the fourth groove, the pixel electrode contacting the drain through the first via;
Step 4: coating a third organic material on the first organic layer to form a second organic layer;
Step 5: peeling the flexible base from the rigid substrate to obtain a flexible TFT substrate.
2. The manufacturing method of flexible TFT substrate as claimed in claim 1 , wherein the bottoms of the first groove, the second groove, the third groove and the fourth groove are located in the first organic layer or the interface between the flexible base and the first organic layer, the first groove, the second groove, the third groove and the fourth groove have the same or different depth.
3. The manufacturing method of flexible TFT substrate as claimed in claim 1 , wherein Step 2 further comprises: forming a plurality of fifth grooves on the first organic layer, the fifth grooves being connected to none, one or more of the first groove, the second groove, the third groove and the fourth groove, the bottom of the fifth groove being located in the first organic layer or the interface between the flexible base and the first organic layer, and the fifth groove having the same with none, one or more of the first groove, the second groove, the third groove and the fourth groove.
4. The manufacturing method of flexible TFT substrate as claimed in claim 1 , wherein the first organic material, the second organic material and the third organic material comprise respectively at least one of polycarbonate, polyethylene terephthalate, polyethylene naphthalate, polyether resin, and polyimide; and
the first organic material is the same as the second organic material, the coating process in Step 1 is the same as the coating process in Step 2.
5. The manufacturing method of flexible TFT substrate as claimed in claim 1 , wherein Step 4 further comprises; performing patterning on the second organic layer with a halftone mask to form a sixth groove on the second organic layer at location corresponding to above the pixel electrode, thinning the thickness of the second organic layer above the pixel electrode.
6. A manufacturing method of flexible thin film transistor (TFT) substrate, which comprises:
Step 1: providing a rigid substrate, coating a first organic material on the rigid substrate to form a flexible base;
Step 2: coating a second organic material on the flexible base to form a first organic layer, performing patterning on the first organic layer with a halftone mask to form a plurality of first grooves, a plurality of second grooves, a plurality of third grooves and a plurality of fourth grooves: wherein the first grooves intersecting with the second grooves, the third grooves connected respectively to the first grooves and the second grooves, and the fourth grooves connected to the third grooves;
Step 3: forming a scan line in each first groove, forming a gate in the third groove, the gate being connected to the scan line;
forming a gate insulation layer on the scan line and the gate;
forming an active layer on the gate insulation layer at location corresponding to above the gate;
forming a data line in each second groove, forming a source and a drain in the third groove, the source connected to the data line, the source and the drain connected respectively to the two sides of the active layer;
forming a passivation layer on the data line, the source, the drain, the active layer and bottom of the fourth groove, forming a first via on the passivation layer at location corresponding to above the drain;
forming a pixel electrode on the passivation layer at location corresponding to above the bottom of the fourth groove, the pixel electrode contacting the drain through the first via;
Step 4: coating a third organic material on the first organic layer to form a second organic layer;
Step 5: peeling the flexible base from the rigid substrate to obtain a flexible TFT substrate;
wherein the bottoms of the first groove, the second groove, the third groove and the fourth groove being located in the first organic layer or the interface between the flexible base and the first organic layer, the first groove, the second groove, the third groove and the fourth groove having the same or different depth;
wherein Step 2 further comprising: forming a plurality of fifth grooves on the first organic layer, the fifth grooves being connected to none, one or more of the first groove, the second groove, the third groove and the fourth groove, the bottom of the fifth groove being located in the first organic layer or the interface between the flexible base and the first organic layer, and the fifth groove having the same with none, one or more of the first groove, the second groove, the third groove and the fourth groove.
7. The manufacturing method of flexible TFT substrate as claimed in claim 6 , wherein the first organic material, the second organic material and the third organic material comprise respectively at least one of polycarbonate, polyethylene terephthalate, polyethylene naphthalate, polyether resin, and polyimide; and
the first organic material is the same as the second organic material, the coating process in Step 1 is the same as the coating process in Step 2.
8. The manufacturing method of flexible TFT substrate as claimed in claim 6 , wherein Step 4 further comprises: performing patterning on the second organic layer with a halftone mask to form a sixth groove on the second organic layer at location corresponding to above the pixel electrode, thinning the thickness of the second organic layer above the pixel electrode.