Liquid crystal display device and manufacturing method thereof
A liquid crystal display device includes a gate electrode, a first insulating film, an element layer, a first transparent electrode, and a second transparent electrode. The first insulating film includes a part that covers the gate electrode. The element layer is directly disposed on the first insulating film, includes a channel region that faces the gate electrode across the first insulating film, and is made of a transparent oxide. The first transparent electrode is directly disposed on the first insulating film while being separated from the element layer, and has the same metal composition as the metal composition of the element layer. The second transparent electrode forms a storage capacitance with the first transparent electrode by facing the first transparent electrode while being electrically insulated from the first transparent electrode.
1. A liquid crystal display device comprising:
a gate electrode;
a first insulating film that includes a part that covers said gate electrode;
an element layer that is directly disposed on said first insulating film, that includes a channel region that faces said gate electrode across said first insulating film, and that is made of a transparent oxide;
a first transparent electrode that is directly disposed on said first insulating film while being separated from said element layer, and that has a same metal composition as a metal composition of said element layer; and
a second transparent electrode that forms a storage capacitance with said first transparent electrode by facing said first transparent electrode while being electrically insulated from said first transparent electrode.
2. The liquid crystal display device according to claim 1 ,
wherein said element layer includes a first end portion and a second end portion that are separated from each other by said channel region, and
wherein said liquid crystal display device further comprises a second insulating film including a part that covers said channel region of said element layer and a part that separates said first transparent electrode and said second transparent electrode, said second insulating film being provided with a first opening portion that exposes said first end portion and a second opening portion that exposes said second end portion.
3. The liquid crystal display device according to claim 2 , wherein said second insulating film is thinner than said first insulating film.
4. The liquid crystal display device according to claim 1 , wherein a resistance of said first transparent electrode is lower than a resistance of said channel region of said element layer.
5. The liquid crystal display device according to claim 1 , wherein an electron carrier concentration of said first transparent electrode is higher than an electron carrier concentration of said channel region of said element layer.
6. A liquid crystal display device comprising:
a gate electrode;
a first insulating film that includes a part that covers said gate electrode;
an element layer that is disposed on said first insulating film, that includes a channel region that faces said gate electrode across said first insulating film, and that is made of a transparent oxide;
a first transparent electrode that is disposed on said first insulating film and in a same layer with said element layer while being separated from said element layer, and that has a same metal composition as a metal composition of said element layer; and
a second transparent electrode that forms a storage capacitance with said first transparent electrode by facing said first transparent electrode while being electrically insulated from said first transparent electrode.
7. A manufacturing method of a liquid crystal display device, comprising the steps of:
forming a gate electrode to each of a plurality of pixels;
forming a first insulating film that includes a part that covers said gate electrode;
depositing a transparent oxide layer on said first insulating film;
forming, from said transparent oxide layer, an element layer that includes a channel region that faces said gate electrode across said first insulating film, and a first transparent electrode that is separated from said element layer; and
forming a second transparent electrode that forms a storage capacitance with said first transparent electrode by facing said first transparent electrode while being electrically insulated from said first transparent electrode;
wherein forming said element layer and said first transparent electrode includes reducing a resistance of said first transparent electrode by irradiating said first transparent electrode with energy rays.
8. The manufacturing method of the liquid crystal display device according to claim 7 , wherein forming said element layer and said first transparent electrode includes
forming, on said transparent oxide layer, a mask layer with patterns corresponding to said element layer and said first transparent electrode, and
patterning said transparent oxide layer by using said mask layer.
9. The manufacturing method of the liquid crystal display device according to claim 7 , wherein, in reducing a resistance of said first transparent electrode, said channel region of said element layer is shielded from said energy rays by said gate electrode.