Laminated body and electronic device
A laminated body includes: a substrate portion composed of silicon carbide; and a graphene film disposed on a first main surface of the substrate portion, the graphene film having an atomic arrangement oriented with respect to an atomic arrangement of the silicon carbide of the substrate portion. A region in which a value of G′/G in Raman spectrometry is not less than 1.2 is not less than 10% in an area ratio in an exposed surface of the graphene film, the exposed surface being a main surface of the graphene film opposite to the substrate portion.
1. A laminated body comprising:
a substrate portion composed of silicon carbide; and
a graphene film disposed on a first main surface of the substrate portion, the graphene film having an atomic arrangement oriented with respect to an atomic arrangement of the silicon carbide of the substrate portion,
a region in which a value of G′/G in Raman spectrometry is not less than 1.2 being not less than 10% of the area of an exposed surface of the graphene film, the exposed surface being a main surface of the graphene film opposite to the substrate portion,
the substrate portion has a disc-like shape, and
the substrate portion has a diameter of not less than 50 mm.
2. The laminated body according to claim 1 , wherein the graphene film covers not less than 95% of the first main surface of the substrate portion.
3. The laminated body according to claim 1 , wherein the graphene film has a carrier mobility of not less than 5000 cm2/Vs.
4. A laminated body comprising:
a substrate portion composed of silicon carbide; and
a graphene film disposed on a first main surface of the substrate portion, the graphene film having an atomic arrangement oriented with respect to an atomic arrangement of the silicon carbide of the substrate portion,
a region in which a value of GIG in Raman spectrometry is not less than 1.2 being not less than 10% of the area of an exposed surface of the graphene film, the exposed surface being a main surface of the graphene film opposite to the substrate portion,
the graphene film covering not less than 95% of the first main surface of the substrate portion,
the graphene film having a carrier mobility of not less than 5000 cm2/Vs,
the substrate portion having a disc-like shape,
the substrate portion having a diameter of not less than 50 mm.
5. An electronic device comprising:
the laminated body recited in claim 1 ;
a first electrode formed in contact with the exposed surface of the laminated body; and
a second electrode formed in contact with the exposed surface of the laminated body and formed to be separated from the first electrode.